似空科学仪器(上海)有限公司
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Allied基材厚度测量仪X-PREP? VISION?
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The X-Prep? fixture adapter is also secured to the motorized stage on theX-Prep? Vision? ensuring the measurement/tool control coordinates remain aligned when transferred between systems.

A library with over 130 materials (i.e. GaAs InGaAs SiC Sapphire/Al2O3 InP SiGe GaN photo-resist) is included with every system.

Meaurement & Observation - How it Works

IR light is focused onto a sample and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.

Meauring Below 10 m Thickness

For applications requiring thinning to less than 10 m precise measurement is possible only by adding the visible light spectrometer accessory.

FEATURES

Multipoint scan or single-point thickness measurement 10 microns to full thickness (1 mm) range of measurement (15 nm to 1 mm thick when configured with #15-51000 Spectrometer)
Motorized automatic X/Y/Z (auto-focus) with <1s acquisition time Automatic edge and corner detection aligns measurement grid with X-Prep? - including theta correction
Edge exclusion with X/Y input Stage fitted with X-Prep? fixture adapter
"Drive to Coordinate" software navigation Viewing of either 2D plot/map or 3D graph
Supplied with Allied proprietary X-Correct? software CCD camera (#15-50020) must be purchased separately if not purchasing Visible Light Spectrometer (#15-51000)
Roughness - 15 micron finish 100 mm x 100 mm stage travel
Software automation extendable through .NET Data export using standard Windows methods
One (1) year warranty Dimensions: 14" W x 17" D x 19" H (355 x 431 x 483 mm)
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