208HR高分辨率镀膜仪（离子溅射仪�?参数-价格-中国粉体罐�/title>

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width="100%"><tbody><tr><td>货号９�/td><td>208HR</td></tr><tr><td>供应商：</td><td>广州科适特科学仪器有限公司</td></tr><tr><td>现货状态：</td><td>一个月</td></tr><tr><td>保修期：</td><td>1平�/td></tr><tr><td>数量９�/td><td>不限</td></tr><tr><td>规格９�/td><td>208HR</td></tr></tbody></table><div><p><span>208HR</span><span>髗�/span><span>分辨离子溅射仪为场发射扫描电镜应用中遇到的各种样品喷镀难题提供真正的解决方案、�/span></p><p><span>场发射扫描电镜观察时，样品需镀上极其薄、无细晶且均匀的膜层以消除电荷积累，并提高低密度材料的对比度。为了将细晶的尺寸减小到*小程度，</span><span>208HR</span><span>提供了一系列的镀膜材料，并对膜厚和溅射条件提供无可媲美的控制、�/span></p><p><span>208HR</span><span>分子涡轮泵高真空系统提供宽范围的操作压力，可以对膜层的均匀性和一致性进行精确控制，�?*程度减小充电效应。高</span><span>/</span><span>低样品室的结构设计使靶材和样品之间的距离调节变得极为方便、�/span></p><p><span>MTM-20</span><span>高分辨膜厚控制仪分辨率小亍�/span><span>0.1nm</span><span>，其作用是对所镀薄膜的厚度进行精确控制，它尤其适合场发射电镜对膜厚＇�/span><span>0.5</span><span>，�/span><span>3nm</span><span>）的要求、�/span></p><p><span>场发射扫描电镜镀膜推荐的靶材是：</span></p><ul><li><p><span>Pt/Pd</span><span>：非导电样品镀膜的通用镀膜材斘�/span></p></li><li><p><span>Cr</span><span>：优良的半导体样品的镀膜材斘�/span></p></li><li><p><span>Ir</span><span>：优良的真正无细晶的镀膜材斘�/span></p></li></ul><p><span>208HR</span><span>系统为得�?*高分辨镀膜效果提供了多种配置选择，可配备标准的旋片泵或提供干净真空的无油涡旋式真空泵，标配皃�/span><span>208HR</span><span>包含</span><span>Cr </span><span>咋�/span><span> Pt/Pd</span><span>靶、�/span></p><p><strong><span>一、主要特�?/span></strong></p><p><span>��<strong>可选择多种镀膜材斘�/strong></p><p><span>��<strong>精确的膜厚控刵�/strong></p><p><span>��<strong>样品台控制灵活：</strong><span>可对样品台进行独立的旋转、行星式转动、倾斜控制，保证形貌差异大的样品也能得�?*的镀膜效果、�/span></p><p><span>��<strong>多个样品座：</strong><span>提供</span><span>4</span><span>个样品座，每个样品座直径</span><span>32mm</span><span>，可装载多达</span><span>6</span><span>个小样品座、�/span></p><p><span>��<strong>样品室几何可变：</strong><span>样品室几何用于调节镀膜的速率＇�/span><span>1.0nm/s </span><span>｝�/span><span> 0.002nm/s</span><span>（�/span></p><p><span>��<strong>宽范围的操作压力</strong><span>：独立的功率和压力调节，氩气的压力大小范围为</span><span>0.2 - 0.005 mbar</span><span>、�/span></p><p><span>��<strong>紧凑、现代的桌上型设讠�/strong></p><p><span>��<strong>操作容易</strong></p><p><strong><span>二、技术参�?/span></strong></p><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td colspan="2"><p><strong><span>溅射系统</span></strong></p></td></tr><tr><td><p><strong>镀膜头</strong></p></td><td><p><span>低电压平面磁控管</span></p><p><span>靶材更换快逞�/span></p><p><span>环绕暗区护罩</span></p><p><span>靶材调节遮挡</span></p></td></tr><tr><td><p><strong>靶材</strong></p></td><td><p><span>Cr� Pt/Pd (</span><span>标配</span><span>)</p><p> Ta� Au� Au/Pd� Pt� W� Ir � Ti</span><span>（选配（�/span></p></td></tr><tr><td><p><strong>镀膜控刵�/strong></p></td><td><p><span>微处理器控制</span></p><p><span>安全互锁</span></p><p><span>电流控制与真空度无关</span></p><p><span>数字化可选电流（</span><span>20</span><span>＋�/span><span>40</span><span>＋�/span><span>60 </span><span>咋�/span><span> 80mA</span><span>（�/span></p></td></tr><tr><td><p><strong>样品室大導�/strong></p></td><td><p><span>直径</span><span>150mm</span></p><p><span>高度</span><span>165 - 250mm</span></p></td></tr><tr><td><p><strong>样品�?