kSA BandiT实时温度测试�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><span>kSA BandiT 是一种非接触、实时测量半导体衬底表面真实温度的测试系统，采用半导体材料吸收边随温度的变化，实时测量晶�?衬底的温度；并且kSA BandiT 已经成功地安装到众多的MBE� MOCVD� Sputter� PLD等半导体沉积设备上，实现了高精度、晶片的温度实时检测、�/span></p><p><span>新款的kSA BandiT多晶片温度监控软件结合了自动伺服马达控制的扫描检测功能，从而实现了MBE外延薄膜生长过程中多衬底温度实时Mapping检测、�/span></p><div><span>该系统是目前仅有能在外延薄膜生长过程提供衬底/晶片实时的二维温度信息的系统。对Wafer（及薄膜）表面温度实时、非接触、非入侵、直接的检测；采用温度和半导体材料对光的吸收边（谱带能量）相关性原理，即材料的本征特性，使得测量结果更为准确；可装载到MBE、MOCVD、溅射、蒸发系统等和热处理、退火设备上，进行实时温度检测、�/span></div><p><span><strong>技术参数：</strong></span></p><p><span> 温度范围：室温~750摄氏度（可达1300摄氏度）：�/span></p><p><span> 温度重复性：0.2摄氏度； </span></p><p><span> 温度分辨率：0.1摄氏度；</span></p><p><span> 稳定性：+/-0.2摄氏度；</span></p><p><span><strong>主要特点９�/strong></span></p><p><span> *实时、非接触、非入侵、直接的Wafer温度精确监测：�/span></p><p><span> *多基�?晶片表面2D温度Mapping监测：�/span></p><p><span> *真实的Wafer表面或薄膜温度监测；</span></p><p><span> *整合了先进的黑体辐射监测技术；</span></p><p><span> *沉积速率和薄膜厚度分析；</span></p><p><span> *表面粗糙度分析功能；</span></p><p><span> *测量激光波长范围可选（例如：可见光波段、近红外波段等）</span></p><p><span> *避免了发射率变化对测量的影响：�/span></p><p><span> *无需沉积设备Viewport特殊涂层：�/span></p><p><strong><span>应用实例９�/span></strong></p><p></p><p></p><p></p><p></p><p></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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