型号

ELS-F125

ELS-F100

ELS-HS50

电子�?/span>

ZrO/W热场发射�?/span>

ZrO/W热场发射�?/span>

ZrO/W热场发射�?/span>

加速电厊�/span>

125 kV� 75 kV� 25 kV

100 kV� 50 kV� 25 kV

50 kV� 20 kV

*小束流直徃�/span>

��1.7 nm (@ 125 kV)

��1.8 nm (@ 100 kV)

��2.8nm (@ 50 kV�? nA)

*小线宼�/span>

5 nm or less (@125 kV)

6 nm or less (@100 kV)

20 nm (@ 50 kV� 2 nA)

电子束束�?/span>

5 pA to 100 nA

20 pA to 100 nA

1 nA to 1 ��A

视场范围

Max. 3�?00 ��mｗ�span> 3�?00 ��m

Max. 3�?00 ��mｗ�span> 3�?00 ��m

Max. 3�?00 ��mｗ�span> 3�?00 ��m

Min. 100 ��mｗ�span> 100 ��m

Min. 100 ��mｗ�span> 100 ��m

Min. 100 ��mｗ�span> 100 ��m

束流定位

Max. 1�?00�?00ｗ�span> 1�?00�?00 (20bit DAC)

Max. 1�?00�?00ｗ�span> 1�?00�?00 (20bit DAC)

Max. 1�?00�?00ｗ�span> 1�?00�?00 (20bit DAC)

束流定位分辨玆�/span>

Min. 0.1 nm

Min. 0.1 nm

Min. 0.1 nm

大样品尺寷�/span>

8" wafer or 7" square mask

8" wafer or 7" square mask

8" wafer or 7" square mask