石墨烯生长设?TCVD)- 配备热壁石英管和LabVIEW自动控制软件、/p>
技术规格如下：
1. 石英管及工艺 QUARTZ TUBE & FURNACE
- Tube Dimensions: 100*1200mm
- Furnace Body (WxHxD): 500x500x350
- Heater: Kanthal Wire w/ Glass Wool Molding
- Maximum Temperature: 1?00C
- Thermocouple: K type ID 6.5 mm
- Heating Zone: 1-zone 100*350mm
- Linear Motion Control Unit
- Manual Furnace Door
2. 气路 GAS SUPPLY UNIT
- Three (3) Mass Flow Controllers w/ 1% FS Accuracy
a) Hydrogen (H2) 100sccm
b) Methane (CH4) 200sccm
c) Argon (Ar): 1?00sccm
- Open Mounting Bay for Fourth (4th) MFC
- 0.25 Stainless Steel Tubing
- Five (5) 0.25 Pneumatic-Type Diaphragm Valves
3. 真空及压力控 VACUUM & PRESSURE CONTROL UNIT
- Convection Gauge
- Convection Gauge Controller
- 10 Torr Capacitance Manometer
- Motor-Geared Throttle Valve
- Pressure & Flow Controller
- Oil Rotary Pump (340L/M)
4. 系统控制单元 SYSTEM CONTROL UNIT
- MS Windows 7 Embedded PC
- PLC Module with National Inst. LabVIEW Interface
- 19 LCD Monitor
5. 安全及冷 SAFETY & COOLING
- Water Cooled End Flanges
- Buzzer Alarm & System Error Display
- Interlock System
6. 设备尺寸及实验室要求 DIMENSIONS & UTILITY REQUIREMENTS
- Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)
- Weight: ~200kg
- Power: 220V 50/60Hz 3 4-wire 30A
- Air: 4-5kgf/cm2 0.25 tube
- Water: 2-3kgf/cm2 0.25 tube
参考用户：
剑桥大学，牛津大学，曼彻斯特大学，莱斯大学，斯坦福大学，新加坡国立大学，东京技术研究所，东京大学，韩国东国大学?..
