美国EM-KLEEN电镜腔远程等离子清洁�?参数-价格-中国粉体罐�/title>

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} }); function showliuyan(me, showtype){ if(showtype==0){ //$("#Content").val($("#Content").attr('placeholder')); Content= document.getElementById('PopMsgFrom').Content.getAttribute('placeholder'); document.getElementById('PopMsgFrom').Content.value=Content; } if(showtype==1){ // $("#Content").val($(me).text()); alert($(me).text()); document.getElementById('PopMsgFrom').Content.value=$(me).text(); } $(".fxp").css("display","flex"); } function close_popwin(){ $(".fxp").css("display","none"); // 关闭虚拟电话后的留言� $(".dhxj").css("display","none"); $(".dhxjbox").css("display", "none"); $(".dhxjbox2").css("display", "none"); return false; } </script>  <div class="cpjs"> <div class="cpjs_tab"> <div class="js_cpjj" style="border-bottom: 3px solid #1479d7; color: #1479d7;">产品介绍</div> <div class="js_cxd">创新炸�/div> <div class="js_xgfa">相关方案</div> <div class="js_xgzl">相关资料</div> <div class="js_yhpl">用户评论</div> <div class="js_gsdt">公司动�?/div> <div class="js_wsj">问商宵�/div> </div> <script> $(function(){ // 切换 $(".cpjs_tab a").click(function(){ $(".cpjs_tab a").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p>电镜腔等离子清洁仪（远程等离子清洁仪（�/p><p>美国PIE出品的EM-KLEEN型远程等离子清洁仪，广泛用于SEM扫描电镜，FIB聚焦离子束双束电镜，TEM透射电镜，XPS_X射线光电子能谱分析仪，ALD原子层沉积系统，CD-SEM� EBR� EBI� EUVL和其它高真空系统，可同时清洁真空腔室和样品！</p><p><span><strong>污染物对电子显微镜SEM/TEM和其它高真空系统产生的影哌�/strong></span></p><p><span><strong></strong></span></p><p><span>润滑剂、真空脂、泵油样品中的高分子聚合物，或未经处理的空气都会把碳氢污染物引到真空系统中。低蒸汽压下高分子重污染物会凝聚在样品表面和腔室壁上，而使用普通气体吹扫方法很难把碳氢污染物清除、�/span></p><p><span>电子和高能光孏�/span><span>(EUV� X-ray)</span><span>能够分解存在于真空系统中或样品上的碳氢污染物。碳氢化合物的分解产物沉积在被观测的样品表面或电子光学部件上。这种碳氢污染沉积会降低</span><span>EUV</span><span>的镜面反射率，降位�/span><span>SEM</span><span>图像对比度和分辨率，造成错误的表面分析结果，沉积在光阑或其它电子组件的不导电碳氢污染物甚至会造成电子束位置或聚焦缓慢漂移。在</span><span>ALD</span><span>系统中，样品表面的碳氢污染物还会降低薄膜的界面匹配质量、�/span></p><p><span><strong></strong></span></p><p><strong><span>远程等离子清洁的原理</span></strong></p><p><span><strong></strong></span></p><p><span>远程等离子源需安装在要被清洁的眞�/span><span>空腔室上，控制器向远程离子源提供</span><span>射频能量。射频电磁场能激发等离子</span><span>体，分解输入气体而产生氧或氢的活</span><span>性基，活性基会扩散到下游的真空腔</span><span>室，并与其中的污染物发生化学反应＋�/span><span>反应产物能轻易地被抽走。远程等禺�/span><span>子清洗机可同时清洁真空系统和样品、�/span></p><p><span><strong>技术特点：</strong></span></p><ul><li><p><span>快速清洁被污染皃�/span><span>SEM</span><span>样品、�/span><span>2-60</span><span>秒氢等离子体清洁</span><span>ALD</span><span>样品。不需减速或关闭涡轮分子泴�/span></p></li><li><p><span>低等离子偏压设计减少离子溅射和颗粒生成。结合自�?*多级气体过滤技术，</span><span>SEMI-KLEEN</span><span>能够满足用户*苛刻的颗粒污染清除要汁�/span></p></li><li><p><span>可选蓝宝石管腔体和耐腐蚀性气体的流量控制器，以便支持</span><span>CF4� NF3� NH3� HF� H2S</span><span>等应�?/span></p></li><li><p><span>特有的等离子强度传感器可实时监测等离子状态，用户对等离子状态一目了焵�/span></p></li><li><p><span>基于压力传感回馈控制的自动电子流量控制器，无需手动调节针阀</span></p></li><li><p><span>直观的触摸屏操作，可定义</span><span>60</span><span>条清洗程序方桇�/span></p></li><li><p><span>拥有智能安全操作模式和专家控制模式；</span><span>SmartSchedule<sup>TM</sup></span><span>定时装置，通过检测样品装载次数或时间间隔来定时清洁系绞�/span></p></li><li><p><span>低电磁干扰设计，安静的待机模弎�/span></p></li></ul><p><span><strong></strong></span></p><p><span><strong>除了EM-KLEEN型远程等离子清洁仪之外，另有<span><strong>SEMI-KLEEN quartz</strong></span>型和<span><strong>SEMI-KLEEN sapphire</strong></span>垊�strong><span>远程等离子清洁仪可供选购，三款主要应用范围如下：</span></strong></strong></span></p><p><span><strong><strong><span><strong><span>EM-KLEEN９�span>SEM� FIB� TEM� XPS� SIMS� AES</span></strong></span></strong></strong></span></p><p><span><strong><strong><span><strong><span>SEMI-KLEEN quartz９�span>SEM� FIB� TEM� CD-SEM� EBR� EBI� XPS� SIMS� AES</span></strong></span></strong></strong></span></p><p><span><strong><strong><span><strong><span>SEMI-KLEEN sapphire９�span>ALD� EUVL� for NF3� CF4� NH3� H2� HF� H2S plasma</span></strong></span></strong></strong></span></p><p><span><strong><strong><span><strong><span>请根据您需要的应用选择合适的型号和配置、�/span></strong></span></strong></strong></span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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