NRE-3000 RIE反应离子刻蚀�?参数-价格-中国粉体罐�/title>

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} }); function showliuyan(me, showtype){ if(showtype==0){ //$("#Content").val($("#Content").attr('placeholder')); Content= document.getElementById('PopMsgFrom').Content.getAttribute('placeholder'); document.getElementById('PopMsgFrom').Content.value=Content; } if(showtype==1){ // $("#Content").val($(me).text()); alert($(me).text()); document.getElementById('PopMsgFrom').Content.value=$(me).text(); } $(".fxp").css("display","flex"); } function close_popwin(){ $(".fxp").css("display","none"); // 关闭虚拟电话后的留言� $(".dhxj").css("display","none"); $(".dhxjbox").css("display", "none"); $(".dhxjbox2").css("display", "none"); return false; } </script>  <div class="cpjs"> <div class="cpjs_tab"> <div class="js_cpjj" style="border-bottom: 3px solid #1479d7; color: #1479d7;">产品介绍</div> <div class="js_cxd">创新炸�/div> <div class="js_xgfa">相关方案</div> <div class="js_xgzl">相关资料</div> <div class="js_yhpl">用户评论</div> <div class="js_gsdt">公司动�?/div> <div class="js_wsj">问商宵�/div> </div> <script> $(function(){ // 切换 $(".cpjs_tab a").click(function(){ $(".cpjs_tab a").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <h1>RIE反应离子刻蚀朹�/h1><h1><span><strong>NRE-3000RIE反应离子刻蚀朹�/strong>概述９�/span><span>独立式RIE反应离子刻蚀系统，淋浴头气体分布装置以及水冷RF样品.具有不锈钢柜子以�?3"的上盖式圆柱形铝腔，便于晶圆片装�?腔体有两个端叢�一个带�?"的视窗，另一个空置用于诊�?该系统可以支�?*�?2"的晶圆片。腔体为超净设计，并且根据配套的真空泵可以达�?0</span><span>-6</span><span> Torr 或更小的极限真空。该系统系统可以�?0mTorr�?Torr之间的真空下工作。真空泵组包含一个节流阀，一�?50l/s的涡轮分子泵，滤网过滤器，以及一�?0cfm的机械泵(带Formblin泵油).RF射频功率通过600W�?3.56MHz的电源和自动调谐器提供。系统将持续监控直流自偏压，该自偏压可以高达-500V.这对于各向异性的刻蚀至关重要、�/span></h1><p><span><strong>NRE-3000RIE反应离子刻蚀朹�/strong></span>是基于PC控制的全自动系统.系统真空压力及DC直流偏压将以图形格式实时显示，流量及功率则以数字形式实时显示.系统提供密码保护的四级访问功胼�操作员级、工程师级、工艺人员级，以及维护人员级.允许半自动模�?工程师模�?、写程序模式(工艺模式)� 和全自动执行程序模式(操作模式)运行系统。基于全自动的控制，该系统具有高度的可重复性、�/p><p><span><strong>NRE-3000RIE反应离子刻蚀朹�/strong></span>产品特点９�/p><ul><li><p>铝质腔体或不锈钢腔体</p></li><li><p>不锈钢立柛�/p></li><li><p>能够刻蚀硅的化合�?~400? /min)以及金属</p></li><li><p>典型的硅刻蚀速率�?00 ?/min</p></li><li><p>高达12"的阳极氧化铝RF样品�?/p></li><li><p>水冷及加热的RF样品�?/p></li><li><p>大的自偏厊�/p></li><li><p>淋浴头气流分市�/p></li><li><p>极限真空5x10-7Torr�?0分钟内可以达�?0-6Torr级别</p></li><li><p>涡轮分子泴�/p></li><li><p>*多支�?个MFC</p></li><li><p>无绕曲气体管�?/p></li><li><p>自动下游压力控制</p></li><li><p>终点监测</p></li><li><p>气动升降顶盖</p></li><li><p>手动上下载片</p></li><li><p>基于LabView软件的PC计算机全自动控制</p></li><li><p>菜单驱动�?级密码访问保抣�/p></li><li><p>完全的安全联�?/p></li><li><p>可选ICP离子源以及低温冷却样品台，用于深硅刻蚀</p></li></ul><p><span><strong>NRE-3000RIE反应离子刻蚀朹�/strong></span>产品相关型号９�/p><ul><li><p>NRE-4000：基于PC计算机全自动控制的独立式系统，占地面�?6“D x 44"W</p></li><li><p>NRE-3500：基于PC计算机全自动控制的紧凑型独立式系统，占地面积26“D x 26"W</p></li><li><p>NRE-3000：基于PC计算机全自动控制的台式系统，占地面积26“D x 26"W</p></li><li><p>NRP-4000：RIE/PECVD双系绞�/p></li><li><p>NDR-4000：深RIE刻蚀(深硅刻蚀)系统</p></li></ul> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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