山东力冠微电子装备有限公号/div>
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石墨烯薄膜CVD设备
产品简今/div>

产品概述/Product Introduction9/span>

本系统是一套完备的石墨烯制备系统,包括硬件和软件部刅/p>

This system is a complete graphene preparation system, including hardware and software

工作在常压气氛或真空条件,通过控制生长工艺,既可以生长出六边形的石墨烯单晶,也可以生长出花瓣状的石墨烯的单晵/p>

Working in normal pressure atmosphere or vacuum condition, by controlling the growth process, both hexagonal graphene single crystal and petal-shaped graphene single crystal can be grown

产品特点/Product Characteristics9/span>

采用单腔室或双腔室结枃/p>

Adopt single chamber or double chamber structure

取料腔室快速冷即/p>

Rapid cooling of material taking chamber

该系统主要由电控系统、样品加热系统、工艺腔室系统、取放料系统、真空系统、气路系统、压力控制系统等组成

The system is mainly composed of electric control system, sample heating system, process chambersystem, material taking and discharging system, vacuum system, gas path system, pressure controlsystem and so on

结构型式:卧式,间歇连续式自动控制

Structure type: Horizontal, intermittent continuous automatic control

适应材料规格:A3尺寸

Suitable material specifications: A3 size

装片野200牆/p>

Loading capacity: 200 tablets


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