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Navitar 深紫?DUV)光学系统
NanoVue 248nm 4x 深紫外变焦系 ( 光学检 0.1um)
提供工业级深紫外变焦解决方案
针对进一步扩大光学分辨率的需求,Navitar开发出NanoVue 248nm 4X深紫外变焦镜头,用于光学检测。NanoVue光学系统工作在深紫外(DUV)波段,用于检测和分析关键的缺陷。相对于传统的可见光显微镜,NanoVue成倍地提高了分辨率的极限、/span>
90nm分辨玆/span>
放大倍率75X - 300X 配合100X 物镜
0.15 to 0.037 mm FOV 对应 2/3" 格式传感器和100X物镜
采用深紫外物镜,检测尺度可?.1 um
工业级深紫外变焦解决方案
应用
? UV reticle & photomask inspection (UV 投影和掩模检?
? Thin film measurement ( 薄膜测量)
? Wafer inspection ( 晶圆检?
? CD metrology ( 关键尺寸测量)
? Failure analysis ( 失效分析)
? Process control ( 过程控制)
? Protein crystal location ( 蛋白质晶 率选和 定位)
? Pharmaceutical quality control ( 药物质量控制)
? Contaminant analysis ( 杂质分析)
? Cellular imaging & DNA analysis ( 细胞成像和DNA 分析)
NanoVue变焦镜头是理想的新产品开发和集成DUV仪器的工具,具有更高的光通量,允许客户快速开发新的、灵活的自动化仪器,具备功能丰富、成本更低、体积更小等特点、/span>
以下是利用深紫外(DUV) 光学系统 蛋白晶体 (crystalline of a protein) 进行筛选的应用
案例 请参考 -- Picking out proteins with UV.
Picking out proteins with UV
By Mike May
In the late 1990s Vu Tran president of Korima (Carson CA) and Gil Ravich president of Ravich Research (Lawndale CA) developed a microscope that could image samples under ultraviolet (UV) light. They developed this scope to “see down to about 0.2 m to examine semiconductors. When electronics makers started using nitrides though UV couldn?t go through
them. That turned Tran and Ravich?s scope into a fossil. “I was very frustrated, says Tran “and I put the microscope in my garage and said ?Forget it!? “/span>
Then in the summer of 2003 Tran and Ravich?s luck changed. Someone from a pharmaceutical company–they won?t say which one–approached them about using their scope to image proteins. By adding two filters the pair made their UV microscope focus on light at 280 nm where crystalline proteins fluoresce and are thus distinguishable from salt crystals. Making this distinction is a key step in deciding whether to move a protein to x-ray crystallography to find its structure which helps pharmaceutical scientists understand a disease target or refine a drug. Unfortunately the pharmaceutical company and Korima couldn?t agree about ownership of intellectual property so Tran and Ravich put away their scope once more.
Figure 1. Results of work done to make a crystalline form of a protein can be difficult to see under visible light () but protein crystals become quite clear under ultraviolet light at 280 nm (bottom). Moreover at 280 nm protein crystals can be distinguished from salts. (Images courtesy of Korima)
Eventually Korima?s scope the PRS-1000 Protein Review Station did come on the market–a market that is getting bigger in terms of customers and vendors.
Ultraviolet vision
Although various nomenclatures define UV?s span differently it is said to range from 10 or so nanometers to 400. “One advantage to using UV microscopy is that it allows you to image features that would not normally be seen with a standard visible-range microscope, says Paul Martin president of CRAIC Technologies (San Dimas Calif.). The shorter wavelengths of UV reveal things that visible light cannot.
In many situations though scientists want an instrument that works over a range of wavelengths. Consequently CRAIC developed the UVM-1 Ultraviolet Microscope which works in UV visible and near-infrared (NIR) regions. “It was a real challenge to achieve high image quality while using the same optics over such a broad spectral region, says Martin.
Given growing competition however no one reveals the precise details behind any optical device. As Martin says it requires “experience advanced optical design and extensive experimentation.“/span>
Some companies apply such experience to specific pieces like the NanoVue 248 nm 4X Deep UV Zoom from Navitar (Rochester NY). William Bridson director of research and development at Navitar says that this lens “is being used in a number of common biological applications where specimens are transparent in the visible region but absorb light in the ultraviolet spectrum. Beyond looking for protein crystals says Bridson this lens can be used for “pharmaceutical quality control contaminant analysis cellular imaging and DNA analysis.“/span>
UV microscopy also requires the right illumination. While Rapp Optoelectronics (Hamburg Germany) makes UV microscopes it also makes light sources. “We use white light and then filters and optics optimize the wavelength, says Gert Rapp general manager. If someone needs high-power light at say 220 nm Rapp uses pulsed xenon light as the source. In short though different applications need different features. As an example Rapp notes that “DNA absorbs strongly at around 260 nm so you can measure it directly.“/span>
Rapp Optoelectronics will even modify a customer?s existing microscope for UV applications. “We?ve done that on a variety of microscopes, Rapp says.
Digging even deeper
To look even closer at samples some scientists turn to x-rays. Conventional x-rays–because of their high energy–go right through a sample and get detected on a photographic plate. Soft x-rays though are lower in energy and they get absorbed. “Soft x-rays use diffraction optics. You can make lens and mirrors and nanostructures with features about the size of the wavelengths, explains David T. Attwood professor in residence in electrical engineering and computer science at the University of California at Berkeley and director of the Center for X-Ray Optics at the Lawrence Berkeley National Laboratory.
These wavelengths for soft x-rays go down to about 20 nm at the shortest range of what some scientists still call UV. “At 20 nm, says Attwood “all materials are absorptive there. So soft x-rays provide natural contrast with biological materials. Compared with looking at protein crystals at 280 nm a soft-x-ray system increases the resolution by a factor of more than 10.
Figure 2. Ultraviolet-viewing setups require specialized pieces such as the NanoVue 248 nm 4X Deep UV Zoom used in this microscope. (Image courtesy of Navitar).
Consequently soft-x-ray microscopy can be used to image a variety of subcellular features. “In the cylasm, says Attwood “you would see the vesicles and you can measure their variant absorption.“/span>
Still soft x-rays create some obstacles. For example a sample must be fixed so you can?t see dynamic events. Nonetheless Attwood points out that soft-x-ray microscopy is faster than electron microscopy while providing similar resolution. “You can look at lots of samples and do statistics, he says. “You can also do so with three-dimensional imaging. A researcher for
example could look at the distribution of proteins and then knock out a gene and see if the distribution changes.
In the June 2008 Journal of Structural Biology Dilworth Y. Parkinson of the Lawrence Berkeley National Laboratory and colleagues describe using soft x-rays to create three-dimensional images of schizosaccharomyces pombe–or yeast–cells. As Dilworth and colleagues write: “In addition to imaging intact cells soft-x-ray tomography has the advantage of not requiring the use of any staining or fixation protocols–cells are simply transferred from their growth environment to a sample holder and immediately cryofixed. In this way the cells can be imaged in a near native state.
“Soft-x-ray tomography is also capable of imaging relatively large numbers of cells in a short period of time and is therefore atechnique that has the potential to produce information on organelle morphology from statistically significant numbers of cells.“/span>
As with many advances in microscopy UV and its near neighbors give scientists a closer look at biology. Moreover researchers are only beginning to see what this technology can reveal
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