技术参数：

? 技术参�?/p>

Scan modules Measuring range in x，y-direction [mm] Resolution in x，y-direction [mm] Positioning range in z-direction [mm] Max. measuring speed [mm/s]

SC 50 50X50 0.5 100 50

SC 100 100x100 0.5 100 50

SC 150 150x150 0.5 100 50

SC 200 200x200 0.5 100 50

other dimensions on request

Sensors Resolution z [��m] Resolution x，y [��m] Working distance [mm] Measuring range in z-direction [mm] Camera (optional)

Confocal point sensor CF 4 0.02 1 4 1.0 off-axis

CF 13 0.02 1 13 1.0 (BMT5)

Autofocus sensor AF 2 0.025/0.0111) 1 2 1.5/0.651) integrated

AF 5 0.025/0.0111) 1 5 1.5/0.651) (BMT3)

Chromatic white light sensor CRT 52) 0.010 4 5 0.3 off-axis (BMT5)

CRT 122) 0.025 4 12 1.0

CRT 162) 0.075 8 16 3.0

Holographic sensor CP 15 3.0 12 12 1.8 integrated

(BMT 4)

CP 42 6.0 15 42 8.0

CP 65 10.0 25 65 18.0

1) with restricted measuring range 2) with 1� 4 or 30 kHz measuring frequency available

Modules

System controller High performance industrial PC� DVD-Writer� network card＋�/p>

Windows XP Professional

Cabinet and work table MT 70 Stable container for electronic modules with work table

1550x800x750 (lxwxh in mm)

Granite measuring stand MP 100 Portal construction� 660x450x497 (lxwxh in mm) for SC 50 to SC 150

Granite measuring stand MP 200 Portal construction� 680x480x385 (lxwxh in mm) from SC 200

NF ��soft standard software NanoFocus control and evaluation software� profile and topography

representation� roughness calculation compliant with DIN EN ISO

Options

NF 3D-Plus Photo-realistic 3D presentation of topographical data (OpenGL)

NF Active X Interface modules to program individual measurement processes and

calculations (Excel/VBA)

NF Hybridmaster Automation tool for the use of ��scan? in thick film production incl. SPC and

teach in module

NF Flatmaster Automated measurement of straightness� flatness and warpage

NF Solder Automated off-line measurement of fine pitch solderpaste print in SMT production

NF AutoScan Automated measurement of profiles and surfaces at arbitrary measurement

points

主要特点９�/strong>

��Scan采用模块化设计，特点是快速测量、不接触、不破坏、自动化

��Scan的中心部件扫描模�?x/y方向样品扫描)可以和不同的传感�?/p>

(Z方向测量)连用，如Confocal point sensor、Autofocus sensor�?/p>

Chromatic white light sensor、Holographic sensor等、�/p>

AF2 自动对焦（Autofocus)

借由探测器的回馈讯号调整物镜位置，得到待测物焦点，而获得待测物的确实高�?/p>

CF4 共轭焦（Confocal� Laser)

激光光束经由物镜迅速上下移动聚焦于待测物上，此时偵测器能经由孔洞得�?*光的强度，如此侦测器根据此讯号确定其位置

? 应用

? 集成电路封装和表面贴片技�?/p>

? 厚膜混合电路:膜厚度的自动化测野�/p>

? 精密部件