美国OAI光功率计（Exposure Analyzer（�/p>

MODEL 358

This instrument is designed for use with the ASM High Intensity� Canon� Nikon� and Ultratech High Intensity Wafer Steppers. The microprocessor based Model 358 Exposure Analyzer performs measurement� storage and recall of nine series of readings. Reads intensity� energy� and time (1600 mW/cm2� 4000 mJ/cm2� 2.5 seconds maximum). For 365� 400� 420� and 436 nm wavelengths. Other wavelengths are available

APPLICATION

Perfect for a wide variety of industries where the precision measurement of UV energy is essential� the Model 358 is designed for any application requiring repeatable� reliable UV measurement.

FEATURES

? Digital Display provides clear measurements traceable to NIST

? Measures Intensity� Time� and Energy

? Records % deviation over a series of exposures

? Probe wavelength display helps prevent errors in setup

? Simple push button operation provides reliable results

? RS 232 output enables download/record of analyzer measurement results

? Detachable probes to match the spectral response of many photoresists

? Display readings can be frozen

? Front panel reminders prompt the user

? Rugged aluminum case features handle and probe pouch for portability