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鏂颁竴浠ｇ殑璧涢粯椋炰笘灏旂鎶€ Helios 5 DualBeam 鍏锋湁 Helios 5 浜у搧绯诲垪涓氱晫**鐨勯珮鎬ц兘鎴愬儚鍜屽垎鏋愭€ц兘銆傚畠缁忚繃绮惧績璁捐锛屽彲婊¤冻鏉愭枡绉戝鐮旂┒浜哄憳鍜屽伐绋嬪笀瀵?骞挎硾鐨 FIB-SEM 浣跨敤闇€姹傦紝鍗充娇鏄?*鎸戞垬鎬х殑鏍峰搧銆侟/strong>
Helios 5 DualBeam 閲嶆柊瀹氫箟浜嗛珮鍒嗚鲸鐜囨垚鍍忕殑鏍囧噯锛?*鐨勬潗鏂欏姣斿害锛?蹇€?绠€鍗曘€?绮剧‘鐨勯珮璐ㄩ噺鏍峰搧鍒跺锛岀敤浜 S/TEM 鎴愬儚鍜屽師瀛愭帰閽堟柇灞傛壂鎻忥紙APT锛変互鍙?*璐ㄩ噺鐨勪簹琛ㄩ潰鍜 3D 琛ㄥ緛銆傚湪 Helios DualBeam 绯诲垪涔呯粡鑰冮獙鐨勬€ц兘鍩虹涓婏紝鏂颁竴浠ｇ殑 Helios 5 DualBeam 杩涜浜嗘敼杩涗紭鍖栵紝鎵€鏈夎繖浜涢兘鏃ㄥ湪纭繚绯荤粺澶勪簬鎵嬪姩鎴栬嚜鍔ㄥ伐浣滄祦绋嬬殑**杩愯鐘舵€併€侟/strong>
鍗婂浣撹涓氭妧鏈弬鏁帮細
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| Helios 5 CX | Helios 5 HP | Helios 5 UX | Helios 5 HX | Helios 5 FX | ||
| 鏍峰搧鍒跺涓?nbsp;XHR 鎵弿鐢甸暅鎴愬儚 | *缁堟牱鍝佸埗澶?nbsp;(TEM钖勭墖锛孉PT) | STEM 浜氱撼绫虫垚鍍忎笌鏍峰搧鍒跺 | ||||
| SEM | 鐫€闄嗙數鍘婞/td> | 20 eV~30 keV | 20 eV~30 keV | |||
鍒嗚鲸鐜嘃/p> |
0.6 nm@15 keV | 0.6 nm@2 keV | ||||
| 1.0 nm@1 keV | 0.7 nm@1 keV | |||||
| 1.0 nm@500 eV | ||||||
| STEM | 鍒嗚鲸鐜嘆30 keV | 0.7 nm | 0.6 nm | 0.3 nm | ||
| FIB鍒跺杩囩▼ | **鏉愭枡鍘婚櫎鏉熸祦 | 65 nA | 100 nA | 65 nA | ||
| *缁?*鎶涘厜鐢靛帇 | 2 kV | 500 V | ||||
| TEM鏍峰搧鍒跺 | 鏍峰搧鍘氬害 | 50 nm | 15 nm | 7 nm | ||
| 鑷姩鍖朁/td> | 鍚?/td> | 鏄?/td> | 鏄?/td> | |||
| 鏍峰搧澶勭悊 | 琛岀▼ | 110脳110 脳65 mm |
110脳110 脳65 mm |
150脳150 脳10 mm |
100脳100 脳20 mm |
100脳100脳20mm+5杞达紙S锛塗EM Compustage |
| 蹇€熻繘鏍峰櫒 | 鎵嬪姩 | 鑷姩 | 鎵嬪姩 | 鑷姩 | 鑷姩+鑷姩鎻掑叆/鎻愬彇STEM 鏍峰搧鏉咟/td> | |
鏉愭枡绉戝琛屼笟鎶€鏈弬鏁帮細
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| Helios 5 CX | Helios 5 UX | ||
| 绂诲瓙鍏夊 | 鍏锋湁**鐨勫ぇ鏉熸祦鎬ц兘鐨凾omahawk HT 绂诲瓙闀滅瓛 | 鍏锋湁**鐨勫ぇ鏉熸祦鍜屼綆鐢靛帇鎬ц兘鐨凱hoenix 绂诲瓙闀滅瓛 | |
| 绂诲瓙鏉熺數娴佽寖鍥滁/td> | 1 pA 鈥?nbsp;100 nA | 1 pA 鈥?nbsp;65 nA | |
| 鍔犻€熺數鍦?/td> | 500 V 鈥?nbsp;30 kV | 500 V 鈥?nbsp;30 kV | |
| **姘村钩瑙嗗満瀹藉害 | 鍦ㄦ潫閲嶅悎鐐瑰涓?.9 mm | 鍦ㄦ潫閲嶅悎澶勭偣涓?.7 mm | |
| 绂诲瓙婧愬鍛键/td> | 1,000 灏忔椂 | 1,000 灏忔椂 | |
| 涓ょ骇宸垎鎶藉惛 | 涓ょ骇宸垎鎶藉惛 | ||
