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▼概?/span>
MSV-5000系列是测量紫外区域到近红外区域广范围波长领域内的微小样品以及微小部位的透过?反射测量的显微分光系绞/span>。广泚/span>应用于电子元件的透过?反射特性的评价、半导体的能隘/span>测量,计浊/span>膜厚、功能?/span>结晶光学特?/span>评价、色彩分析等领域、/span>
◅span>特点
可以测量从紫外区域到运/span>红外区域连续的透过?反射光谱*1搭载具有高波长分辨率和波长准确性的单色?/span>双光束光学系绞/span>优异皃/span>测光稳定?/span>测量领域尺寸*導/span>10m*2样品观测采用高解像度照相机画僎/span>标配偏光测量功能
搭载?/span>?/span>XYZ样品?/span>'/span>选项(/span>映射测量?多点测量JASCO光谱管理?/span>实现简单轻松的操作环境
*1. MSV-5200/5300
*2.*小可测量尺寸根据测量条件?测量样品而不吋/span>、/span>
▻/span>规格
▻/span>MSV-5000
机种同/span> |
MSV-5100 |
MSV-5200 |
MSV-5300 |
分光器部 |
车尔尼特纳光学系绞/span>单单色器 双光速方弎/span> |
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光源 |
30W氘灯、 20W卤素?/span> |
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测量波长范围 |
200}/span>900nm |
200}/span>2700nm |
200}/span>1600nm |
检测器 |
先/span>电子倍增箠/span> |
先/span>电子倌/span>増管、冷却型PbS先/span>导电素子 |
先/span>电子倌/span>増管、冷却型InGaAs光电事/span>级管 |
测光方式 |
逎/span>迆/span>?反射测量 |
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观察 |
高解像度照相机、光学放?/span>、内?/span>ATOS、照明:LED |
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物鏡 |
対物卡塞格林镛/span>?/span>10倍?/span>16倍?/span>32倍、可逈/span>兵/span>一 |
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集光鏠/span> |
集光卡塞格林镛/span>?/span>10倍?/span>16倍?/span>32倍、可逈/span>、集先/span>镜自动调节功胼/span> |
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样品?/span> |
扊/span>动台、自?/span>XYZ台(选项)、控制杆'/span>选项(/span> |
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软件 |
JASCO光谱管理?/span>Ver.2.0 |
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寽/span>库/span>OS |
Microsoft Windows7 Professional |
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标准程序 |
显微光谱测量(点测量?/span>显微画像保存)?/span>显微光谱解析 |
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?/span>动控刵/span>XYZ样品?/span> |
样品台移?/span>、区域映射?/span>线测野/span>、多炸/span>测量?/span>显微固定波长成像测量?/span>?/span>?/span>聚焦、多通道画像 |
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