Model

DM69

DM88

DM97-08

DM97-15

DM241

DM277

DM468

DM820

Number of actuators

69

88

97

97

241

277

468

820

Pupil diameter

10.5 mm

20.0 mm

7.2 mm

13.5 mm

37.5 mm

24.5 mm

33.0 mm

45.0 mm

Pitch

1.5 mm

2.5 mm

0.8 mm

1.5 mm

2.5 mm

1.5 mm

Maximum mirror best flat in close loop

7.0 nm RMS (no print through effects)

Minimum tip/tilt stroke (PV� wavefront)

60 ��m

40 ��m

80 ��m

60 ��m

40 ��m

15 ��m

Minimum focus/astig. stroke (PV� wavefront)

40 ��m

30 ��m

40 ��m

40 ��m

30 ��m

10 ��m

Minimum 3x3 stroke (PV� wavefront)

> 25 ��m

> 10 ��m

Maximum settling time (at +/-1 0%)

800 ��s

1.6 ms

800 ��s

1.6 ms

500 ��s

Minimum bandwidth*

> 750 Hz

> 400 Hz

> 750 Hz

> 400 Hz

> 2 000 Hz

Minimum frequency at phase lag of 45��

> 500 Hz

> 300 Hz

> 500 Hz

> 300 Hz

> 1 500 Hz

Hysteresis error

<2%

Nonlinearity error

<3%

Coating*

银膜R>96.5%@0.5��m~2��m

Operating temperature

-10 to 35��C