Pluto-30型等离子清洗�?参数-价格-中国粉体罐�/title>

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<p><span><strong><span>等离子表面处理系�?等离子清洗机Pluto-</span><span>30</span></strong></span></p><p><span><strong></strong><strong></strong><strong></strong></span></p><p><strong><span>Pluto30</span></strong><strong><span>是专为研发而设计的全功能等离子体系统，</span></strong><strong><span>13.56MHz</span></strong><strong><span>射频发生器和自动匹配网络电源在整个过程区域产生均匀的等离子体、�/span></strong><strong><span>Pluto 30</span></strong><strong><span>的真空腔可支持多辽�/span></strong><strong><span>7</span></strong><strong><span>个可调节样品架，以容纳各种形状尺寸的样品、�/span></strong><strong><span>Pluto30</span></strong><strong><span>具有多种电极设置，可配置戏�/span></strong><strong><span>RIE</span></strong><strong><span>咋�/span></strong><strong><span>PECVD</span></strong><strong><span>模式，从而扩大了该系统的应用范围，提供给用户****的灵活性、�/span></strong></p><p><strong></strong><strong></strong></p><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td colspan="3"><p><strong><span>Pluto30</span></strong><strong><span>参数</span></strong><strong></strong></p></td></tr><tr><td rowspan="3"><p><strong><span>腔体</span></strong><strong></strong></p></td><td><p><strong><span>腔体尺寸</span></strong><strong></strong></p></td><td><p><span>300W x 280H x 366Dmm</span></p></td></tr><tr><td><p><strong><span>容量</span></strong><strong></strong></p></td><td><p><span>30L</span></p></td></tr><tr><td><p><strong><span>电极数量</span></strong><strong></strong></p></td><td><p><span>*多可辽�/span><span>8</span><span>屁�/span></p></td></tr><tr><td rowspan="3"><p><strong><span>电极</span></strong><strong></strong></p></td><td><p><strong><span>电极间隙</span></strong><strong></strong></p></td><td><p><span>48mm</span></p></td></tr><tr><td><p><strong><span>功率电极尺寸</span></strong><strong></strong></p></td><td><p><span>226W x 210D mm</span></p></td></tr><tr><td><p><strong><span>接地电极尺寸</span></strong><strong></strong></p></td><td><p><span>260W x 210D mm</span></p></td></tr><tr><td><p><strong><span>射频系统</span></strong><strong></strong></p></td><td><p><strong><span>射频功率和频玆�/span></strong><strong></strong></p></td><td><p><span>300W/13.56MHz</span></p></td></tr><tr><td><p><strong><span>气体控制</span></strong><strong></strong></p></td><td><p><strong><span>MFC</span></strong><strong><span>控制�?/span></strong><strong></strong></p></td><td><p><span>标配</span><span>1</span><span>�?/span><span>MFC</span><span>�?夙�/span><span>4</span><span>�?/span><span>MFC</span><span>控制�?/span></p></td></tr><tr><td><p><strong><span>系统控制</span></strong><strong></strong></p></td><td><p><strong><span>7</span></strong><strong><span>寸工业触控屏</span></strong><strong></strong></p></td><td><p><span>全数字控制，实时显示工作状况，可设定操作权限和各种报警值，可储存工艺方桇�/span></p></td></tr><tr><td rowspan="2"><p><strong><span>真空泵系绞�/span></strong><strong></strong></p></td><td><p><strong><span>油泵</span></strong><strong></strong></p></td><td><p><span>32m</span><span>3</span><span>/h</span></p></td></tr><tr><td><p><strong><span>功率</span></strong><strong></strong></p></td><td><p><span>220V/10A</span><span>＋�/span><span>50Hz</span><span>，单相，</span><span>3</span><span>纾�/span></p></td></tr><tr><td><p><strong><span>尺寸</span></strong><strong></strong></p></td><td><p><strong><span>外形尺寸</span></strong><strong></strong></p></td><td><p><span>706W x 804D x 735H mm</span></p></td></tr><tr><td rowspan="4"><p><strong><span>特别装置</span></strong><strong></strong></p><p><strong><span>需汁�/span></strong><strong></strong></p></td><td><p><strong><span>工艺气体</span></strong><strong></strong></p></td><td><p><span>0.25</span><span>英寸</span><span>. </span><span>气管快接</span><span>.</span><span>适用亍�/span><span> 15-20psig;</span></p></td></tr><tr><td><p><strong><span>净化气</span></strong><strong></strong></p></td><td><p><span>0.25</span><span>英寸</span><span>. </span><span>气管快接</span><span>. </span><span>适用亍�/span><span>10-100psig</span></p></td></tr><tr><td><p><strong><span>CDA</span></strong><strong></strong></p></td><td><p><span>0.25</span><span>英寸</span><span>. </span><span>气管快接</span><span>. </span><span>适用亍�/span><span>60-90psig</span></p></td></tr><tr><td><p><strong><span>排气接口</span></strong><strong></strong></p></td><td><p><span>KF40</span></p></td></tr><tr><td rowspan="5"><p><strong><span>可选项</span></strong><strong></strong></p></td><td colspan="2"><p><strong><span>液体前驱体输送系绞�/span></strong><strong></strong></p></td></tr><tr><td colspan="2"><p><strong><span>500W/13.56MHz</span></strong><strong><span>射频系统</span></strong><strong></strong></p></td></tr><tr><td colspan="2"><p><strong><span>37m</span></strong><strong><span>3</span></strong><strong><span>/h </span></strong><strong><span>干泵</span></strong><strong></strong></p></td></tr><tr><td colspan="2"><p><strong><span>排气洗涤�?/span></strong><strong></strong></p></td></tr><tr><td colspan="2"><p><strong><span>油雾消除�?/span></strong><strong></strong></p></td></tr></tbody></table><p><strong><span>特征及优劾�/span></strong></p><p><strong></strong><strong></strong></p><p><span>**气体输送系统，提供气体分配均匀性和灵活的气体分配方泔�/span></p><p><span>不同工艺模式＇�/span><span>RIE</span><span>、下游等离子体等）的柔性电极配�?/span></p><p><span>独特的射频系统提�?*的工艺重复性和处理效率</span></p><p><span>全自动处理能劚�/span></p><p><span>图形用户界面支持配方编辑器、配方驱动流程并提供实时流程信息</span></p><p><span>台式设计需要较小的占地面积</span></p><p><strong><span>典型应用</span></strong></p><p><strong></strong><strong></strong></p><p><strong><span>表面活化</span></strong><strong></strong></p><p><span>提高表面能量以提高材料粘合性：预压模粘合；预焊线粘吇�/span></p><p><span>增强表面胶体流动性：预成型；预倒装芯片下溢</span></p><p><strong><span>表面粗糙度和蚀刺�/span></strong><strong></strong></p><p><span>降低表面应力，改善表面粘结�?/span></p><p><span>灰化和表面清�?/span></p><p><strong><span>Plasma</span></strong><strong><span>等离子蚀刻（配备</span></strong><strong><span>RIE</span></strong><strong><span>配置</span></strong><strong><span>)</span></strong><strong></strong></p><p><span>电介�?/span><span>/III-IV</span><span>材料</span></p><p><strong><span>纳米涂层（配备液体前体输送装置）</span></strong><strong></strong></p><p><span>耐水纳米涂层：印刷电路板表面处理</span></p><p><span>防腐纳米涂层：医疗器械，医疗植入�?/span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input 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