ALD/原子层沉积系�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><span><strong>原子层沉积技�?/strong></span></p><p><span><strong>原子层沉积系绞�/strong>９�/span>原子层沉积是一项沉积薄膜的重要技术，具有广泛的应用。ALD原子层沉积可以满足精确膜厚控制以及高深宽比结构的保形沉积，这方面ALD原子层沉积远超过其它沉积技术。由于前驱体流量的随意性不会带来影响，所以在ALD原子层沉积中有序、自限制的表面反应将会带来非统计的沉积。这使得ALD原子层沉积膜保持高度的光滑、连续以及无孔的特性，可以提供**的薄膜性能。ALD原子层工艺也可以实现到大基片上、�/p><p><span><strong>原子层沉积系绞�/strong></span><span><strong>应用</strong></span><span>９�/span></p><ul><li><p>高介电薄膛�/p></li><li><p>疏水涂层</p></li><li><p>钝化屁�/p></li><li><p>深硅刻蚀铜互连阻挡层薄膜</p></li><li><p>微流控台阶涂屁�/p></li><li><p>用于催化剂层的单金属涂层的燃料电江�/p></li></ul><p><span><strong>ALD-4000</strong></span><span><strong>原子层沉积系绞�/strong>特点９�/span></p><ul><li><p><span><span>独立皃�/span><span>PC</span><span>计算机控制的</span><span>ALD</span><span>原子层沉积系绞�/span></span></p></li><li><p><span><span>Labview</span><span>软件，具备四级密码控制的用户授权保护功能</span></span></p></li><li><p><span><span>安全互锁设计，强大的灵活性，可以用于沉积多种薄膜（如９�/span><span>AL2O3� AlN� TiN� ZrO2� LaO2� HfO2＋�/span><span>等等（�/span></span></p></li><li><p><span><span>12“�/span><span>的铝质反应腔体，带有加热腔壁和气动升降顶盕�/span></span></p></li><li><p><span><span>*夙�/span><span>7</span><span>�?/span><span>50ml</span><span>的加热汽缸，用于前驱体以及反应物，同时带月�/span><span>N2</span><span>或耄�/span><span>Ar</span><span>作为运载气体的快脉冲加热传输阀</span></span></p></li></ul><p><span><strong>ALD-4000原子层沉积系绞�/strong>选配项：</span></p><ul><li><p><span><span>NLD-4000</span><span>系统的选配项包含自�?/span><span>L/UL</span><span>上下轼�/span><span>(</span><span>用于</span><span>6“�/span><span>基片</span><span>)</span></span></p></li><li><p><span><span>ICP</span><span>离子溏�/span><span>(</span><span>用于等离子增强的</span><span>PEALD)</span></span></p></li><li><p><span></span><span><span>臭氧发生�?/span></span></p></li></ul><p><span><span> 等等客户定制选项</span></span></p><p><span>案例�?”晶圆片上的均匀性数�?/span></p><p></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="267624" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">