鐧诲綍
寰俊
绉诲姩绔?/p>
鍙傝€冧环鏍稽/p>闈㈣
鍨嬪彿
TU-19鍝佺墝
鏅瀽浜у湴
鍖椾含鏍锋湰
鏆傛棤娴嬮噺鑼冨洿锛欬/p>190nm锝?00nm
娉㈤暱鍑嗙‘搴︼細
卤0.3nm铏氭嫙鍙峰皢鍦180绉掑悗澶辨晥
浣跨敤寰俊鎵爜鎷ㄥ彿
TU-19绯诲垪绱鍙鍒嗗厜鍏夊害璁狘/span>
鍖椾含鏅瀽閫氱敤浠櫒鏈夐檺璐d换鍏徃浣滀负鍒嗘瀽浠櫒鐨勪笓涓氬埗閫犱紒涓氾紝澶氬勾鐨勫厜璋变华鍣ㄨ璁″拰鍒堕€犵粡楠屽湪TU-19绯诲垪鍙屽厜鏉熺传澶栧彲瑙佸垎鍏夊厜搴﹁涓婂緱鍒颁簡闆嗕腑浣撶幇涓庡睍绀恒€侟/span>绋冲畾鐨凕/span>浠櫒鎬ц兘鍜孅/span>杩炵画鍙彉鐙紳鎶€鏈互纭繚娴嬮噺鏁版嵁鐨凕/span>绋冲畾涓庡彲闈犮€傚湪鏈夋満鍖栧銆佺敓鐗╁寲瀛︺€佽嵂鍝佸垎鏋愩€侀鍝佹楠屻€佸尰鑽崼鐢熴€佺幆澧冧繚鎶ゃ€佺敓鍛界瀛?/span>绛堻/span>棰嗗煙鐨勭鐮斻€佺敓浜т腑寰楀埌寰堝ソ鐨凕/span>搴旂敤銆侟/span>
浜у搧閰嶇疆锛欬/span>
鍨嬪彿 |
鍚嶇О |
璇存槑 |
TU-1900 |
鍙屽厜鏉熺传澶栧彲瑙佸垎鍏夊厜搴﹁ |
鍥哄畾2nm鍏夎氨甯﹀ |
TU-1901 |
鍙屽厜鏉熺传澶栧彲瑙佸垎鍏夊厜搴﹁ |
6妗e彲鍙樺厜璋卞甫瀹键/span> |
TU-1950 |
鍙屽厜鏉熺传澶栧彲瑙佸垎鍏夊厜搴﹁ |
0.1nm~5nm杩炵画鍙彉鍏夎氨甯﹀ |
鍙€夐檮浠讹細
闄勪欢鍨嬪彿 |
闄勪欢鍚嶇О |
閫傜敤浜у搧 |
CH19-2 |
鎭掓俯姹犱欢闄勪欢 |
TU-1950 |
PS19-3 |
鍙岄€氶亾锠曞姩娉甸檮浠迭/span> |
TU-1950 |
AS19-1 |
鑷姩鍏仈姹犻檮浠迭/span> |
TU-1950 |
IS19-2 |
绉垎鐞冮檮浠迭/span> |
TU-1950 |
MH19-1 |
寰噺姹犳灦 |
TU-1901,TU-1900锛孅/span>TU-1950 |
MR19-1 |
闀滈潰鍙嶅皠闄勪欢 |
TU-1901,TU-1900锛孅/span>TU-1950 |
IS19-1 |
1901绉垎鐞冮檮浠迭/span> |
TU-1901 |
CH19-1 |
鎭掓俯姹犳灦 |
TU-1901,TU-1900 |
SS19-1 |
鐭厜绋嬫牱鍝佹睜鏋迭/span> |
TU-1901,TU-1900锛孅/span>TU-1950 |
DS19-1 |
鍙彉瑙掑害鍥轰綋鏍峰搧鏋迭/span> |
TU-1901,TU-1900锛孅/span>TU-1950 |
LS19-1 |
闀挎牱鍝佹睜鏋迭/span> |
