FSM1201S半导体晶圆傅立叶红外分析�?参数-价格-中国粉体罐�/title>

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<script type="text/javascript" src="/js/jquery.3.0.0.min.bc.js"></script><link/><link/><style></style><p><span><o:p></o:p></span></p><p><span><o:p></o:p></span></p><p><span>半导体晶圆片的无损检测国附�span>SEMI</span>标准采纳了傅里叶红外光谱法、�span>FSM1201S</span>半导体晶圆分析仪可以根据预设的程序（可以通过软件窗口图文预设<span>1-9</span>个测定点）对<span>76</span>�?span>100</span>�?span> 125</span>�?span>150 </span>以及<span>200mm</span>直径晶圆进行自动分析。单点分析时间不超过<span>20</span>秒、�span><o:p></o:p></span></p><p><strong><span>主要技术指标：<span><o:p></o:p></span></strong></p><table cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p><span>光谱范围<span>，cm<sup>-1</sup><o:p></o:p></span></p></td><td><p><span>400�?800<o:p></o:p></span></p></td></tr><tr><td><p><span>光谱分辨玆�span>� cm<sup> -1</sup><o:p></o:p></span></p></td><td><p><span>1<o:p></o:p></span></p></td></tr><tr><td><p><span>样品中光斑直徃�span>� mm</span><span><o:p></o:p></span></p></td><td><p><span>6<o:p></o:p></span></p></td></tr><tr><td><p><span>**的晶圆直徃�span>� mm<o:p></o:p></span></p></td><td><p><span>200 (300</span><span>需预定<span>)<o:p></o:p></span></p></td></tr><tr><td><p><span>分析台定位精�?span>� mm<o:p></o:p></span></p></td><td><p><span>0.5<o:p></o:p></span></p></td></tr><tr><td><p><span>单点标准分析时间<span>� sec<o:p></o:p></span></p></td><td><p><span>20<o:p></o:p></span></p></td></tr><tr><td><p><span>仪器尺寸<span>� mm<o:p></o:p></span></p></td><td><p><span>670x650x250<o:p></o:p></span></p></td></tr><tr><td><p><span>仪器重量<span>� kg<o:p></o:p></span></p></td><td><p><span>37<o:p></o:p></span></p></td></tr></tbody></table><p><strong><span><o:p></o:p></span></strong></p><p><strong><span>适用以下标准方法９�span><o:p></o:p></span></strong></p><p><span>1（�/span><span>硅晶体中间隙氧含量的红外吸收测量方法（晶圆厚�?span>0.4</span>｝�span>2mm</span>（�span>＋�/span>浓度范围９�span>(5x10<sup>15</sup>�?x10<sup>18</sup>)��5x10<sup>15</sup></span><span>���</span><sup><span>-3</span></sup><sup><span>　</span></sup><span>国际标准</span><span>: SEMI MF1188� Test Method for Interstitial Oxygen Content of Silicon by Infrared Absorption With Short Baseline);<o:p></o:p></span></p><p><span>2（�/span><span>硅中代位碳原子含量红外吸收测量方泔�/span><span>（晶圆厚�?/span><span>0.4</span><span>｝�span>2mm</span>（�span>＋�/span>检测范围：<span>(10<sup>16</sup>�?x10<sup>17</sup>)��10<sup>16</sup></span><span>���</span><sup><span>-3</span></sup><span>国际标准</span><span>:<span>SEMI MF1391 TEST METHOD FOR SUBSTITUTIONAL ATOMIC CARBON CONTENT OF SILICON BY INFRARED ABSORPTION</span><span><o:p></o:p></span></p><p><span>3（�/span><span>硅晶体中间隙氧含量径向变化测量方泔�/span><sup><span>　</span></sup><span>国际标准</span><span>:SEMI MF951</span><span>　</span><span>Test Method for Determination if Radial Interstitial Oxygen Variation in Silicon Wafers);<span><o:p></o:p></span></p><p><span>4（�/span><span>硄�/span><span>外延层厚度的分析</span><span> (</span><span>国际标准</span><span>:SEMI MF95</span><span>　</span><span> Thickness of epitaxial layers for silicon n-n+ and p-p+ structures: (0.5�?0)��0.1 ?m� (10�?00)��1% ?m</span><span>);<span><o:p></o:p></span></p><p><span>5（�/span><span>SOS</span><span>体系硄�/span><span>外延层厚度的分析</span><span>Thickness of silicon epitaxial layers in SOS structures:(0.1�?0) ��0.01 </span><span>��</span><span>m<span><o:p></o:p></span></p><p><span>6（�/span><span>BPSG</span><span>中硼和磷浓度＋�span>PSG</span>中磷浓度的分枏�span>Boron and/or phosphorus concentration in BPSG/PSG on silicon: (1�?0) ��0.2 Wt%</span>、�span><o:p></o:p></span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="256341" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">