杩炵画鍥炶浆PECVD绯荤粺
鎶ヤ环锛欬span>闈㈣
鍝佺墝锛欬/td> 璐濇剰鍏婞/td>
浜у湴锛欬/td> 瀹夊窘鍚堣偉
鍏虫敞搴︼細 4731
鍨嬪彿锛欬/td> BTF-1200C-RP-PECVD
灞曚綅鎺ㄨ崘
鏇村
浜у搧浠嬬粛

鍥炶浆PECVD涓诲浘.jpg

涓昏鐗圭偣

銆€銆€璇ユ璁惧鏄叏鑷姩Plasma澧炲己CVD绯荤粺(PECVD)锛岃繛缁彲鎺ф俯搴︿互鍙奝lasma寮哄害绛夛紝閰嶅鐪熺┖绯荤粺锛屽彲浠ヤ綆鍘嬫潯浠朵笅瀹炵幇宸ヨ壓锛孭ECVD绯荤粺鑳戒娇鏁翠釜瀹為獙鑵斾綋閮藉浜庤緣鍏変骇鐢熷尯锛岃緣鍏夌浉瀵瑰潎鍖€绛夋晥锛屽緢濂界殑瑙e喅浜嗕紶缁熺瓑绂诲瓙宸ヤ綔涓嶇ǔ瀹氱姸鎬侊紝璇ヨ澶囩倝绠″彲360掳鏃嬭浆锛屾湁鍔╀簬绮夋枡鐨勭儳缁撴洿鍧囧寑锛屽彲澶ц搴﹀€炬枩锛屾柟渚胯繘鍑烘枡锛屽€炬枩瑙掑害鍦?-35掳涔嬮棿锛屾墍鏈夌墿鏂欑粡杩囩殑绠¢亾閮介€夌敤闈為噾灞炴潗璐紝濡傦細杩涘嚭鏂欒厰浣撻€夌敤鐭宠嫳鏉愯川锛屾帹鏂欐潌閫夌敤鐭宠嫳鍙婅仛鍥涙盁鏉愯川銆侟/span>

銆€銆€The device is a fully automated Plasma Enhanced CVD System (PECVD) with continuous temperature control and Plasma strength. Equipped with a vacuum system that can be used under low pressure conditions. The PECVD system enables the entire experimental chamber to be in the glow generation area. The light is uniform and equivalent, which solves the unstable operation of the traditional plasma. The tube of the device can rotate 360掳, which helps the sintering of the powder to be more uniform, can be inclined at a large angle, and is convenient for feeding and discharging. The inclination angle is Between 0-35掳, all pipeline materials passing through are made of non-metallic materials. For example, the inlet and outlet chambers are made of quartz, and the push rods are made of quartz and PTFE.

鍥炶浆鐐夌粏鑺?jpg

鎶€鏈弬鏁?/span>

鍔犵儹绯荤粺Heating system

鍔熺巼Power

4KW

鐢靛帇Voltage

AC220V 50/60Hz

zui楂樻俯搴?/span>Max. Temp

1200掳C

浣跨敤娓╁害Working temp

1100掳C

鍔犵儹闀垮害Heating zone length

200mm+200mm

鎭掓俯闀垮害Constant zone length

250mm



鎺ф俯鏂瑰紡Temperature Controller

PID automatic control and auto-tune function.

妯$硦PID鎺у埗鍜岃嚜鏁村畾璋冭妭

30 programmable segments for precise thermal processing.

鏅鸿兘鍖?0娈靛彲缂栫▼鎺у埗

Built-in protection for the over-heated and broken thermocouple.

瓒呮俯鍜屾柇鍋舵姤璀﹀姛鑳键/span>

Operation interface is10 "LCD touch screen control

鎿嶄綔鐣岄潰涓?0 "娑叉櫠瑙︽懜灞忔帶鍒迭/span>

鎺ф俯绮惧害Temperature Accuracy

+/- 1鈩傸/span>

鐐夌灏哄Tube Size

Size锛欬/span>桅60*420+桅100*360+桅60*420mm

灏哄锛欬span style="font-family:Calibri">桅60*420+桅100*360+桅60*420mm

Furnace tube rotation rate锛欬/span>0~60r/min

鐐夌杞€烖/span>锛欬span style="font-family:Calibri">0~60r/min

Furnace body inclination angle

0~35掳锛圏/span>adjustable锛堻/span>

Plasma绯荤粺Plasma system

鏈郴缁熷€熷姪浜庤緣鍏夋斁鐢典骇鐢熺瓑绂诲瓙浣擄紝杈夊厜鏀剧數绛夌瀛愪綋涓紝鐢靛瓙瀵嗗害楂橈紝閫氳繃鍙嶅簲姘旀€佹斁鐢碉紝鏈夋晥鍒╃敤浜嗛潪骞宠 绛夌瀛愪綋鐨勫弽搴旂壒寰侊紝浠庢牴鏈笂鏀瑰彉浜嗗弽搴斾綋绯荤殑鑳介噺渚涚粰鏂瑰紡銆侟/span>