| 椋炶鏃堕棿鏍″噯 | 椋炶鏃堕棿鏍″噯 | ||
| 15瀛斿厜闃慄/td> | 15瀛斿厜闃慄/td> | ||
| 鐢靛瓙鍏夊 | Elstar瓒呴珮鍒嗚鲸鐜囧満鍙戝皠闀滅瓛 | Elstar瓒呴珮鍒嗚鲸鐜囧満鍙戝皠闀滅瓛 | |
| 纾佹蹈娌＄墿闀淈/td> | 纾佹蹈娌＄墿闀淈/td> | ||
| 楂樼ǔ瀹氭€ц倴鐗瑰熀鍦哄彂灏勬灙鎻愪緵绋冲畾鐨勯珮鍒嗚鲸鐜囧垎鏋愮數娴?/td> | 楂樼ǔ瀹氭€ц倴鐗瑰熀鍦哄彂灏勬灙鎻愪緵绋冲畾鐨勯珮鍒嗚鲸鐜囧垎鏋愮數娴?/td> | ||
| 鐢靛瓙鏉熷垎杈ㄧ巼 | **宸ヤ綔璺濈涓婞/td> | 0.6 nm @ 30 kV STEM | 0.6 nm @ 30 kV STEM |
| 0.6 nm @ 15 kV | 0.7 nm @ 1 kV | ||
| 1.0 nm @ 1 kV | 1.0 nm @ 500 V (ICD) | ||
| 0.9 nm @ 1 kV 鍑忛€熸ā寮? | |||
| 鍦ㄦ潫娴侀噸鍚堢偣 | 0.6 nm @ 15 kV | 0.6 nm @ 15 kV | |
| 1.5 nm @ 1 kV 鍑忛€熸ā寮? 鍙?nbsp;DBS* | 1.2 nm @ 1 kV | ||
| 鐢靛瓙鏉熷弬鏁?/td> | 鐢靛瓙鏉熸祦鑼冨洿 | 0.8 pA ~ 176 nA | 0.8 pA ~ 100 nA |
| 鍔犻€熺數鍘嬭寖鍥滁/td> | 200 V ~ 30 kV | 350 V ~ 30 kV | |
| 鐫€闄嗙數鍘婞/td> | 20 eV ~ 30 keV | 20 eV ~ 30 keV | |
| **姘村钩瑙嗗満瀹藉害 | 2.3 mm @ 4 mm WD | 2.3 mm @ 4 mm WD | |
| 鎺㈡祴鍣?/td> | Elstar 闀滅瓛鍐?nbsp;SE/BSE 鎺㈡祴鍣?nbsp;(TLD-SE, TLD-BSE) | ||
| Elstar 闀滅瓛鍐?nbsp;SE/BSE 鎺㈡祴鍣?nbsp;(ICD)* | |||
| Elstar 闀滅瓛鍐?nbsp;BSE 鎺㈡祴鍣?nbsp;(MD)* | |||
| 鏍峰搧瀹ゅ唴 Everhart-Thornley SE 鎺㈡祴鍣?nbsp;(ETD) | |||
| 绾㈠鐩告満 | |||
| 楂樻€ц兘绂诲瓙杞崲鍜岀數瀛愭帰娴嬪櫒 (SE)* | |||
| 鏍峰搧瀹ゅ唴 Nav-Cam 瀵艰埅鐩告満* | |||
| 鍙几缂╁紡浣庣數鍘嬨€侀珮琛害銆佸垎鍓插紡鍥烘€佽儗鏁ｅ皠鎺㈡祴鍣?nbsp;(DBS)* | |||
| 鍙几缂㏒TEM 3+ 鎺㈡祴鍣? | |||
| 鐢靛瓙鏉熸祦娴嬮噺 | |||
| 鏍峰搧鍙板拰鏍峰搧 | 鏍峰搧鍙?/td> | 楂樺害鐏垫椿鐨勪簲杞寸數鍔ㄦ牱鍝佸彴 | 鍘嬬數闄剁摲椹卞姩 XYR 杞寸殑楂樼簿搴︿簲杞寸數鍔ㄥ伐浣滃彴 |
| XY | 110 mm | 150 mm | |
| Z | 65 mm | 10 mm | |
| R | 360掳 (杩炵画) | 360掳 (杩炵画) | |
| 鍊炬枩 | -15掳 ~ +90掳 | -10掳 ~ +60掳 | |
| **鏍峰搧楂樺害 | 涓庝紭涓績鐐归棿闅?nbsp;85 mm | 涓庝紭涓績鐐归棿闅?nbsp;55 mm | |
| **鏍峰搧璐ㄩ噺 | 鏍峰搧鍙颁换鎰忎綅缃?nbsp;500 g | 鏍峰搧鍙颁换鎰忎綅缃?nbsp;500 g | |
| 0掳 鍊炬枩鏃?* 5 kg | |||
| **鏍峰搧灏哄 | 鐩村緞 110 mm鍙部鏍峰搧鍙版棆杞椂 | 鐩村緞 150 mm鍙部鏍峰搧鍙版棆杞椂 | |
| 浼樹腑蹇冩棆杞拰鍊炬枩 | 浼樹腑蹇冩棆杞拰鍊炬枩 | ||
鏇存槗浜庝娇鐢細
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鎴愮珛鏃ユ湡
娉ㄥ唽璧勬湰
鏈夋晥鏈熼檺
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