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用于SEM的主动式压电陶瓷振动消除地板式平?/strong>
STACIS iX SEM-Base主动式压电陶瓷地板式隔振平台是专为扫描电子显微镜所设计的。扫描电子显微镜是振?敏感的仪器,而且这些精密仪器都有内置的隔振系统,SEM-Base可以兼容SEM内部预装的振动隔离系统、/p>
SEM-Base是可以替?5系列STACIS 2100地板式平台的简洁且性价比高的选择。它集成了STACIS技术但是外形更小,且安装更加简单、/p>
SEM-Base可以从低?Hz开始隔离振动。SEM-Base只有6.5in.高,底座尺寸?5.5in.x44.5in.,自重约?50磅,可以支撑900磅(409kg)到2500磅(1134kg)的负载、/p>
特性:
1、包含STACIS技?/p>
2、主动的内部振动消除装置
3、适合大部分商业SEMs。(35.5*44.5*6.5inch(/p>
4、负载容量:900-2500lb
5、振动消除起始频率小?Hz
6、六自由?/p>
8、安装容昒/p>
9、兼容所有内置振动隔离系绞/p>
10、非气浮系统
11、简单,鲁棒性好,性价比高
12、可安装脚轮,轻松携带移动,不需要搬迏/p>
Specifications-
Performance Specifications
Active degrees of freedom |
6 |
Active bandwidth |
0.6 Hz - 100 Hz |
Passive natural frequency |
12 Hz nominal |
Effective active resonant frequency |
0.5 Hz |
Isolation at 1 Hz |
40% - 70% |
Isolation at 2 Hz |
90% |
Isolation at ? Hz |
90-98% |
Internal noise |
<0.1 nm RMS |
Operating load range |
Standard capacity: 900 - 2?00 lbs (408 - 1134 kg) High capacity: 2?00 - 3?00 lbs (1134 - 1452 kg) |
Static lift capacity |
12?00 lbs (5454 kg) |
Magnetic field emitted at maximum 4 in.(102 mm) from the platform |
<0.02 G broadband RMS |
Design Dimensions and Environmental and Utility Requirements
Environmental and safety |
CE and RoHS compliant |
Active isolation elements |
high-force piezoelectric actuators that receive signal from a high-voltage amplifier with an output of up to 800 VDC |
Passive isolation element |
single stiff elastomer (no compressed air supply required) |
Vibration sensor elements |
downward facing geophone type inertial sensors that measure floor vibration below the isolator and deliver voltage proportional to the velocity of vibration motion |
Active feedback control loop |
Floor vibration is measured processed and attenuated below the spring supporting the isolated surface |
Dimensions (WxD) |
35.25 x 44.25 in. 895 x 1124 mm |
Height |
6.3 in. (160 mm) nominal+/p> doesn't change when SEM-Base is switched off |
Operating temperature |
50 - 90 F 10 - 32 C |
Storage temperature |
-40 - 130 F -40 - 55 C |
Humidity (operating) |
30 - 60% |
System power requirements |
100 120 230 240 VAC 50/60 Hz AC; <600 w CE compliant |
Floor displacement |
<800 in. (20 m) below 10 Hz |
Built-in Controller Specifications
Processor |
150/75 MHz dual core |
Sampling rate |
10 kHz |
Analog outputs |
16 channels |
Analog inputs |
16 channels |
Status light |
single LED |
Front panel ports |
1x serial USB 2.0 1x serial Micro-USB 1x Ethernet RJ-45 2x BNC |
User interface |
Front panel LCD display Character menu on HyperTerminal Extended GUI for Microsoft Windows Embedded Ethernet GUI |
Performance-
1800 lbs (818 kg) payload tested with simulated vibration at VC-C (500 in./s 12.5 m/s RMS)
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