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浜屾哀鍖栭搥绮夋湯姣旇〃鍓緫娴嬪畾浠?/div>

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BETA201A鐩稿鍥藉唴鍏朵粬鍚岀被浜у搧鐨勬妧鏈紭鍔跨壒鐐癸細</p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);"> </p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">1锛 鐪熺┖绯荤粺锛氫腑绉戦櫌鐪熺┖澶勭悊涓撳涓撻棬涓築ETA绯诲垪璁捐鐨勭湡绌虹郴缁燂紝鍏ㄤ笉閿堥挗绠¤矾鍜屽浗闄呯煡鍚嶇湡绌虹數纾侀榾閰嶅锛岀湡绌哄害鏇撮珮锛堝彲杈?0-8Torr锛?淇濇寔楂樼湡绌哄害鏃堕棿鏇撮暱銆傚熀鏈厤缃湡绌烘车10-2pa(10-4 Torr).P/P0鍙揪10-7.</p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">2锛?nbsp; 鏅鸿兘閫夋嫨澶氬閲忕┖闂存妧鏈紱</p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">3锛?nbsp; 鍏ㄤ笉閿堥挗鐪熺┖绯荤粺杩炴帴瀵嗗皝閲囩敤閲戝睘瀵嗗皝鎶€鏈紱</p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">4锛?nbsp; 鐪熺┖绯荤粺鍐呭閲囩敤闀€閾舵妧鏈€侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">5锛?nbsp; 鐪熺┖绯荤粺閲囩敤娴嬭瘯绌洪棿澶栭潰鍙﹀姞涓€灞傜湡绌轰繚鎶ゅ眰鎶€鏈€侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">6锛 妫€娴嬬郴缁燂細杩涘彛鐢靛寮忕粷鍘嬭杽鑶滃帇鍔涘彉閫佸櫒锛岀簿搴﹁揪鍒?.1%锛岋紙0-10 Torr---鐩稿綋浜?-1.33KP 锛?-1000 Torr ------鐩稿綋浜?-133.3kp锛夐珮杈?4浣岮D閲囬泦鐢佃矾纭繚鏁版嵁鐨勫噯纭€с€傚彲浠ヨ繘琛屼笂鍗冧釜鐐圭殑娴嬭瘯銆侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">7锛 浼樿川鎺у埗闃€浣挎娊姘斿拰杩涙皵闈炲父绋冲畾锛屼笉浼氬嚭鐜版牱鍝侀婧呯幇璞°€傜壒娈婄殑姘旇矾澶勭悊锛岄伩鍏嶄簡鏍峰搧绠′粠鑴辨皵绔欏埌鍒嗘瀽绔欒浆绉昏繃绋嬩腑鐨勪簩娆℃薄鏌撱€傚姞鐑劚姘斿拰鏍峰搧鍒嗘瀽鍚屼綅杩涜鑰屼笉浼氬鏍峰搧鍒嗘瀽绠¤矾閫犳垚姹℃煋鐨勫厛杩?*鎶€鏈€侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">8锛 鏍峰搧棰勫鐞嗘洿鏂逛究銆佸揩鎹凤紙鎷ユ湁**鎶€鏈級銆傛牱鍝佹祴璇曞拰澶勭悊鍦ㄧ浉鍚屼綅缃紝杈惧埌*鐞嗘兂鐨勮劚姘斿鐞嗘晥鏋溿€傚悓鏃堕伩鍏嶆牱鍝佹媶鏉ユ媶鍘伙紝鏆撮湶鍦ㄧ┖姘斾腑锛屽奖鍝嶅惛闄勮兘鍔涖€傛垜浠湪鏍峰搧瀹や笂鏂癸紝鍒╃敤涓€涓笁閫氶榾锛屽阀濡欑殑鎶婃祴璇曠璺拰鍔犵儹鑴辨皵绠¤矾涓€鍒嗕负浜岋紝浣胯劚姘旀椂浜х敓鐨勬潅璐ㄤ笉浼氭薄鏌撴祴璇曠璺拰鐪熺┖璁★紝杩欐槸鎴戜滑鏍稿績鐨?*鎶€鏈€侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">9锛 鐙珛鐨凱0绠★紝纭繚P0鍊肩殑鍑嗙‘鏃犺銆侾/P0鍙揪0.9995.</p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">10锛?nbsp; BETA閰嶇疆浜嗗ぇ瀹归噺娑叉爱鏉滅摝鐡讹紝鍙繚70灏忔椂鏃犱汉浠嬪叆鎿嶄綔銆侭ETA杩橀厤缃簡娑叉爱绛夋俯濂楋紝浠ョ‘淇濇暣涓垎鏋愯繃绋嬩腑绛夋俯濂椾互涓嬬殑娓╁害鎭掑畾銆傚彲鍔犺嚜鍔ㄦ恫姘ˉ鍏呯郴缁燂紝杩涜浠绘剰鎵€闇€鏃堕暱鐨勬牱鍝佹祴璇曘€侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">11锛?nbsp; 鐪熸鐨勬棤浜哄€煎畧锛屼华鍣ㄩ潰鏉挎棤浠讳綍鎵嬪姩鎸夐敭锛屾墍鏈夌殑鎿嶄綔绋嬪簭鍧囩敱璁＄畻鏈烘潵鎺у埗銆侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">12锛?nbsp; 鍒嗘瀽鑼冨洿骞匡細姣旇〃闈㈢Н0.0005m2/g锛圞r娴嬮噺锛夎嚦鏃犱笂闄愩€傚瓟寰勫垎鏋?.35nm-500nm銆傚瓟浣撶Н*灏忔娴婜 0.0001 cc/g銆?姘皵鍚搁檮锛屽彲鍔犻厤澶囬珮鐪熺┖绯荤粺).娴嬭瘯绮惧害鍙揪閲嶅鎬ц宸€埪?%銆侟/p><p style="white-space: normal; font-family: 锟斤拷锟斤拷, arial; font-size: 12px; line-height: 24px; background-color: rgb(255, 255, 255);">13锛?nbsp; 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