Elionix电子束曝光系�?参数-价格-中国粉体罐�/title>

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} }); function showliuyan(me, showtype){ if(showtype==0){ //$("#Content").val($("#Content").attr('placeholder')); Content= document.getElementById('PopMsgFrom').Content.getAttribute('placeholder'); document.getElementById('PopMsgFrom').Content.value=Content; } if(showtype==1){ // $("#Content").val($(me).text()); alert($(me).text()); document.getElementById('PopMsgFrom').Content.value=$(me).text(); } $(".fxp").css("display","flex"); } function close_popwin(){ $(".fxp").css("display","none"); // 关闭虚拟电话后的留言� $(".dhxj").css("display","none"); $(".dhxjbox").css("display", "none"); $(".dhxjbox2").css("display", "none"); return false; } </script>  <div class="cpjs"> <div class="cpjs_tab"> <div class="js_cpjj" style="border-bottom: 3px solid #1479d7; color: #1479d7;">产品介绍</div> <div class="js_cxd">创新炸�/div> <div class="js_xgfa">相关方案</div> <div class="js_xgzl">相关资料</div> <div class="js_yhpl">用户评论</div> <div class="js_gsdt">公司动�?/div> <div class="js_wsj">问商宵�/div> </div> <script> $(function(){ // 切换 $(".cpjs_tab a").click(function(){ $(".cpjs_tab a").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><strong><span>品牌９�/span></strong><strong><span>Elionix</span></strong></p><p><strong><span>型号９�/span></strong><strong><span>ELS-F125/F100/HS50</span></strong></p><p><strong><span>关键词标签：电子束曝光，电子束直冘�/span></strong><strong></strong></p><p><strong><span>简短描述：＇�/span></strong><strong><span><40</span></strong><strong><span>字）９�/span></strong><span>利用电子束在抗蚀剂上书写纳米级图案，通过</span><span>ELB</span><span>设备曝光和显影，可用于加�?/span><span>sub-10nm</span><span>的精细结构、�/span></p><p><strong><span>一、简今�/span></strong><strong></strong></p><p><span>ELS-F125</span><span>�?/span><span>Elionix</span><span>推出的世界上*早的加速电压高辽�/span><span>125KV</span><span>的电子束曝光系统之一，其可加工线宽下限为</span><span>5nm</span><span>的精细图形、�/span><span>(</span><span>以下参数基于</span><span>ELS-F125)</span></p><p></p><p><strong><span>ELS-F125</span></strong><strong><span>具有以下优点９�/span></strong></p><p><span>l<span>超高书写精度</span></p><p><span>- 5 nm </span><span>线宽精度 <span>@ 125 kV</span></p><p><span>- 1.7 nm </span><span>电子束直徃�span>&</span>邻近效应*小化 <span>@ 125 kV</span></p><p></p><p><span>l<span>高通量、均匀性好</span></p><p><span>- </span><span>超大视野书写<span>:500um</span>视场上�span>10 nm</span>线宽</span></p><p><span>- </span><span>高束流下电子束直径依然很小，高通量而不影响分辨率，<span>2 nm </span>电子束直徃�span>@ 1 nA</span></p><p></p><p><span>l<span>界面用户友好</span></p><p><span>基于<span>Windows</span>系统皃�span>CAD</span>咋�span>SEM</span>界面<span>:</span></p><p><span>-</span><span>简单易用的图案设计功能</span></p><p><span>-</span><span>易于控制的电子束条件</span></p><p></p><p><strong><span>二、主要功胼�/span></strong><strong></strong></p><p><span>l<strong><span>主要应用</span></strong><strong></strong></p><p><span>纳米器件的微结构</span></p><p><span>集成光学器件，如光栅，光子晶体等</span></p><p><span>NEMS</span><span>结构，复杂精细结枃�/span></p><p><span>光刻掩模板，压印模板</span></p><p><span>l<strong><span>技术能劚�/span></strong><strong></strong></p><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p><span>型号</span></p></td><td><p><span>ELS-F125</span></p></td><td><p><span>ELS-F100</span></p></td><td><p><span>ELS-HS50</span></p></td></tr><tr><td><p><span>电子�?/span></p></td><td><p><span>ZrO/W </span><span>热场发射�?/span></p></td><td><p><span>ZrO/W </span><span>热场发射�?/span></p></td><td><p><span>ZrO/W </span><span>热场发射�?/span></p></td></tr><tr><td><p><span>加速电厊�/span></p></td><td><p><span>125 kV� 75 kV� 25 kV</span></p></td><td><p><span>100 kV� 50 kV� 25 kV</span></p></td><td><p><span>50 kV� 20 kV</span></p></td></tr><tr><td><p><span>*小束流直徃�/span></p></td><td><p><span>��<span> 1.7 nm (@ 125 kV)</span></p></td><td><p><span>��<span> 1.8 nm (@ 100 kV)</span></p></td><td><p><span>��<span> 2.8nm (@ 50 kV�? nA)</span></p></td></tr><tr><td><p><span>*小线宼�/span></p></td><td><p><span>5 nm or less (@125 kV)</span></p></td><td><p><span>6 nm or less (@100 kV)</span></p></td><td><p><span>20 nm (@ 50 kV� 2 nA)</span></p></td></tr><tr><td><p><span>电子束束�?/span></p></td><td><p><span>5 pA to 100 nA</span></p></td><td><p><span>20 pA to 100 nA</span></p></td><td><p><span>1 nA to 1 ��A</span></p></td></tr><tr><td rowspan="2"><p><span>视场范围</span></p></td><td><p><span>Max. 3�?00 ��m </span><span>ｗ�span> 3�?00 ��m</span></p></td><td><p><span>Max. 3�?00 ��m </span><span>ｗ�span> 3�?00 ��m</span></p></td><td><p><span>Max. 3�?00 ��m </span><span>ｗ�span> 3�?00 ��m</span></p></td></tr><tr><td><p><span>Min. 100 ��m </span><span>ｗ�span> 100 ��m</span></p></td><td><p><span>Min. 100 ��m </span><span>ｗ�span> 100 ��m</span></p></td><td><p><span>Min. 100 ��m </span><span>ｗ�span> 100 ��m</span></p></td></tr><tr><td><p><span>束流定位</span></p></td><td><p><span>Max. 1�?00�?00 </span><span>ｗ�span> 1�?00�?00 (20bit DAC)</span></p></td><td><p><span>Max. 1�?00�?00 </span><span>ｗ�span> 1�?00�?00 (20bit DAC)</span></p></td><td><p><span>Max. 1�?00�?00 </span><span>ｗ�span> 1�?00�?00 (20bit DAC)</span></p></td></tr><tr><td><p><span>束流定位分辨玆�/span></p></td><td><p><span>Min. 0.1 nm</span></p></td><td><p><span>Min. 0.1 nm</span></p></td><td><p><span>Min. 0.1 nm</span></p></td></tr><tr><td><p><span>大样品尺寷�/span></p></td><td><p><span>8" wafer or 7" square mask</span></p></td><td><p><span>8" wafer or 7" square mask</span></p></td><td><p><span>8" wafer or 7" square mask</span></p></td></tr></tbody></table><p><strong><span>三、应�?/span></strong><strong></strong></p><p></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="312847" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">