纳米3D结构直写�?参数-价格-中国粉体罐�/title>

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width="100%"><tbody><tr><td></td><td><span><p><strong><span> 3D</span></strong><strong><span>纳米结构高速直写机 </span></strong></p><strong><span> 源自IBM**研发成果</span></strong></p><p> NanoFrazor<span><strong>纳米3D结构直写朹�/strong>的问世，源于IBM苏黎世研发中心在纳米加工技术的**研究成果、�/p><p>NanoFrazor<strong>纳米3D结构直写朹�/strong>**次将纳米尺度下的3D结构直写工艺快速化、稳定化。通过静电力精确控制的直写垂直精度高达2nm，可以将256级灰度反映的高度信息精细的转移到直写介质上、�/p><p>该技术自问世以来已经多次刷新了世界上*�?D立体结构的尺寸，创造了世界�?小的马特洪峰模型�?小立体世界地图，*小刊物封面等世界记录、�/span></td></tr></tbody></table><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td></td><td></td><td></td></tr></tbody></table><hr/><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td colspan="2"><p><strong><span>独特的直写与反馈流程</span></strong></p><span>与以往使用AFM技术进行纳米刻蚀的尝试不同，NanoFrazor为了获得可靠的稳定性和可重复性，重新开发了直写流程９�/span></td></tr><tr><td></td><td><span><strong>PPA(聚苯二醛) 直写胵�/strong>涂敷在样品表面、�strong>背热式直写探钇�/strong>，针尖温度可�?00~400℃。与针尖接近的PPA受热瞬间分解，周围部分由于PPA热导率低而不受影响、�strong>热针震动模式直写</strong>，直写时探针加热，每次下针幅度受静电力控制，垂直精度2nm，从而写�?D图形、�strong>冷针接触模式扫描</strong>，回程扫描时探针冷却，由侧壁的热感应器探测样品高度变�?精度0.1nm)� 获得样品形貌。反馈数据修正下一行直写、�/span></td></tr></tbody></table><hr/><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p><strong><span>独有的直写针尖设讠�/span></strong></p></td></tr></tbody></table><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td></td><td></td><td></td></tr></tbody></table><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p><span>普通的AFM针尖无法满足上述NanoFrazor直写流程的需求，因此NanoFrazor所用针尖是由IBM专门研发设计的。该针尖具有两个电阻加热区域，在针尖上方的加热区域可以加热到1000<sup>o</sup>C，从而使针尖的温度达�?00~400<sup> o</sup>C。第二处加热区域作为热导率传感器位于侧臂处，其能感知针尖与样品距离的变化，精度高�?.1nm。因此在每行直写进程结束后的回扫结构时，并不是通过针尖起伏反馈形貌信息，而是通过热导率传感器感应形貌变化，从而实现了比AFM�?000余倍的扫描速度，同避免了针尖的快速磨损消耗、�/span></p></td></tr><tr><td></td></tr></tbody></table><hr/><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td colspan="2"><strong><span>NanoFrazor</span><span>纳米3D结构直写优势</span></strong></td></tr><tr><td rowspan="2"><span>1.<span>可以几乎实时观察直写结果，而不需要显影、定影、观测的传统步骤，因此能够及时发现设计问题，缩短结构、工艺开发周期、�/span><span>2.<span>因为每行直写参数都根据上一行直写结果进行了修正，所以避免了样品平整度、温度变化等带来的误差，有效地解决了热漂移带来的精度问题、�/span><span>3.<span>能够通过扫描结果进行定位，二次套刻精度高达３nm. </span><span>4.<span>以样品表面形貌为特有标定物的拼接技术，将NanoFrazor的不同直写区域（Max.75um x 75um）的拼接误差控制�?0nm左右、�/span><strong><span>5. </span></strong><strong><span>与电子束曝光相当的２Ｄ纳米直写能力：</span></strong><strong></strong><span>l </span><span>超快的直写速度，约相当于普通AFM扫描速度�?000倍，而与电子束曝光速度相当</span><span>l </span><span>高达10nm的half pitch分辨率、�/span></td><td></td></tr><tr><td></td></tr></tbody></table><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td></td></tr></tbody></table><hr/><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td colspan="3"><strong><span>图形转移</span></strong><span>通过NanoFrazor3D纳米结构直写机获得的纳米图形结构，可以通过传统成熟的工艺技术，如干法刻蚀，电镀�?/span><span>注射成型法等进行图形转移、�/span></td></tr><tr><td><p><strong><span>RIE</span></strong><strong><span>干法刻蚀</span></strong></p></td><td><p><strong><span>RIE+Lift off</span></strong></p></td><td></td></tr><tr><td></td><td><strong><span></span></strong></td><td></td></tr></tbody></table><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p><strong><span>电镀</span></strong></p></td><td><p><strong><span>注射成型</span></strong></p></td></tr><tr><td><p></p></td><td><p></p></td></tr></tbody></table><hr/><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p><strong><span>其他功能</span></strong></p><p><span>l<span>纳米颗粒有序定位排列</span></p><p><span>l<span>纳米局部化学反应诱寻�/span></p><p><span>l<span>表面化学图案、结构生戏�/span></p></td><td></p><p><span>纳米颗粒有序定位排列</span></td><td></p><p><span>氧化石墨烯的定位还原</span></td></tr></tbody></table><hr/><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td colspan="4"><span><strong>应用领域</strong></span></td></tr><tr><td></td><td rowspan="4"><p><strong><span>快速原型设计开叐�/span></strong></p><p><span>l<span>衍射透镜，全息图</span></p><p><span>l<span>非球面微</span><span>透镜阵列</span></p><p><span>l<span>波导纤维、光子晶佒�/span></p><p><span>l<span>MEMS/NEMS</span></p><p><span>l<span>表面等离子激元，超材斘�/span></p><p><span>l<span>纳米磁学</span></p><p><span>l<span>纳米电子器件</span></p><p><span>l<span>生物细胞研究</span></p><p><span>l<span>纳米流体控制</span></p><p><span>l<span>反物质物理学</span></p></td><td rowspan="4"><p><span><strong>微纳结构</strong></span></p><p><span>l<span>防伪标识</span></p><p><span>l<span>DFB </span><span>激光�?/span></p><span>l</span> ASICs </span><span>的关键部位加�?/span><p><strong><span>模板加工</span></strong></p><p><span>l<span>光掩模板</span></p><p><span>l<span>纳米压印印章</span></p><span>l注射成型模具</span></td><td></td></tr><tr><td></td><td></td></tr><tr><td></td><td></td></tr><tr><td></td><td></td></tr></tbody></table> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); 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