CTS AP300型CMP化学机械抛光�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><span>**、产品简介：</span></p><p><span>韩国</span><span>CTS</span><span>公司皃�/span><span>AP300</span><span>垊�/span><span>CMP</span><span>抛光机是一款科研级皃�/span><span>CMP</span><span>系统，采�?/span><span>CTS</span><span>公司工业级的设计理念，为科研工作者及先进制程开发公司提供了一套研究级别的高端设备，可兼容</span><span>4</span><span>寸，</span><span>6</span><span>寸，</span><span>8</span><span>寷�/span><span>�?2</span><span>寸样品、�/span></p><p><span>第二、产品主要特色：</span></p><p><span>1</span><span>�?/span><span>CMP</span><span>抛光头：采用气囊加载模式＋�/span><span>5</span><span>区压力独立控制，可得到良好的工业级抛光效果；</span></p><p><span></span></p><p><span>2</span><span>、自动上下片，自动抛光，干进湿出：�/span></p><p><span>3</span><span>、抛光垫修整器：摆臂式设计，田�/span><span>13</span><span>个传感器分别控制</span><span>13</span><span>个区域的下压力，可保证抛光垫高水平修整；</span></p><p><span>4</span><span>、抛光垫修整器：具有在线修整与离线修整两种模式；</span></p><p><span>5</span><span>，工艺数据可实时监测：�/span></p><p></p><p><span>6</span><span>、可存储多个</span><span>Recipe.</span></p><p><span><strong><span>第三、核心技术参数：</span></strong></span></p><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p><span>抛光夳�/span></p></td><td><p><span>兼容</span><span>4</span><span>寸，</span><span>6</span><span>寸，</span><span>8</span><span>寷�/span><span>�?2</span><span>寷�/span></p></td></tr><tr><td><p><span>抛光头摆动范図�/span></p></td><td><p><span>��15mm</span></p></td></tr><tr><td><p><span>抛光头转逞�/span></p></td><td><p><span>0-200rpm </span></p></td></tr><tr><td><p><span>抛光头加压方弎�/span></p></td><td><p><span>气囊柔性加压背压功能（</span><span>-</span><span>区加压）</span></p></td></tr><tr><td><p><span>抛光头压力范図�/span></p></td><td><p><span>0.14-14 psi</span></p></td></tr><tr><td><p><span>抛光盘尺寷�/span></p></td><td><p><span>20</span><span>英寸</span></p></td></tr><tr><td><p><span>抛光盘转逞�/span></p></td><td><p><span>0-200 rpm</span></p></td></tr><tr><td><p><span>蠕动泴�/span></p></td><td><p><span>2</span><span>�?/span></p></td></tr><tr><td><p><span>抛光液流逞�/span></p></td><td><p><span>20-500 cc/min</span></p></td></tr><tr><td><p><span>抛光垫修整器分区</span></p></td><td><p><span>13</span><span>匹�/span></p></td></tr><tr><td><p><span>抛光垫修整器在线扫描速度</span></p></td><td><p><span>10sweeps/min</span></p></td></tr><tr><td><p><span>抛光垫修整器下压劚�/span></p></td><td><p><span>3-20lbs</span></p></td></tr><tr><td><p><span>抛光垫修整器转逞�/span></p></td><td><p><span>0-150rpm</span></p></td></tr><tr><td><p><span>CMP</span><span>后片内非均匀�?/span><span>WIWNU </span></p><p><span>1sigma</span><span>，去辸�/span><span>5mm</span></p></td><td><p><span>< 5%</span></p></td></tr><tr><td><p><span>CMP</span><span>后片间非均匀�?/span><span>WTWNU </span></p><p><span>1sigma</span><span>，去辸�/span><span>5mm</span></p></td><td><p><span>< 3%</span></p></td></tr><tr><td><p><span>仪器尺寸</span></p></td><td><p><span>1000��2030��2100(W�� L�� H� mm)</span></p></td></tr><tr><td><p><span>冷却系统</span></p></td><td><p><span>包含</span></p></td></tr></tbody></table><p><span><strong><span>四，应用实例９�/span></strong></span></p><p><span>?<span>CMP</span>工艺<span> Si CMP� </span>氧化�?span> CMP(BPSG� TEOS� ThOx)� </span>金属<span> CMP(W� Cu)� </span>介质膜，<span>STI</span>筈�/span></p><p><span>?工艺开� 可协助客户进行各类材斘�span>/</span>薄膜等的<span>CMP</span>工艺技术开叐�/span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="279051" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">