鏍囧噯閰嶇疆妯″潡鍙婃妧鏈寚鏍嘃/span>

1. NanoTest Vantage 娴嬭瘯骞冲彴

1.1. 楂樺垰搴﹁姳宀楀博娴嬭瘯骞冲彴锛岄噰鐢ㄧ嚎鎬х紪鐮佸櫒鐨勮嚜鍔ㄦ牱鍝侀┍鍔?/span>

1.1.1. 绮惧瘑绉诲姩鏍峰搧銆佸疄鐜版牱鍝佸湪鏄惧井闀滃拰杞借嵎鍘嬪ご涔嬮棿鐨勮嚜鍔ㄥ垏鎹↑/span>

1.1.2. X 鏂瑰悜鍒嗚鲸鐜囧拰绉诲姩鑼冨洿锛?.02?m/50mm

1.1.3. Y 鏂瑰悜鍒嗚鲸鐜囧拰绉诲姩鑼冨洿锛?.02?m/400mm

1.1.4. Z 鏂瑰悜鍒嗚鲸鐜囧拰绉诲姩鑼冨洿锛?.02?m/50mm

1.1.5. **鏍峰搧鍘氬害锛?50mm

1.1.6. 鐢ㄦ埛鑳藉鍚屾椂鏀剧疆澶氫釜鏍峰搧锛屾牱鍝佷箣闂寸殑楂樺害宸彲杈 40mm

1.2. 鎸姩闅旂绯荤粺[闃查渿鍙癩

1.2.1. 鍏辨尟棰戠巼锛?.5 Hz

1.2.2. 鍏ㄦ満姊板紡鐨勩€佹棤婧愮郴缁 passive system

1.2.3. 鏃犻渶鍘嬬缉绌烘皵锛屽厤缁存姢

1.3. 鐜鎺у埗鏌滐紝甯︽湁涓诲姩娓╁害鎺у埗绯荤粺

1.4. 涓嶉棿鏂數婧忺/span>

1.5. 澶氱墿闀滃厜瀛︽樉寰暅]

