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它的主要特点是：
?Automated sequential sputtering 自动顺序溅射两层不同的成膜材斘/p>
?Dual sputter head 双溅射镀膜头
?Large format chamber 大腔室（300 mm D x 127 mm H，可?14mmH的高腔室（/p>
?Coat logging facility 镀膜日志功能（记录*?00条执行过的镀膜参数）
?Fully automated touch-screen control 全自动触摸屏控制
?Customer defined coating protocols 用户自定义镀膜方桇/p>
?High resolution turbomolecular pumping涡轮分子泵抽真空，高分辨镀膛/p>
?Vacuum shutdown 真空闭锁功能
?Dual channel film thickness monitor module，Q300T D can be fitted with an optional dual film thickness monitor (FTM) which measures the coating thickness on two quartz crystal monitors located within the chamber 双通道膜厚监控模块
?A flat adjustable stage capable of accepting 4 (101.6 mm) wafers is supplied as standard with the Q300T D. This stage has a rotation speed of 14 to 38 rpm.As an accessory a 6?152.4 mm) wafer stage is available 大样品台
?An optional lockable emergency stop switch is located in a position easily accessible for the operator on top of the coater to immediately cut power to the unit. 紧急停止开
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