OAI Model 212型桌面掩模对准系绞�/span>

。输出光谱范図�Hg: G(436nm)，H(405nm)，I(365nm)�?10nm，Hg-Xe: 260 nm�?20 nm或LED:365 nm�?95 nm�?05 nm

。灯功率范围�?000�?000 w

。选择UVLED (365 nm�?05 nm)光源

。基片尺寸范围从12“dia平方

。特�?2“x 12”和3毫米厚玻璃基松�/span>

。互换抛掷和面具

。空气轴承真空吸盗�/span>

。接�?15-20umgap): & lt; 3.0 - 5.0，柔�?/span>触点:2.0um，硬触点:1um咋�/span>真空接点:�?.5um

。对齐模块X� Y，和Z轴和��

。双通道光学反馈

。只提供正面接触w / IR选项

。仅在桌面选项可用，适用于研发和独立的工佛�/span>

。占用空间小

。适用于生物学、微机电系统、半导体和Microfludics CLiPP应用程序

Model 212 Table Top Mask Aligner System

� Output Spectra Range: Hg: G (436nm)� H (405nm)� I(365nm) and 310nm lines� Hg-Xe: 260nm and 220nm or LED: 365nm� 395nm and 405nm

� Lamp Power range from 1000 to 5000W

� Option for UVLED (365nm and 405nm) Light Source

� Substrate sizes range from 12� dia to sq

� Special 12� x 12� and up to 3mm thick Glass Substrates

� Interchangeable chucks and mask holders

� Air bearing vacuum chuck

。Proximity (15-20umgap ): <3.0 � 5.0um� Soft Contact: <2.0um� Hard contact: 1um and vacuum contact : � 0.5um

� Alignment module X� Y� and Z axis and theta

� Dual-channel optical feedback

� Provides Front side exposure only w/ IR Option

� Available in Table top option only and applicable for R&D and standalone work

� Small Footprint

� Applicable for Biology� MEMS� Semiconductor and Microfludics� CLiPP applications