The system generates plasma by means of glow discharge. In the glow discharge plasma, the electron density is high, and the reaction characteristics of the non-equilibrium plasma are effectively utilized by the reaction gas discharge, which fundamentally changes the energy supply mode of the reaction system.

杩涙枡绯荤粺Feeding system

閫佹枡绯荤粺閫熷害杩炵画鍙皟锛屽仠姝㈤€佹枡涓旂倝浣撳€炬枩zui澶ф椂锛岀墿鏂欎笉浼氫粠閫佹枡绯荤粺澶栨紡锛岄€佹枡绯荤粺鏂逛究鎷嗗嵏锛屾媶鍗稿悗鍙墜鍔ㄥ姞鏂欙紝璁惧鍙甯歌繍琛屻€侟/span>

The speed is continuously adjustable. When the feeding is stopped and the furnace body is tilted to the maximum, the material will not leak . The feeding system is easy to disassemble, and the material can be manually fed after disassembly, and the equipment can operate normally.

鍑烘枡绯荤粺Discharge system

鍑烘枡绯荤粺鍦ㄧ倝浣撳€炬枩鍑烘枡鏃跺彲鑷姩鍑烘枡銆傦級

The discharging system can automatically discharge when the furnace body is inclined and discharged.

姘斾綋鎺у埗绯荤粺Gas control system

璇ユ帶姘旂郴缁熸槸鍙互鎺у埗涓ょ姘斾綋鎸夌収涓嶅悓娴侀噺杩涜娣峰悎閰嶆瘮鐨勶紝涔熷彲浠ョ嫭绔嬫帶鍒讹紝璐ㄩ噺娴侀噺璁″畨瑁呬簬瀵嗗皝鐨勫彲绉诲姩鐨勬満鏌滃唴锛岀敱瓒呮磥鍙屾姏涓嶉攬閽㈢涓庣簿瀵嗗弻鍗″鎺ュご杩炴帴缁勬垚銆侟/span>

The gas control system can control the mixing ratio of the two gases according to different flow rates, and can also be independently controlled. The mass flow meter is installed in a sealed movable cabinet, which is composed of super clean stainless steel tube and the precision double ferrule joint.

浣庣湡绌虹郴缁烖/span>Low vacuum system

璇ョ郴缁熼厤澶囩湡绌烘満姊版车锛屽彲浠ユ娊鐪熺┖锛屽彲浠ヨ璁惧鍦ㄧ湡绌虹幆澧冧笅杩涜鍙嶅簲銆侟/span>

Equipped with a vacuum mechanical pump that can be vacuumed to allow the unit to react in a vacuum environment.

姘旀枡鍒嗙绯荤粺Separation system

璇ョ郴缁熷彲浠ヨ璁惧鍦ㄥ厖姘斾綋淇濇姢鎴栬€呮娊鐪熺┖鏃讹紝瀹炵幇姘斾綋涓庣墿鏂欑殑鍒嗙銆侟/span>

the system allows the separation of gas and material during the protection of the inflator or when vacuuming.

杩囨护绯荤粺filtering system

璇ョ郴缁熷彲闃叉鐗╂枡杩涘叆鐪熺┖娉碉紝淇濊瘉鐪熺┖娉电殑姝e父杩愯銆侟/span>

The system prevents material from entering the vacuum pump and ensures proper operation of the vacuum pump.

鐐夌杞姩绯荤粺Furnace tube rotation system

鐐夌杞姩绯荤粺鍙互璁╃倝绠?60掳鍖€閫熻浆鍔紝杞€熷湪0-60r/min杩炵画鍙皟锛屼笖鑳藉湪60r/min杞€熶笅闀挎椂闂磋繍琛屻€?nbsp;

Allows the tube to rotate 360掳 at a constant speed. The rotation speed is continuously adjustable from 0 to 60 r/min for a long time.


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