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闈為噾灞炵數鐑厓浠讹細
鍏朵粬閲戝睘鐢电儹鍏冧欢锛欬/p>鍏朵粬
鐑х粨姘旀皼锛欬/p>鍏朵粬
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鐪嬩簡楂樻俯姘у寲鐐 HT-RTP-4000鐨勭敤鎴峰張鐪嬩簡
铏氭嫙鍙峰皢鍦180绉掑悗澶辨晥
浣跨敤寰俊鎵爜鎷ㄥ彿
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1. Cold Wall type SiC Oxidation furnace
2. Max substrate size :100mm
3. Max process temperature : 1400C
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