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nEXT85 涡轮分子泴/span>
概述
nEXT85型分子泵是成熟产?/span>EXT75DX型分子泵的升级产品,技术性能进一步提升,外形进一步简洁美观、/span>
涡轮重新整体设计,以达到优化分子泵性能的目的。在高可靠性的前提下,即能达到更高转速,又能实现更高压缩比、/span>
nEXT85性分子泵的工作性能和服务扩大了nEXT分子泵的应用范围,实现了智能安装、现场服务,成为真正的领*产品、/span>
性能特点
? 性能优越,技术领*
? 型号众多,易于用户选择
? 采用Edwards涡轮温度直接测量**技术,极大提高工作安全性能
? 前级接口和级间接口可根据用户需求选择'/span>NW40?/span>ISO63?/span>CF63?/span>ISO100)或定制
? 用户可自行更换轴承和油盒
? CMSD技术使得震动水平更位/span>
? 智能化,通过USB口和Edwards nST软件可实现对泵的监测?/span>
技术指栆/span>
nEXT85 D | nEXT85 H | ||||||||||||
入口法兰 | NW40 | ISO63 | CF63 | ISO100 | NW40 | ISO63 | CF63 | ISO100 | |||||
抽逞/span> '/span>l/s(/span> | N2 | 47 | 84 | 86 | 47 | 84 | 86 | ||||||
He | 61 | 78 | 80 | 61 | 78 | 78 | |||||||
H2 | 49 | 60 | 60 | 49 | 54 | 54 | |||||||
Ar | 44 | 80 | 84 | 44 | 80 | 84 | |||||||
厊/span> ?/span> 毓/span> | N2 | >1011 | |||||||||||
He | 8106 | 2107 | |||||||||||
H2 | 2105 | 5105 | |||||||||||
Ar | >1011 | ||||||||||||
极限真空'/span>mbar(/span> | ISO9/span><510-9+/span>CF9/span><510-10 | ||||||||||||
出口法兰 | KF16 | ||||||||||||
放气叢/span>/吹扫叢/span> | 1/8英寸BSP母螺纸/span> | ||||||||||||
质量'/span>kg(/span> | 2.9 | 3.0 | 4.4 | 3.2 | 2.9 | 3.0 | 4.4 | 3.2 | |||||
前级真空要求 '/span>mbar(/span> | N2 | 19 | 21 | ||||||||||
He | 19 | 21 | |||||||||||
H2 | 30 | 30 | |||||||||||
Ar | 22 | 21 | |||||||||||
*大连续入口流量(N2(/span> | 42sccm[水冷(水?/span>15C,环境温?/span>40C(/span>]+/span>60sccm[空冷(环境温?/span>20C(/span>] | ||||||||||||
推荐前级泴/span> | nXDS15i | 入口*高温?/span> | 120C | ||||||||||
工作姿?/span> | 垂直、水平(2(/span> | 工作转逞/span> | 90000rpm | ||||||||||
90%转速启动时闳/span> | 80W9/span>130s+/span>120W9/span>90 s | 冷却方式 | 空冷/水冷 | ||||||||||
噪声'/span>1m处) | <34dB(A)2.5 | *大耐受磁场 | 3.5mT | ||||||||||
电源 | 24V~48V DC | 模拟输出电压 | 0V~10V DC | ||||||||||
工作温度范围 | 5C ~40C | 工作湿度范围 | 10% ~90%RH | ||||||||||
储存温度范围 | -30C ~70C | 工作*高海拓/span> | 2000m | ||||||||||
订货信息
货号 | 描述 |
B8G210B01 | nEXT85D ISO63 NW16 80W |
B8G210C01 | nEXT85D CF63 NW16 80W |
B8G210101 | nEXT85D ISO100 NW16 80W |
B8G210A01 | nEXT85D NW40 NW16 80W |
B8G410B01 | nEXT85H ISO63 NW16 80W |
B8G410C01 | nEXT85H CF63 NW16 80W |
B8G410A01 | nEXT85H NW40 NW16 80W |
B8G410101 | nEXT85H ISO100 NW16 80W |
货号 | 描述 |
D39592000 | TAG涡轮控制?/span> |
D39592800 | TAG涡轮控制器电溏/span> |
D39721000 | TIC涡轮仪表控制器:200W?/span>RS232 |
B8G200820 | ACX85空气冷却?/span> |
B8G200834 | TAV5放气阀(常开(/span> |
B8G200828 | 油盒组件 |
B8G200827 | 轴承组件 |
B8G200840 | 轴承更换工具组件 |
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