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技术参数:
Candela CS1 SPECIFICATIONS
Substrate
Sizes: 2 in. 200 mm diameter*
*Other sizes may be available on request
Thickness: 350 m 1?00 m
Material: Any opaque polished surface which scatters
10% of incident light
Any clear polished substrate which scatters 10% of incident light
Defect Sensitivity
0.3 m diameter PSL sphere equivalent 95% capture rate
(PSL on bare Si)
Other Defects and Applications
Defect Types: Particles scratches stains pits and bumps.
Classification accuracy and minimum
detectable sizes depend on optical
signatures of defects.
Sensitivity: Minimum detectable size for automatic
defect classification:
- Scratches: 100 m long 0.1 m wide
50 ? deep
- Pits: 20 m diameter 50 ? deep
- Stains: 20 m diameter 10 ? thick
Note: Defect signal must be more than 3x background P-V signal
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