/strong></p></td><td><p><span>非重复的旋转、行星式转动，并可手动倾斜</span><span>0-90��</span><span>转动速度可调</span></p><p><span>晶体夳�/span></p><p><span> 4</span><span>个样品台</span></p></td></tr><tr><td><p><strong>模拟计量</strong></p></td><td><p><span>真空</span><span> Atm - .001mb</span><span>电流</span><span> 0-100mA </span></p></td></tr><tr><td><p><strong>控制方法</strong></p></td><td><p><span>自动气体净化和泄气功能</span></p><p><span>自动处理排序</span></p><p><span>带有“暂停”功能的数字计时�?/span></p><p><span>自动放气</span></p></td></tr><tr><td><p><strong>膜厚控制</strong></p></td><td><p><span>MTM-20</span><span>高分辨膜厚控制仪</span></p></td></tr><tr><td colspan="2"><p><strong><span>真空系统</span></strong></p></td></tr><tr><td><p><strong>结构</strong></p></td><td><p><span>分子涡轮牵引泵和旋叶泵组合，</span></p><p><span>代替旋叶泵的无油涡旋式真空泵（选配（�/span></p></td></tr><tr><td><p><strong>抽真空速度</strong></p></td><td><p><span>0.1mb </span><span>上�/span><span>300 l</span><span>/min</span></p></td></tr><tr><td><p><strong>抽真空时闳�/strong></p></td><td><p><span>1 mbar </span><span>臲�/span><span> 1 x 10<sup>-3</sup>mbar</span></p></td></tr><tr><td><p><strong>极限真空</strong></p></td><td><p><span>1 x 10<sup>-5</sup>mbar</span></p></td></tr><tr><td><p><strong>桌上型系绞�/strong></p></td><td><p><span>旋叶泵置于抗震台上，全金属真空耦合系统</span></p></td></tr><tr><td colspan="2"><p><strong><span>膜厚测控�?/span></strong></p></td></tr><tr><td><p><strong><span>MTM-20</span></strong></p></td><td><p><span>基于微处理器＋�/span><span>4</span><span>位数字显示，复位按钮＋�/span><span> 6MHz</span><span>晶体（具有寿命检查功能）＋�/span><span>5</span><span>欠�/span><span>/s</span><span>的更新速率</span></p></td></tr><tr><td><p><strong>膜厚范围</strong></p></td><td><p><span>0.0 - 999.9nm</span></p></td></tr><tr><td><p><strong>分辨玆�/strong></p></td><td><p><span>优于</span><span> 0.1nm</span></p></td></tr><tr><td><p><strong>密度范围</strong></p></td><td><p><span>0.50 - 30.00gm/cm<sup>3</sup></span></p></td></tr><tr><td><p><strong>修正系数范围</strong></p></td><td><p><span>0.25 - 8.00</span></p></td></tr><tr><td><p><strong>镀膜终止范図�/strong></p></td><td><p><span>膜厚</span><span>0 - 999.9nm</span></p></td></tr><tr><td colspan="2"><p><strong><span>系统要求</span></strong></p></td></tr><tr><td><p><strong>电气</strong></p></td><td><p><span>100-120 </span><span>戕�/span><span> 200-240VAC� 50/60Hz</span></p></td></tr><tr><td><p><strong>功率</strong></p></td><td><p><span>550VA</span><span>�?*（�/span></p></td></tr><tr><td><p><strong>氩气</strong></p></td><td><p><span>*小纯�?/span><span>99.995%</span><span>调节压力</span><span> 5 - 6 psi (0.4 bar)</p><p>6.0mm ID</span><span>连接软管</span></p><div></div></td></tr></tbody></table></div> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); 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