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稳健性工业设计(Robust Design)和经过实践证明的高可靠性轴承系统、/span>
紧凑型结构以满足更小的物理空间安装需求、/span>
高气流量和高抽速、/span>
可任意角度安装、/span>
防护等级IP54符合工业环境应用要求、/span>
可应用于腐蚀性气体工况、/span>
SEMI S2 UL认证、/span>
完整的配件系统扩展了潜在客户的需求、/span>
更长时间维护保养时间、/span>
可现场更换轴承、/span>
Bearing 轴承 | Hybrid |
Compression ratio for Ar 氩气压缩 | > 1 1011 |
Compression ratio for H2 氢气压缩毓/span> | 1.4 105 |
Compression ratio for He 氦气压缩毓/span> | 1.3 107 |
Compression ratio for N2 氮其压缩毓/span> | > 1 1011 |
Cooling method optional 冷却方式,选择?/span> | Air/water |
Cooling method standard 冷却方式,标凅/span> | Convection |
Cooling water consumption 冷却水耗量 | 75 l/h |
Cooling water temperature 冷却水温?/span> | 5-25 C | 41-77 F | 278-298 K |
Electronic drive unit 控制?/span> | with TC 110 |
Flange (in) 法兰(进(/span> | DN 63 ISO-K |
Flange (out) 法兰(出(/span> | DN 16 ISO-KF / G 1/4" |
Fore-vacuum max. for N2 氮气**前级真空 | 22 hPa | 16.5 Torr | 22 mbar |
Gas throughput at full rotational speed for Ar 氩气全转速时的气流量 | 0.54 hPa l/s | 0.4 Torr l/s | 0.54 mbar l/s |
Gas throughput at full rotational speed for H2 氢气全转速时的气流量 | 15.3 hPa l/s | 11.48 Torr l/s | 15.3 mbar l/s |
Gas throughput at full rotational speed for He 氦气全转速时的气流量 | 2.7 hPa l/s | 2.02 Torr l/s | 2.7 mbar l/s |
Gas throughput at full rotational speed for N2 氮气全转速时的气流量 | 1.3 hPa l/s | 0.98 Torr l/s | 1.3 mbar l/s |
Interfaces 接口 | RS-485 Remote |
Mounting orientation 安装方向 | in any orientation |
Operating voltage 运行电压 | 24 ( 5 %) V DC |
Permissible magnetic field max. 容许?*磁场 | 3.3 mT |
Protection category 防腐等级 | IP 54 |
Pumping speed for Ar 氩气抽逞/span> | 66 l/s |
Pumping speed for H2 氢气抽逞/span> | 48 l/s |
Pumping speed for He 氦气抽逞/span> | 58 l/s |
Pumping speed for N2 氮气抽逞/span> | 67 l/s |
Rotation speed 2 % 旋转速度 2 % | 90000 min-1 |
Rotation speed variable 可变旋转速度 | 50-100 % |
Run-up time 启动时间 | 1.7 min |
Sound pressure level 声压?/span> | 48 dB (A) |
Ultimate pressure according to PNEUROP 根据PNEUROP的极限压劚/span> | < 1 10-7 hPa |< 7.5 10-8 Torr |< 1 10-7 mbar |
Venting connection 排气连接仵/span> | G 1/8" |
Weight 重量 | 2.4 kg | 5.29 lb |
Pfeiffer vacuum涡轮分子 Hipace80尺寸
Pfeiffer vacuum涡轮分子泵Hipace80抽逞/strong>
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