OAI 掩膜光刻朹�/strong>Model 6000型的特点和优炸�/strong>

?高吞吐量�?80 wph�?*掩模模式)咋�/span>生产和研发的*低运行成�?/span>

?ABO光学与光均质器，以实现所需各种电阻的分辨率和曝先�/span>

?用于大深度Foucs的特殊光�?/span>

?灵活处理基板�?“平方到12”平斸�/span>

?可手动或自动上料

配置、�/span>

?系统配置顶部�?或底部侧�? IR 自动对准Vision ProR软件

?适用于各种基材尺寸和类型

?基于Windows的软仵�/span>

?菜单驱动的GUI与工艺配方存�?/span>

?全场曝光，提高吞吐量

?顶部加载口罩支架，方便，快速，安全的口罩更捡�/span>

?可选全球调平零接触处理

?双臂4轴机器人搬运系统(可�?

?自调平工装隔�?/span>

?**的服务支�?�?5%的服务水�?

Mask Aligner - Model 6000 Features and Benefits

? High throughput (180 wph� first mask mode) and Lowest Cost of operation for production and R&D

? ABO Optics with light homogenizer to achieve required resolutions & exposures for various resists

? Special Optics for Large Depth of Foucs

? Flexibility with substrate handling from 2”sq to 12”sq

? Comes in manual loading or automated loading configurations.

? System configuration with top and/or bottom side / IR auto alignment with Cognex Vision ProR Software

? Adaptable to various substrate sizes and types

? Windows based software

? Menu driven GUI with process recipe storage

? Full field exposure for higher throughput

? Top load mask holder for easy� fast and safe mask replacements

? Optional Global leveling for zero contact processing

? Dual arm 4-axis robot handling system (optional)

? Self leveling tooling vibration isolation

? Superior service support (~95% service level)