SDE系列

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

**值泵送速度[�?分钟]

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规格�?产品 SDE90X SDE120TX SDE200 SDE303X SDE603X SDE1203TX SDE20N12TX SDE30N20 SDE60N20

[�?分钟] 1 1,300 1,500 3,300 5,000 10,000 20,000 30,000 50,000 100,000

极限压强
[啪] 1 1.3 0.5

电源电压
(50/60赫兹) 功耗[kW] 2 1.3 2.8 2.7 1.5 1.6 3.2 3.3 3.7

尺寸[毫米] 3 L 690 930 900 1000 1000 1080

W 370 400 400 450 450 515

H 501 500 905 1000 950 950

*1)不带N 2 S-P曲线

S-P Curve
[计]选项

Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).

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产品分类

规格�?产品		SDE90X	SDE120TX	SDE200	SDE303X	SDE603X	SDE1203TX	SDE20N12TX	SDE30N20	SDE60N20
[�?分钟] *1		1,300	1,500	3,300	5,000	10,000	20,000	30,000	50,000	100,000
极限压强 [啪] *1		1.3			0.5
电源电压 (50/60赫兹)											功耗[kW] *2	1.3	2.8	2.7	1.5	1.6	3.2	3.3	3.7
尺寸[毫米] *3	L	690		930	900			1000	1000	1080
	W	370		400	400			450	450	515
	H	501		500	905			1000	950	950

真空泴�/a>

苛刻过程应用示例

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