1.5.1. 楂樺垎杈ㄧ巼鐨勯噾鐩告樉寰暅锛岄厤澶 4 涓墿闀滐細

1.5.2. 鑷姩杞瀹炵幇杩滅▼鐨勬斁澶у€嶆暟涔嬮棿鐨勫垏鎹↑/span>

1.5.3. 3MP 褰╄壊鏁板瓧鐓х浉鏈裹/span>

1.5.4. 鍘嬪ご-鏄惧井闀滀箣闂磋嚜鍔ㄥ垏鎹↑/span>

1.5.5. 鏄惧井闀?鍘嬪ご涔嬮棿鐨勫洖浣嶇簿搴︼細0.4?m

1.6. NanoTest NTX4 绯荤粺鎺у埗鍣紝閰嶅蹇呰鐨勮繛绾垮拰鎺ュご

1.7. Dell 璁＄畻鏈猴細

1.7.1. 2.93 GHz 鍙屾牳澶勭悊鍣ㄣ€?GB RAM銆?60GB 纭洏鎴栬€呮洿濂键/span>

1.7.2. 涓や釜 17 鑻卞 LCD 骞虫澘鏄剧ず鍣?/span>

1.7.3. 256mB ATI 鍙岃棰戣緭鍏?DVI/VGA)鍥惧舰鍗狘/span>

1.7.4. Dell **鎶€鏈敮鎸侊細3 骞撮殧澶╃幇鍦轰繚淇湇鍔狘/span>

1.8. Platform 4 杞欢鍖咃細鐢ㄤ簬浠櫒鎺у埗銆佽瘯楠岃璁″拰鏁版嵁鍒嗘瀽锛欬/span>

1.8.1. 瀵嗙爜绠＄悊銆佷袱绾ц繘鍏ワ細

1.8.1.1.鏍囧噯绾у埆锛氬父瑙勫伐浣溿€佸厑璁稿彈闄愬埗鐨勮瘯楠屽畾涔堻/span>

1.8.1.2.绠＄悊鍛樼骇鍒細鍙互瀹氫箟鐗规畩鐨勮瘯楠屻€佷华鍣ㄦ牎鍑嗗拰璁剧疆

1.8.2. 瀛樼洏鎴栬€呰皟鍑轰互鍓嶇殑璇曢獙璁剧疆鐢ㄤ簬蹇€熺殑閲嶅璇曢獙

1.8.3. 鍙互瀹氫箟澶氳揪 100 涓瘯楠 (姣忎釜璇曢獙鍖呭惈 400 鐐归樀)銆佽瘯楠屾寜搴忚嚜鍔ㄦ祴璇旤/span>

1.8.4. 鎵€鏈夋暟鎹槸浠ュ師濮嬫暟鎹殑鏍煎紡瀛樼洏骞剁敤浜庨殢鍚庣殑璇曢獙鍒嗘瀽

1.8.5. 璁板綍璇曢獙鍙傛暟锛屽苟鍙敤浜庨殢鍚庣殑妫€鏌ュ拰缂栬緫

1.8.6. 璇曢獙鏁版嵁鍏佽澶氱鏂囦欢鏍煎紡杈撳嚭銆佺敤浜庣涓夋柟鐨勫簲鐢?/span>

1.8.7. 閫氳繃 Micro Materials Ltd (MML)缃戠珯瀹炵幇鍏嶈垂鐨勮蒋浠跺崌绾?/span>

1.8.8. 鍏佽鍏嶈垂浠 Micro Materials Ltd (MML)缃戠珯涓嬭浇棰濆鐨勫垎鏋愯蒋浠剁敤浜庤繙绋嬬殑鏁版嵁鍒嗘瀽

2.绾崇背鍔涘娴嬭瘯閿｜/span>

2.1. 閲囩敤绾垮湀/姘哥浣撶殑楂樼簿搴︾數纾侀┍鍔ㄥ姞杞界郴缁烖/span>

2.2. 杞借嵎鎸囨爣:

2.2.1. **杞借嵎锛?00mN

2.2.2. 杞借嵎鍒嗚鲸鐜囷細3nN

2.2.3. 鍏稿瀷鐨勫櫔闊虫按骞筹細<50nN

2.2.4. *灏忔帴瑙﹀姏锛?1 ?N锛 鐢ㄦ埛鏍规嵁涓嶅悓鐨勬牱鍝侀€氳繃杞欢鏉ヨ缃负 0

2.3. 浣嶇Щ娴嬮噺閲囩敤鏍″噯鐨勭數瀹逛綅绉讳紶鎰熷櫒

2.4. 浣嶇Щ鎸囨爣锛欬/span>

2.4.1. **浣嶇Щ锛?0μm 鎴栬€ 100μm (瀹㈡埛浠婚€?

2.4.2. 浣嶇Щ鍒嗚鲸鐜囷細0.001nm

2.4.3. 鍏稿瀷鐨勪綅绉诲櫔闊虫按骞筹細<0.2nm

2.5. 浣嶇Щ鐑紓绉婚€熷害: 0.004nm/s 鎴栬€呮洿濂键/span>

2.6. 浠櫒妗嗘灦鍒氬害锛?5x106 N/m

2.7. 鐔旇瀺 SiO2 鏍囧噯鏍峰搧鐢ㄤ簬浠櫒鎬ц兘鐩戞祴

2.8. 绗﹀悎 ISO 14577-1锛?锛?锛? 鍥介檯鏍囧噯锛 鐢ㄦ埛鑷繁鍙互瀵逛华鍣ㄨ繘琛岃浇鑽枫€佹繁搴︺€侀噾鍒氱煶鎺㈠ご闈㈢Н鍑芥暟鍜屾鏋舵煍鎬х瓑 4 椤 ISO 14577 瑙勫畾鐨勫熀纭€鎸囨爣杩涜鏍囧畾

