? 技术参�

Measuring head CX CI

Image acquistion module BM 512 Digital camera with progressive-

scan technology� up to 25fps�

512 x 512 Pixel� 8bit� Firewire Fast digital camera with progressive-

scan technology� up to 58fps�

512 x 512 Pixel� 12 Bit� Firewirs

light source� adjustable Halogen light source

(LS 100) Powerfull-Xe-light source

(LX 100� LX 180)

Scan modules 　

x� y-axis module MS 50 Precision x� y-table� 50 x 50mm� resolution 0.1��m

z-axis module ZM 100 Precision scanning module� range 100mm� resolution 0.1��m

z-axis module NV 350 - Fast precision scanning module (Piezo)�

measuring range 350��m� resolution < 1nm

Optic modules1) 1600 S 800 L / S / XS 320 L / S / XS 160 L / S

Measurement area (x/y)(um)2

(XY测量范围) 1600 x 1600 800 x 800 320 x 320 160 x 160

Numerical aperture

(NA�? 0.3 0.4 / 0.46 / 0.6 0.5 / 0.8 / 0.95 0.8 / 0.95

Working distance(mm)

Z方向测量范围 10.1 12 / 3.1 / 0.9 10.6 / 0.66 / 0.3 3.4 / 0.31

Resolution in z-direction(nm)CX

(Z方向范围分辨�?　　　　 CI2) 50

20 35 / 30 / -

6 / 5 / 4 25 / 15 / -

4 / 2 / 2 -

2 / 1

Resolution in x，y-direction

(XY分辨�? 2.9 1.5 0.6 0.31

1) L : long working distance� S : normal working distance� XS : short working distance� 2) noise level (only with NV350)