1. |
设备名称9/strong> |
霍尔效应测试?/strong> |
2. |
功能描述9/strong> |
测量半导体薄膜中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数 |
3. |
技术参数: |
3-1 |
测试范围9/strong> |
Si SiGe SiC GaAs InGaAs InP GaN (N Type & P Type)等材质的半导体薄膜中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数 |
3-2 |
磁场9/strong> |
3-2-1 |
磁场强度9/strong> |
1T 电磁佒/strong> |
3-2-2 |
磁场类型9/strong> |
电磁佒/strong> |
3-2-3 |
磁场均匀性: |
磁场不均匀性<1 % 10年内磁场变化?#177;0.2% |
3-3 |
度: |
3-3-1 |
温度区域9/strong> |
77K(液氮温度)或室?/strong> |
3-4 |
电阻率范围: |
1 ? Ohm*cm ~10 M Ohm*cm |
3-5 |
电阻范围9/strong> |
0.1 m Ohms ~10 G Ohms |
3-6 |
载流子浓度: |
107~1021cm-3 |
3-7 |
迁移率: |
10-2~107cm2/volt*sec |
3-8 |
输入电流9/strong> |
3-8-1 |
电流范围9/strong> |
1000 pA~10mA |
3-8-2 |
电流解析度: |
25 pA (lowest range) |
3-8-3 |
电流精度9/strong> |
2% |
3-9 |
输入电压9/strong> |
3-9-1 |
电压范围9/strong> |
10V |
3-9-2 |
电压分辨率: |
1V |
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4. |
仪器特点9/strong> |
4-1 |
Automatic contact check 自动接触检?欧姆接触) |
4-2 |
Routine and enhanced software 常规和增强软仵/strong> |
4-3 |
Differential resistivity measurements by I/V-curves I/V曲线测试电阻率差弁/strong> |
4-4 |
Misalignment voltage compensation 失调电压补偿 |
4-5 |
Correction of slow sample drift voltage especially for ZnO+/p> 修正慢样品漂移电压,特别是氧化锌 |
4-6 |
Automatic field calibration 自动现场标定 |
4-7 |
Large concentration and resistivity range 大浓度和电阻率范図/strong> |
4-8 |
Flexible modular hardware 灵活的模块化硬件 |
4-9 |
Support of various magnets for example BioRad HL 5200 支持多样磁场 |
4-10 |
Support of various temperature controllers 支持各种温度控制?支持客户自行升级变温系统) |
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5 |
硬件 |
5-1 |
The standard system consists of a bench top electronic system a small magnet and a sample stage for room temperature and LN2 measurements. 标准系统包含电子测试系统、磁场和两个温度区域的测试平台(室温和液氮温度) |
5-2 |
The electronics include the current source the voltage measurement part the contact switching module and the IEEE or RS232 interface. It is completely micro processor controlled. 电子测试系统包括由单片机控制的电流源、电压测试、接触开关模块、IEEE或RS232接口 |
5-3 |
The contact switching module is designed to allow all possible measurement configurations. 接触开关模块支持所有用户用于其他的配置(用户可以采用制冷机做变温霍尔测试) |
5-4 |
The current source has adjustable limits for voltage and/or power. {+++} 电流源具有可调电压和/或电源的限制 |
5-5 |
Voltage measurement provides different input amplifiers optimized for either low current or low voltage applications. 电压测量提供了不同的输入放大器或低电流或低电压应用的优化、/strong> |