微波等离子化学气相沉积系�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><strong><span><strong>微波等离子化学气相沉积系绞�/strong>-MPCVD</span></strong></p><table align="center" cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td><p></p></td><td><p><span>微波等离子化学气相沉积技术（MPCVD）， 通过等离子增加前驱体的反应速率，降低反应温度。适合制备面积大、均匀性好、纯度高、结晶形态好的高质量硬质薄膜和晶体� </span></p><p><span>MPCVD是制备大尺寸单晶金刚石有效手段之一。德国iplas公司� CYRANNUS? 等离子技术解决了传统等离子技术的局限，可以�?0mbar到室压范围内激发高稳定度的等离子团，减少了因气流、气压、气体成分、电压等因素波动引起的等离子体状态的变化，从而确保单晶生长的持续性，为合成大尺寸单晶金刚石提供有力保证、�/span></p></td></tr></tbody></table><p><span>应用领域</span></p><p><span>� 大尺寸宝石级单晶钻石</span></p><p><span>� 高取向度金刚石晶佒�/span></p><p><span>� 纳米结晶金刚矲�/span></p><p><span>� 碳纳米管/类金刚石碳（DLC（�/span></p><p><span>� MPCVD同样适用于其它硬质材料如Al2O3，c-BN的薄膜沉积和晶体合成、�/span></p><h3><span>MPCVD等离子化学气相沉积设备特� </span></h3><p><span>1.CYRANNUS?技术无需在样品腔内安装内部电极，在沉积腔内，没有工作气体以外的任何物质，洁净，无污染源。等离子发生器可以保持长寿命，并可以确保腔内的等离子体的均匀分布，进一步生成晶体的纯净度和生长周期、�/span></p><p><span>2.CYRANNUS?技术的腔外多电极设置，确保等离子团稳定生成于腔内中心位置，对腔壁、窗口等无侵蚀作用，减少杂质来源，提高晶体纯度。由CYRANNUS?系统合成的金刚石，纯度均在VVS级别以上、�/span></p><p><span>3.电子温度和离子温度对中性气体温度之比非常高，运载气体保持合适的温度，因此可使基底的温度不会过高、�/span></p><p><span>4.微波发生器稳定易控，能在�?0 mbar到室压的高压强环境下维持等离子体，在气流、气压、气体成分、电压出现波动时，确保等离子体状态的稳定，保证单晶生长的过程不被上述干扰而中断，有利于获得大尺寸单晶金刚石、�/span></p><p><span>5.可以采用磁约束的方法，约束在等离子团在约定的空间内，微波结和磁路可以兼容、�/span></p><p><span>6.安全因素高。高压源和等离子体发生器互相隔离，微波泄漏小，容易达到辐射安全标准、�/span></p><p><span>7.可搭配多种功率微波源和不同尺寸腔体，满足从实验室小型设备到工业大型装置的不同需要。可以对直径达到300mm的衬底沉积金刚石薄膜、�/span></p><table align="center" cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td rowspan="2" align="left"><p><span>化学机理概要</span></p><p><span>碳氢化合物：提供沉积材料</span></p><p><span>氢气：生成sp3�?/span></p><p><span>氧：对石墨相/sp2键侵蚀</span></p><p><span>惰性气体：缓冲气体，或生成纳米晶体、�/span></p><p><span>适用合成材料９�/span></p><p><span>大尺寸宝石级单晶钻石</span></p><p><span>高取向度金刚石晶佒�/span></p><p><span>纳米结晶金刚矲�/span></p><p><span>碳纳米管/类金刚石碳（DLC（�/span></p></td><td rowspan="2" align="center"><p></p><p><span>金刚石薄膛�/span></p><p></p><p><span>宝石级钻矲�/span></p><p><span>vvs1，~1 carrat� E grade</span></p></td></tr><tr></tr></tbody></table><p><strong><span>设备选件</span></strong></p><table align="center" cellspacing="0" cellpadding="2" border="1" bordercolor="#f2f2f2" width="100%"><tbody><tr><td align="left"><p><strong><span>多种等离子发生器选择９�/span></strong></p><p><span>频率�?.45 GHz� 915 MHz</span></p><p><span>功率�?-2 kW� 1-3 kW� 3-6 kW�?-6 kW�?-30 kW</span></p><p><span>等离子团直径�?0 mm� 145 mm� 250 mm� 400 mm</span></p><p><span>工作其他范围�?-1000 mBar </span></p></td><td align="center"><p></p></td></tr><tr><td align="left" colspan="1" rowspan="1"></td><td align="left" colspan="1" rowspan="1"></td></tr><tr><td align="left" colspan="1" rowspan="1"><p><strong><span>其他应用９�/span></strong></p><p><span>MPCVD同样适用于平面基体，或曲面颗粒的其它硬质材料如Al2O3，c-BN的薄膜沉积和晶体合成。德国iplas公司凭借几十年在等离子技术领域的积累，可以为用户提供高度定制的设备，满足用户不同的应用需要、�/span></p></td><td align="center" colspan="1" rowspan="1"><p></p></td></tr></tbody></table><p><strong><span>发表文章</span></strong></p><p><span>1. Use of optical spectroscopy methods to determine the solubility limit for nitrogen in diamond single crystals synthesized by chemical vapor deposition� Journal of Applied Spectroscopy� Vol. 82� No. 2� May� 2015 (Russian Original Vol. 82� No. 2� March–April� 2015).</span></p><p><span>2. Large Area Deposition of Polycrystalline Diamond Coatings by Microwave Plasma CVD. Trans. Ind. Ceram. Soc.� vol. 72� no. 4� pp. 225-232 (2013).</span></p><p><strong><span>用户单位</span></strong></p><p><span>中科院沈阳金属所</span></p><p><span>吉林大学</span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="250386" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">