3. 寰背鍔涘娴嬭瘯閿 [鍙互灏嗕竴鍙颁华鍣ㄦ墿灞曚袱鍙颁华鍣細鍙互瀹屾垚绾崇背鍔涘鍜屽井绫冲姏瀛︽祴璇昡

3.1. 閲囩敤绾垮湀/姘哥浣撶殑楂樼簿搴︾數纾侀┍鍔ㄥ姞杞界郴缁烖/span>

3.2. 寰背鍔涘娴嬭瘯閿?鍔犺浇澶?*鎬у畨瑁呭湪绾崇背鍔涘娴嬭瘯閿?鍔犺浇澶存梺杈广€侀殢鏃跺彲鐢?/span>

3.3. 杞借嵎鎸囨爣锛欬/span>

3.3.1. **杞借嵎锛?0N

3.3.2. 杞借嵎鍒嗚鲸鐜囷細50nN 鎴 鏇村ソ

3.3.3. 鍏稿瀷鐨勫櫔闊虫按骞筹細100nN

3.4. 浣嶇Щ娴嬮噺閲囩敤鍙拷韪€佹牎鍑嗙殑骞宠鏉跨數瀹瑰櫒

3.5. 浣嶇Щ鎸囨爣锛欬/span>

3.5.1. **浣嶇Щ锛?00μm

3.5.2. 浣嶇Щ鍒嗚鲸鐜嗿 0.005nm

3.6. 鐑紓绉婚€熺巼: 0.004nm/s 鎴栨洿濂键/span>

3.7. 閽㈡爣鍑嗘牱鍝佺敤浜庝华鍣ㄧ殑鎬ц兘鐩戞祴

4. 绾崇背鍘嬬棔娴嬭瘯妯″潡

4.1. MML 杞欢鑷姩鍒嗘瀽绋嬪簭鐢ㄤ簬娴嬮噺锛欬/span>

4.1.1. 纭害

4.1.2. 妯￠噺

4.1.3. 纭害鍜屾ā閲 vs锛堝帇鍏ワ級娣卞害鏇茬嚎

4.1.4. 闀挎湡锠曞彉

4.1.5. 濉戞€у姛鍜屽脊鎬у姛銆佸鎬ф寚鏁?/span>

4.1.6. 搴斿姏/ 搴斿彉淇℃伅

4.1.7. 鎺ㄥ嚭鍔汓/span>

4.1.8. 寰背鏌卞帇缂╁姏

4.2. 鍙互鑾峰緱骞舵樉绀猴細

4.2.1. 鏈粡淇鐨勫師濮嬫暟鎹?/span>

4.2.2. 缁熻鏁版嵁鍜屽綊涓€鍖栫殑鏁版嵁

4.2.3. 纭害鍜屾ā閲 2D 鍜 3D 鍥近/span>

4.3. Berkovich 閲戝垰鐭冲帇澶 (鏇存崲鏃堕棿 <1 鍒嗛挓)

4.4. 鎻愪緵瀹屾暣鐨勫彲缂栬瘧鐨勫姞杞藉拰鍗歌浇閫熺巼浠ュ強鎺ヨЕ閫熷害

4.5. 鎺у埗杞借嵎鍜屾繁搴︾殑璇曢獙锛屽彲浠ヨ瀹氭繁搴︺€佽浇鑽锋垨鑰?*娆℃祴璇曠粨鏉熸潯浠剁瓑閫夐」銆侟/span>

4.6. 绋嬪簭鍔犺浇/鍗歌浇杞欢妯″潡鍏佽鍦ㄥ悓涓€涓帇鍏ヤ綅缃墽琛屽娆＄殑鍔犺浇/鍗歌浇寰幆锛岃幏寰楃‖搴?妯￠噺闅忔繁搴?/span>鐨勫彉鍖栦俊鎭€侟/span>

4.7. 鍘嬬棔璇曢獙閲囩敤绾挎€у姞杞介€熺巼锛屽彲浠ヨ幏寰楁亽瀹氬簲鍙橀€熺巼鐨勫帇鐥曡瘯楠屻€侟/span>

4.8. 绋嬪簭鍙互鍦ㄤ竴涓垨鑰呭涓牱鍝佺殑鎸囧畾浣嶇疆锛屽畾涔夊杈 100 涓瘯楠岋紝姣忎釜璇曢獙鍖呭惈 400 鍘嬪叆鐐归樀锛孅/span>璇曢獙浼氬湪璁惧畾鐨勬椂闂寸偣鑷姩鍚姩銆佹墽琛岋紝鍥犳淇濊瘉浠櫒鑳藉 24 灏忔椂/7 澶╁熀纭€涓婄殑杩炵画杩愯锛岃幏寰?*鐨勬祴璇曡兘鍔涖€侟/span>

4.9. 瀹屽叏鍏煎浣庤浇鑽凤紙绾崇背鍔涘娴嬮噺锛夊拰楂樿浇鑽凤紙寰背鍔涘娴嬮噺锛夛紝瀹炵幇浜岃€呮弧杞借嵎閲忕▼鐨勬祴閲忋€備綆杞借嵎锛堢撼绫冲姏瀛︽祴閲忥級鍜岄珮杞借嵎锛堝井绫冲姏瀛︽祴閲忥級鍚勯厤澶囦竴涓笓鐢ㄧ殑 Berkovich 閲戝垰鐭冲帇澶淬€侟/span>

