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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p></p><p>传统的光刻工艺中所使用的铬玻璃掩模板需要由专业供应商提供，但是在研发环境中，掩模板的设计通常需要经常改变。激光直写光刻技术通过以软件设计电子掩模板的方法，克服了这一问题。与通过</p><p>物理掩模板进行光照的传统工艺不同，激光直写是通过电脑软件控制，在光刻胶上直接曝光绘出所要的图案，无需掩膜工序、�/p><p>绝大多数利用电子束刻蚀制造的器件只有很小的一部分结构需要用到电子束刻蚀的高分辨率，而大部分曝光时间都浪费在了如电极连接等大面积结构的生成上。Microtech可以被用在混合模式刻蚀工艺上：只用费用昂贵、速度缓慢的电子束刻蚀加工*细小的结构，用成本低廉的Microtech加工大面积部分。Microtech先进的对准机制可以使两部工序**结合。因此Microtech也适用于已经拥有电子束刻蚀的实验环境、�/p><p></p><p>Microtech是直写刻蚀领域知名的品牌，�?*技术和稳定系统源自美国麻省理工**的林肯国家实验室，LW405系列转为科研实验室和小型超净室设计开发的多功能光刻系统，适用于快速微纳米加工和小规模生产，除了可达到超高分辨的线宽外，其稳定性和多功能性也得到业界的一致认可和好评。Microtech做为世界�?早研发激光光刻技术的供应商，打破了以往的激光直写设备高昂价格壁垒，使得研究人员可以理工与传统光刻机相当的成本完成更具灵活性的激光直写光刻工艺、�/p><p></p><p><span><em><strong></strong></em></span></p><p><span><em><strong>Key Features:</strong></em></span></p><p><span><p><span>? 标准405nm光源� 可选第二个光源375nm用于SU8(266nm等其他激光可�? </span></p><p><span>? 自动聚焦Autofocus� 基底表面粗糙跟踪功能</span></p><p><span>? 每像�?56灰阶光刻功能 </span></p><p><span>? 超高定位精度激光干涉样品台，基应�span>2</span>寸， 4寸， 6寸， 8寸和14� (可到800mm)</span></p><p><span>? 用于多层套刻功能和Front-back校准对齐功能 </span></p><p><span>? 4种可选规格线宽分辨率可到0.5um�?.7um</span></p><p><span>? 标准用于4个不同分辨率和刻写速度的可自动转换读写� </span></p><p><span>? 直写基底：硅� GaAs� InP� 玻璃� 微波� Cryogenic低温� 生物基板 </span></p><p><span>? 激光刻写图形可使用在不平或倾斜样品� </span></p><p><span>? 四种刻写模式：Beam� Stage scan� Vector� Contour</span></p><span><span><strong><em><ul><li><div><span>掩膜板制作功� Photo Mask </span></div></li><li><p><span>光刻胶直写功� Direct Writing</span></p></li><li><div><span>线宽测量功能 Metrology Function</span></div></li><li><p><span>套刻直写功能 Alignment Multi-Exposure</span></p></li><li><p><span>灰阶光刻功能 Gray Scale Exposure</span></p></li><li><p><span>3D 激光刻蚀功能 3D Laser Patterning</span></p></li></ul><span><span><p></p><span><span><span><span><strong><em><em><p><span>Applications应用:</span></p><p><strong></strong><span>掩膜板制作； 无掩膜激光直写； 成衍射光学器件； MIC微波集成电路</span></p><p><span> 微电子制作；MEMS/NEMS/传感器； 微流体； 光波管；</span></p><p><span> 石墨烯器件； 三维激光微纳米加工</span></p><span><span><strong><em><span><span><span><span><span><span><p><span></span></p><p><span></span></p><p><span></span></p></span></span></span></span></span></span></em></strong></span></span></em></em></strong></span></span></span></span></span></span></em></strong></span></span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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