鍨嬪彿锛欼BSH-1030

鐗圭偣锛欬/span>

1銆佸熀鏉挎按骞虫斁缃紝鍨傜洿鐩戞帶锛汓/span>

2銆侀澏鏉愬乏鍙崇Щ鍔紝浣嶇疆鍜岄€熷害鍙紪绋嬫帶鍒讹紱

3銆佸熀鏉匡細12鍚嬅? 鎴 6鍚嬅?锛汓/span>

4銆侀澏鏉愶細涓ら澏锛屼笁闈舵垨鍥涢澏鍙洿鎹紱

5銆佸鍏夎矾鐩戞帶銆侟/span>

6銆佹棤鑶滃帤鍒嗗竷淇鏉军/span>

宸ヨ壓鍙傛暟锛欬br/>

涓€锛岀湡绌虹郴缁烖/span>

1銆佹瀬闄愮湡绌哄害锛?.0脳10-5Pa

2銆佹娊鑷?0Pa鎵€鐢ㄦ椂闂达細鈮 10 鍒嗛挓

3銆佹紡鐜囷細 3.0脳10-5Pa m3/sec

浜岋紝鎺у埗绮惧害

1銆侀澏鏉愭棆杞細0.005掳

2銆佸伐浠舵棆杞?<1000RPM

3銆佺紪鐮佸櫒: 12000lines;480000Counts/rev

4銆佽啘鍘氫慨姝ｆ澘锛?.005掳

5銆佹尅鏉菌 position switch

涓夛紝鍏夊鐩戞帶绯荤粺OMS

1銆佹尝闀胯寖鍥达細380nm锝?650nm

2銆佸厜婧愮ǔ瀹氭€ :鐧藉厜< 0.1%锛屾縺鍏?lt; 0.02%

3銆佹尝闀垮垎杈ㄧ巼: 鐧藉厜0.2nm锛屾縺鍏?.1nm

4銆佹尝闀垮噯纭害: 鐧藉厜0.2nm 锛屾縺鍏?.1nm