抽气速率

Pumpspeed50/60)

L/min

1666

3333

11666

20000

30000

50000

M³/H

100

200

700

1200

1800

3000

极限压力

UItimoate Pressure

Torr

75×10³

Z5×10⁳�/span>

mbar

1×10~²

1×10³

Pa

1

1×10-

马达Motor

颜定功率

Rated power

KW

4

5.5

6.2

8

8

15

底压功率

Uitimate Pressure Power

KW

2.5

3

3.2

3.5

4

11

管路连接Connection

入气叢�/span>Inlet

KF50

KF50

ISO100

SO100

ISO160

ISO200

出智

KF40

KF40

KF40

KF40

KF50

KF50

冷却氳�/span>

Cooing water

*位�/span>

L/MIN

3

5

**压力

MaxPressure

kg/cm³

4

筈�/span>rer

kg/cm³

1

湿度Temp

ℂ�/span>

10-40

ection

PT3/8

氮气

(逈�/span>酌�/span>)

N2

eure

Mpa

0.05-0.2

流量How

slm

6-10(Sealinggas)0-50(Dilute)�?/span>

necten

Swagelok1/4“�/span>

尺寸Dim

芑�/span>×案×高

mm

940×400×503

1192×444×650

900×400×744

1050×444×86

090×444×895

1150×460×560

重量Weight

kg

270

330

380

555

730

710