通用半导体Low-K开槽装�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><span style="text-wrap: nowrap;">Low-K半导体的发展</span></p><p><span style="text-wrap: nowrap;">HGL1151系列是集成了通用智能核心技术的半导体晶圆Low-K层开槽设备，全自动一站式加工＋�/span></p><p><span style="text-wrap: nowrap;">晶圆上料→预清洗+保护层涂布→激光开槽→后清�?干燥→晶圆下料，所有工艺过程一气呵成、�/span></p><p><span style="text-wrap: nowrap;">产品全系采用高性能激光器及空间光整形系统，标配超高精密气浮式高速加工平台，</span></p><p><span style="text-wrap: nowrap;">切割过程实时监控··实时纠偏等功能，确保Low-K晶圆开槽的精度一致性和质量的稳定性、�/span></p><p><span style="text-wrap: nowrap;">本产品的开槽精度高，槽形优异，尤其对热影响区的控制达到国际**水准、�/span></p><p><span style="text-wrap: nowrap;">主要技术性能达到国内**，部分技术性能超过国际同类产品＋�/span></p><p><span style="text-wrap: nowrap;">是全面替代进口开槽设备的**选择、�/span></p><p><span style="text-wrap: nowrap;">Low-K激光开槽工艺优劾�/span></p><p><span style="text-wrap: nowrap;">� 非接触加工、无物理应力、无晶圆碎裂风险 � 通过动态激光实时控制，工艺设置简单灵洺�/span></p><p><span style="text-wrap: nowrap;"> ①自由改变开槽宽�?/span></p><p><span style="text-wrap: nowrap;"> ②自由设置槽底平滑度</span></p><p><span style="text-wrap: nowrap;"><br/></span></p><p><span style="text-wrap: nowrap;">� 运用方便，运用成本低</span></p><p><span style="text-wrap: nowrap;"> ①一次定位、一次清洗，</span></p><p><span style="text-wrap: nowrap;"> ②工艺过程清�?/span></p><p><span style="text-wrap: nowrap;"> ③无环境污染</span></p><p><span style="text-wrap: nowrap;"> ④基本无耗材，运用成本极位�/span></p><p><span style="text-wrap: nowrap;">Low-K晶圆开槽设备工佌�/span></p><p><span style="text-wrap: nowrap;">技术原琅�/span></p><p><span style="text-wrap: nowrap;">� 运用高性能空间光整形技术按需调制输出激光形�?nbsp;</span></p><p><span style="text-wrap: nowrap;"> ①切割道两侧以极细的双光束刻画出边界细槽</span></p><p><span style="text-wrap: nowrap;"> ②以平顶多光束激光在边界槽内侧切割道开槼�/span></p><p><span style="text-wrap: nowrap;">� 运用高性能实时动态激光控制技术确保开槽精�?/span></p><p><span style="text-wrap: nowrap;"> ①实时控制激光束对槽壁垂直度的加工精�?/span></p><p><span style="text-wrap: nowrap;"> ②实时控制激光束对槽底平整度的加工精�?/span></p><p><span style="text-wrap: nowrap;">� 超快速脉冲激光束对Low-K材料进行精确去除</span></p><p><span style="text-wrap: nowrap;">� 开槽周边热影响区控制在5μm以内</span></p><p><span style="text-wrap: nowrap;"> <img src="https://img1.cnpowder.com.cn/img/daily/2025/04/03/084941_208878_procont.png" title="084941_208878_procont.png" alt="image.png" width="643" height="392" style="width: 643px; height: 392px;"/></span></p><p><br/></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="368409" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">