山东力冠微电子装备有限公号/div>
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坩埚下降设备
产品简今/div>

产品概述/Product Introduction9/span>

主要用于4-8英寸砷化镓、磷化铟等化合物单晶生长

Mainly used for single crystal growth of 4-8 inches of gallium arsenide, indium phosphide and other compounds

设备由机架、安瓿支撑机构、加热器和控制系统组戏/p>

The equipment consists of a rack, ampoule support mechanism, heater and control system

能够实现安瓿移动和转动的精确控制

Accurate control of ampoule movement and rotation can be realized

产品特点/Product Characteristics9/span>

工业计算机控制系?WINDOWS系统界面,操作方便简?

Industrial computer control system (WINDOWS system interface, easy and concise operation)

关键部件均采用进?确保设备的高可靠?/p>

The key parts are imported to ensure the high reliability of the equipment

控温精度?温区控温稳定性好

High temperature control precision and good temperature control stability in temperature zone

具有断电报警、超温、欠温报警、极限超温报警等多种安全保护功能

lt has various safety protection functions such as power failure alarm, over-temperature alarm, under-tempera-ture alarm and extreme over-temperature alarm

速度可调的梯形波、三角波及正弦波等旋转功胼/p>

Rotation functions such as trapezoidal wave, triangular wave and sine wave with adjustable speed

单晶质量髗/p>

High quality single crystal

技术指?Technical Indicators9/span>

晶片类型:4/6英寸

Wafer type: 4/6 inches

工作温度范围:1100ℂ/p>

Operating temperature range: 1100ℂ/p>

加热?*温度:1250°C

Maximum heater temperature: 1250ℂ/p>

控温精度:?.5ℂ/p>

Temperature control accuracy: ?.5ℂ/p>

控温段数:4殴/p>

Number of temperature control sections: 4 sections

炉腔压力:4MPa

Furnace chamber pressure: 4MPa

应用范围/Scope9/span>

广泛用于材料的绀蜗下降的单晶生长

Bridgman-descending single crystal growth widely used in materials


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