TU-1901,TU-1900锛孅/span>TU-1950 |
MS19-1 |
鎵嬪姩鍏仈姹犳灦 |
TU-1901,TU-1900 |
TR19-1 |
璇曠鏋迭/span> |
TU-1901,TU-1900锛孅/span>TU-1950 |
S19-1 |
鍥轰綋鏍峰搧姹犳灦 |
TU-1901,TU-1900锛孅/span>TU-1950 |
PS19-2 |
锠曞姩娉佃繘鏍峰櫒闄勪欢 |
TU-1901,TU-1900 |
路杩炵画鍙彉鍏夎氨甯﹀锛堜粎TU-1950锛堻/span>
鍙疄鐜板厜璋卞甫瀹戒粠0.1-5nm鐨勮繛缁彲璋冿紝鏍规嵁鐢ㄦ埛鐨勫疄闄呴渶姹傞€夋嫨鍚堥€傜殑娴嬭瘯鏉′欢銆侟/span>
路澶氭牱鍝佹祴閲廃/span>锛欬/span>鑷姩鍏仈姹狅紝婊¤冻鐢ㄦ埛澶氭牱鍝佹娴嬶紝鎻愰珮浠櫒鑷姩鍖栫▼搴︺€侟/span>
路绋冲畾鍙潬鐨勫搧璐?/span>锛欬/span>鍙屽厜鏉熷姩鎬佸弽棣堟瘮渚嬪厜璺郴缁熶繚璇佷华鍣ㄧ殑绋冲畾鍙潬銆侟/span>
路鍙墿灞曟€?/span>锛欬/span>澶氱涓撶敤闄勪欢渚涚敤鎴烽€夋嫨锛岃爼鍔ㄨ繘鏍峰櫒銆佹亽娓╂睜鏋躲€佸厜瀛︾Н鍒嗙悆銆侀暅闈㈠弽灏勩€佸厜绾ら檮浠跺拰姣旇壊鐨跨瓑鐨勪娇鐢ㄦ墿灞旤/span>浜咟/span>浠櫒鐨勫簲鐢ㄨ寖鍥淬€侟/span>
路璁惧缁存姢绠€鍗曟柟渚军/span>锛欬/span>鎻掑骇寮忛挩鐏拰姘樼伅鐨勪娇鐢紝鍏嶅幓浜嗘崲鐏椂鍏夊璋冭瘯鐨勬楠わ紝浣夸华鍣ㄧ殑缁存姢鏇村姞绠€鍗曟柟渚裤€侟/span>
路澶栬璁捐锛欬/span>浜烘€у寲鐨勬暣浣撹璁★紝浣垮垎鏋愪汉鍛樼殑浣跨敤涓庣淮鎶ゆ洿鍔犵伒娲讳究鎹枫€侟/span>
路閫氳繃CE璁よ瘉銆侟/span>
鎸囨爣鍚嶇О |
TU-1900 |
TU-1901 |
TU-1950 |
|||
甯﹀ |
2nm |
6妗e彲鍙?5nm锛?nm锛?nm锛?.5nm锛?.2nm锛?.1nm ) |
0.1nm~5nm(浠?.1nm闂撮殧杩炵画鍙皟) |
|||
娉㈤暱鑼冨洿 |
190nm锝?00nm |
190nm锝?00nm |
190nm锝?00nm |
|||
娉㈤暱绀哄€艰宸?/span> |
卤0.3nm |
卤0.3nm |
卤0.3nm |
|||
閫忓皠姣旂ず鍊艰宸?/span> |
卤0.002 Abs锛?锝?.5Abs锛堻/span> |
卤0.002 Abs锛?锝?.5Abs锛堻/span> |
卤0.002 Abs锛?锝?.5Abs锛堻/span> |
|||
卤0.004 Abs锛?.5Abs锝?Abs锛堻/span> |
卤0.004 Abs锛?.5Abs锝?Abs锛堻/span> |
