浠櫒绠€浠嬶細

MIDAS涓哄寑鑳舵満(鍙堢О涓烘棆娑備华銆佺敥鑳舵満銆丼pin Coater绛?鐨勭煡鍚嶅浗闄呭搧鐗岋紝鐩墠鍏ㄧ悆鐢ㄦ埛瓒呰繃1800鍙帮紝鍦ㄩ珮鏍°€佺爺绌舵墍鍙婂崐瀵间綋浜т笟浜湁寰堥珮鐨勫０瑾夛紝楂樻€т环姣斻€侟/strong>

鍖€鑳舵満鏈夎澶氬悕绉帮細鐢╄兌鏈恒€佹秱鑳舵満銆佹秱灞傛満銆佹棆杞秱鑳舵満銆佹棆杞秱鑶滄満銆佹棆杞秱灞傛満銆佹棆杞秱甯冩満銆佹棆杞杽鑶滄満銆佹棆杞秱鑶滀华绛夛紝 涓昏搴旂敤浜庢憾鑳跺嚌鑳讹紙Sol-Gel锛夊疄楠屼腑鐨勮杽鑶滃埗浣溿€傚叾宸ヤ綔鍘熺悊鏄珮閫熸棆杞熀鐗囷紝 鍒╃敤绂诲績鍔涗娇婊村湪鍩虹墖涓婄殑鑳舵恫鍧囧寑鐨勬秱鍦ㄥ熀鐗囦笂锛 鍘氬害瑙嗕笉鍚岃兌娑插拰鍩虹墖闂寸殑绮樻粸绯绘暟鑰屼笉鍚岋紝 涔熷拰鏃嬭浆閫熷害鍙婃椂闂存湁鍏炽€侟/p>

鍖€鑳舵満閫傜敤浜庡崐瀵间綋銆佺鐗囥€佹櫠鐗囥€佸熀鐗囥€佸鐢电幓鐠冨強鍒剁増绛夎〃闈㈡秱瑕嗗伐鑹猴紝 鍙湪宸ョ熆浼佷笟銆佺鐮斻€佹暀鑲茬瓑鍗曚綅浣滅敓浜с€佺鐮斻€佹暀瀛︿箣鐢ㄣ€侟/p>

椹揪鐨勭毊瀹炶€愮敤鎬ц兘鍙婇珮閫熸棆杞椂杞€熺殑绋冲畾鎬у拰鍧囧寑鎬ф槸杩涘彛璁惧鍜屽浗浜ц澶囩殑鍖哄埆锛侊紒

姝ゅ瀷鍙峰寑鑳舵満鍦ㄥ浗鍐呴珮鏍＄爺绌跺崟浣嶈骞挎硾浣跨敤锛屾槸杩涘彛璁惧涓€ц兘浠锋牸姣?*鐨勫瀷鍙凤紝鍒拌揣鏈熺煭锛堜竴鑸?鍛ㄥ埌璐э級锛屼娇鐢ㄧ畝鍗曪紙鐢ㄦ埛鍧囧彲鑷瀹夎鎿嶄綔锛夛紝缁翠慨蹇嵎锛?骞村唴姝ｅ父浣跨敤涓嶄細鍑洪棶棰樸€侟/p>

鎶€鏈弬鏁帮細

鏃堕棿 Time : 1~999绉掞紝鍙皟鑺侟/p>

鍩哄簳灏哄 Substrate Size: ~ 4鑻卞/~6鑻卞/~8鑻卞鍙€夋嫨

鍗＄洏鏃嬭浆閫熷害 Chuck Rotation Speed : 300~8000 rpm锛岀洿娴佷己鏈嶉┈杈?浜ゆ祦浼烘湇椹揪

鍖€鑳剁姸鎬 Spin State: 50姝ワ紝20涓柟妗堟帶鍒?鏁板瓧绋嬪簭缂栬緫)

闈㈡澘鏁板瓧寮忕紪绋嬶紝娑叉櫠鏄剧ず锛屾搷浣滄柟渚军/p>

纰楄厰灏哄 Bowl Size: 8鑻卞锛岄摑(缁忛槼鏋佹哀鍖栧伐鑹?/12鑻卞锛孲US

澧?鍑忛€熺巼 Accele/deceleration Rates: 鍙皟鑺侟/p>

鐪熺┖鍗＄洏 Vacuum Chuck : 閾?闃虫瀬姘у寲)锛屼箼缂╅啗(Acetal)

鐢垫簮 Electrical Power : 220V锛 5A

鑷甫鏃犳补鐪熺┖娉 Oilless Vacuum Pump: - 650 mmHg

灏哄(mm) Dimension: 230 X 340 X 260 / 390 X 570 X 280

涓昏鐗圭偣锛欬/strong>

1锛 妗屼笂鍨嬪寑鑳舵満锛屾秱鑶滃帤搴﹁寖鍥达細100nm~100um锛汓/p>

2锛 鍙敤浜庡厜鍒昏兌(PR)锛岃仛閰颁簹鑳?Polyimide)锛岄噾灞炴湁鏈虹墿(Metallo-organics)锛屾悁鏉傚墏(Dopant)锛岀钖勮啘(Silica Film)锛屼互鍙婂ぇ澶氭暟鐨勬湁鏈烘憾娑层€佹按婧舵恫锛汓/p>

3锛 绱у噾鍨嬭璁★紝鐢ㄦ埛缂栬緫銆佹帶鍒躲€佸瓨鍌ㄣ€佸彇鍑烘秱鑳剁▼搴忥紝鏄撲簬鎿嶄綔锛汓/p>

4锛 鍔犻€熷強鍑忛€熼€熺巼鍩轰簬璁惧畾鐨勬椂闂?杞€?Ramp Time/RPM value)鑷姩璁＄畻锛汓/p>

5锛 鐢ㄦ埛閫氳繃鍖€鑳舵満鍓嶉潰鏉挎樉绀哄睆鍜屾寜閽繘琛岀紪杈戙€佹帶鍒躲€佸瓨鍌ㄣ€佸彇鍑烘秱鑳剁▼搴忥紝骞惰繘琛屽疄楠屾搷浣溿€侟/p>