ALD原子层沉积系�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><span>原子层沉积（Atomic layer deposition)是一种可以将物质以单原子膜形式一层一层的镀在基底表面的方法。原子层沉积与普通的化学沉积有相似之处。但在原子层沉积过程中，新一层原子膜的化学反应是直接与之前一层相关联的，这种方式使每次反应只沉积一层原子、�/span></p><p><strong><span>应用领域９�/span></strong><span>原子层沉积技术由于其沉积参数的高度可控型（厚度，成份和结构），优异的沉积均匀性和一致性使得其在微纳电子和纳米材料等领域具有广泛的应用潜力。该技术应用的主要领域包括９�/p><p>1� 晶体管栅极介电层（high-k）和金属栅电极（metal gate（�/p><p>2� 微电子机械系统（MEMS（�/p><p>3� 光电子材料和器件</p><p>4� 集成电路互连线扩散阻挡层</p><p>5� 平板显示器（有机光发射二极管材料，OLED（�/p><p>6� 互连线势垒层</p><p>7� 互连线铜电镀沉积籽晶层（Seed layer（�/p><p>8� DRAM、MRAM介电屁�/p><p>9� 嵌入式电宸�/p><p>10� 电磁记录磁头</p><p>11� 各类薄膜＇�100nm（�/span></p><p><strong><span>技术参数：</span></strong><span>基片尺寸�?英寸�?英寸：�/p><p>加热温度�?5℃~350℃；</p><p>温度均匀性：��1℃；</p><p>前体温度范围：从室温�?50℃，��2℃；可选择加热套；</p><p>前驱体数：一次同时可处理多达 5 � ALD 前体源；</p><p>PLC 控制系统�?英寸16 位彩色触摸屏HMI控制：�/p><p>模拟压力控制器：用于快速压力检测和脉冲监测</p><p>样品上载：将样品夹具从边上拉出即可；</p><p>压力控制装置：压力控制范围从0.1~1.5Torr</p><p>两个氧化�?还原剂源，如水，氧气或氨气；</p><p>在样品上没有大气污染物，因为在沉积区的附近或上游处无 Elestamor O 型圈出现;</p><p>氧化铝催化剂处理能力�?-10 �?分钟或高� 1.2 纳米/ 分钟（同�?*（�/p><p>高纵横比沉积，具有良好的共形�?/p><p>曝光控制，用于在 3D 结构上实现所需的共形性；</p><p>预置有经验证过的 3D � 2D 沉积的优化配方；</p><p>简单便捷的系统维护及安全联锁；</p><p>目前市面上占�?小，可兼容各类洁净室要求的系统：�/p><p>可以为非标准样品而订制的夹具，如 SEM / TEM 短截纾�/span></p><p><span>原子层沉积ALD的应用包括：</p><p>1) High-K介电材料 (Al2O3� HfO2� ZrO2� PrAlO� Ta2O5� La2O3)：�/p><p>2)导电门电� (Ir� Pt� Ru� TiN)：�/p><p>3)金属互联结构 (Cu� WN� TaN，Ru� Ir)：�/p><p>4)催化材料 (Pt� Ir� Co� TiO2� V2O5)：�/p><p>5)纳米结构 (All ALD Material)：�/p><p>6)生物医学涂层 (TiN� ZrN� TiAlN� AlTiN)：�/p><p>7) ALD金属 (Ru� Pd� Ir� Pt� Rh� Co� Cu� Fe� Ni)：�/p><p>8)压电� (ZnO� AlN� ZnS)：�/p><p>9)透明电学导体 (ZnO:Al� ITO);</p><p>10)紫外阻挡� (ZnO� TiO2);</p><p>11) OLED钝化� (Al2O3);</p><p>12)光子晶体 (ZnO� ZnS:Mn� TiO2� Ta3N5);</p><p>13)防反射滤光片 (Al2O3� ZnS� SnO2� Ta2O5)：�/p><p>14)电致发光器件 (SrS:Cu� ZnS:Mn� ZnS:Tb� SrS:Ce);</p><p>15)工艺层如蚀刻栅栏、离子扩散栅栏等 (Al2O3� ZrO2);</p><p>16)光学应用如太阳能电池、激光器、光学涂层、纳米光子等 (AlTiO� SnO2� ZnO);</p><p>17)传感� (SnO2� Ta2O5);</p><p>18)磨损润滑剂、腐蚀阻挡� (Al2O3� ZrO2� WS2)：�/span></p><p><span>目前可以沉积的材料包括：</p><p>1）氧化物: Al2O3� TiO2� Ta2O5� ZrO2� HfO2� SnO2� ZnO� La2O3� V2O5� SiO2�?..</p><p>2）氮化物: AlN� TaNx� NbN� TiN� MoN� ZrN� HfN� GaN� ... </p><p>3）氟化物: CaF2� SrF2� ZnF2� ...</p><p>4）金屝� Pt� Ru� Ir� Pd� Cu� Fe� Co� Ni� ... </p><p>5）碳化物: TiC� NbC� TaC� ... </p><p>6）复合结构材斘� AlTiNx� AlTiOx� AlHfOx� SiO2:Al� HfSiOx� ... </p><p>7）硫化物: ZnS� SrS� CaS� PbS� ...</span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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