卤0.004 Abs锛?.5Abs锝?Abs锛堻/span> |
||||
卤0.3 % |
卤0.3 % |
卤0.3 % |
||||
閫忓皠姣旈噸澶嶆€?/span> |
鈮?.001 Abs锛?锝?.5Abs锛堻/span> |
鈮?.001 Abs锛?锝?.5Abs锛堻/span> |
鈮?.001 Abs锛?锝?.5Abs锛堻/span> |
|||
鈮?.002 Abs锛?.5Abs锝?Abs锛堻/span> |
鈮?.002 Abs锛?.5Abs锝?Abs锛堻/span> |
鈮?.002 Abs锛?.5Abs锝?Abs锛堻/span> |
||||
鈮?.15 % |
鈮?.15 % |
鈮?.1 % |
||||
鏉傛暎鍏堻/span> |
220nm |
360nm |
220nm |
360nm |
220nm |
360nm |
鈮?.01% |
鈮?.05% |
鈮?.01% |
鈮?.05% |
鈮?.01% |
鈮?.05% |
|
鍩虹嚎骞崇洿搴?/span> |
卤0.001 |
卤0.001 |
卤0.001 |
|||
婕傜Щ |
鈮?.2%/h |
鈮?.2%/h |
鈮?.1%/h |
|||
澶栧舰灏哄 |
580mm脳560mm脳250mm |
580mm脳560mm脳250mm |
610mm脳570mm脳300mm |
|||
閲嶉噺 |
30 kg |
30kg |
39kg |
路 杩炵画鍙彉鍏夎氨甯﹀锛堜粎TU-1950锛堻br />
鍙疄鐜板厜璋卞甫瀹戒粠0.1-5nm鐨勮繛缁彲璋冿紝鏍规嵁鐢ㄦ埛鐨勫疄闄呴渶姹傞€夋嫨鍚堥€傜殑娴嬭瘯鏉′欢銆侟br />
路 澶氭牱鍝佹祴閲忥細鑷姩鍏仈姹狅紝婊¤冻鐢ㄦ埛澶氭牱鍝佹娴嬶紝鎻愰珮浠櫒鑷姩鍖栫▼搴︺€侟br />
路 绋冲畾鍙潬鐨勫搧璐細鍙屽厜鏉熷姩鎬佸弽棣堟瘮渚嬪厜璺郴缁熶繚璇佷华鍣ㄧ殑绋冲畾鍙潬銆侟br />
路 鍙墿灞曟€э細澶氱涓撶敤闄勪欢渚涚敤鎴烽€夋嫨锛岃爼鍔ㄨ繘鏍峰櫒銆佹亽娓╂睜鏋躲€佸厜瀛︾Н鍒嗙悆銆侀暅闈㈠弽灏勩€佸厜绾ら檮浠跺拰姣旇壊鐨跨瓑鐨勪娇鐢ㄦ墿灞曚簡浠櫒鐨勫簲鐢ㄨ寖鍥淬€侟br />
路 璁惧缁存姢绠€鍗曟柟渚匡細鎻掑骇寮忛挩鐏拰姘樼伅鐨勪娇鐢紝鍏嶅幓浜嗘崲鐏椂鍏夊璋冭瘯鐨勬楠わ紝浣夸华鍣ㄧ殑缁存姢鏇村姞绠€鍗曟柟渚裤€侟br />
路 澶栬璁捐锛氫汉鎬у寲鐨勬暣浣撹璁★紝浣垮垎鏋愪汉鍛樼殑浣跨敤涓庣淮鎶ゆ洿鍔犵伒娲讳究鎹枫€侟br />
路 閫氳繃CE璁よ瘉銆
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