产品特点/Product Characteristics９�/span>

� 石墨烯薄膜产业化设备

Graphene film industrialization equipment

� 宽幅卷对卷连续生镾�/p>

Wide roll-to-roll continuous growth

� APC系统:真空蝶阀自动控制

APC System: Automatic Control of Vacuum Butterfly Valve

� 碳源等工艺气体MFC控制

MFC control of process gas such as carbon source

� 薄膜制备过程全自动控刵�/p>

Automatic control of film preparation process

� 三腔室结枃�/p>

Three-chamber structure

技术指�?Technical Indicators９�/span>

� 工作温度:800-1050°C

Operating temperature: 800-1050°c

� 工艺管材�?石英箠�/p>

Material of process tube: quartz tube

� 铜箔宽度:500mm

lnner diameter of process pipe: medium 550mm

� 极限真空�?小于3Pa，可恒压控制

Limit vacuum degree: less than 3Pa, which can be controlled by constant pressure

� 恒温匹�1000mm、五段控�?/p>

Constant temperature zone: 1000mm, five-stage temperature control

� 工艺管内徃�550mm

lnner diameter of process pipe: medium 550mm

� 铜箔运行速度�?100-400mm/min，可谂�/p>

The running speed of copper foil is about 100-400mm/min, which can be adjusted