鍥涳細閫変欢妯″潡鍙婂叾鎶€鏈寚鏍嘃/span>

浠ヤ笅閮ㄤ欢鍙互鍦ㄥ垵娆￠噰璐澶囨椂涓€骞惰喘涔帮紝涔熷彲灏嗘潵鍗囩骇

5. 绾崇背鍒掔棔鍜岀（鎹燂紙绾崇背鎽╂摝瀛︼級妯″潡

5.1. 瀹屽叏鍏煎浣庤浇鑽凤紙绾崇背鍔涘娴嬮噺锛夊拰楂樿浇鑽凤紙寰背鍔涘娴嬮噺锛夛紝瀹炵幇浜岃€呮弧杞借嵎閲忕▼鐨勬祴閲忋€侟/span>

5.2. 锛堢撼绫冲姏瀛︽祴閲忥級**鍔犺浇鍔涳細500mN銆侟/span>

5.3. 椤剁鍗婂緞涓 5μm 鐨勭悆褰㈤噾鍒氱煶鍒掑ご(鎴栬€呭叾浠栫被鍨嬬殑娴嬭瘯鎺㈠ご)銆侟/span>

5.4. 鍒掓摝閫熺巼鑼冨洿锛?.1 to 100μm/s銆侟/span>

5.5. 鍙瀹氱殑杞借嵎鍙樺寲閫熺巼銆侟/span>

5.6. 纾ㄦ崯娴嬭瘯妯″紡鍏佽 鈥滃姞杞解€濇垨鈥滃嵏杞解€濇繁搴 vs 鍒掓摝璺濈鏇茬嚎銆侟/span>

5.7. 绋嬪簭鍙互鍦ㄤ竴涓垨鑰呭涓牱鍝佺殑鎸囧畾浣嶇疆锛岃瀹氱殑鏃堕棿鐐硅嚜鍔ㄥ惎鍔ㄣ€佹墽琛屽娆″舰璨屽拰鍒掔棔璇曢獙銆侟/span>

5.8. 棰勮鎸夐挳锛坧review button锛夊彲浠ュ湪璇曢獙璁剧疆鏃讹紝璋冭妭骞朵紭鍖栨壂鎻忛€熷害銆佹壂鎻忛暱搴︺€佸姞杞介€熺巼鍜屽垝鎿﹁浇鑽枫€侟/span>

5.9. 鍙互鑾峰緱骞舵樉绀虹殑鍒掔棔鏁版嵁锛欬/span>

5.9.1. 鏈粡澶勭悊鐨勫師濮嬫暟鎹€侟/span>

5.9.2. 涓寸晫鍒掓摝杞借嵎銆侟/span>

5.9.3. 杞借嵎/娣卞害 vs 璺濈鏇茬嚎銆侟/span>

5.10.鎽╂摝鍔涙祴閲忓崟鍏冿細

5.10.1.**鍔犺浇鍔涳細200mN銆侟/span>

5.10.2.鍏稿瀷鎽╂摝杞借嵎鍒嗚鲸鐜囷細10μN.

5.10.3.鎵弿闀垮害锛?0mm.

5.10.4.閰嶆湁娓╁害琛ュ伩浼犳劅鍣ㄧ殑鎽╂摝鍔涗紶鎰熷櫒銆侟/span>

5.10.5.瓒呯ǔ瀹氭懇鎿﹀姏娴嬮噺

5.10.6.鍙互鑾峰緱骞舵樉绀虹殑鎽╂摝鍔涙懇鎿﹀姏鏁版嵁:

5.10.6.1.琛ㄩ潰绮楃硻搴︾粺璁℃暟鎹?/span>

5.10.6.2.鎽╂摝绯绘暟 vs 鏃堕棿鏇茬嚎銆侟/span>

6. 绾崇背鍐插嚮鍜岀柌鍔虫祴璇曟ā鍧桙/span>

6.1. 鍖呮嫭濡備笅涓ょ绾崇背鍐插嚮鏍囧噯娴嬭瘯鏂规硶锛欬/span>

6.1.1. 楂樺懆鐤插姵绾崇背鍐插嚮娴嬭瘯

6.1.2. 鎽嗛敜鑴夊啿妯″紡

6.2. 楂樺懆鐤插姵绾崇背鍐插嚮娴嬭瘯鍙湪涓€鐐规垨澶氱偣杩涜鍐插嚮娴嬭瘯锛涘寘鎷帇鐢甸┍鍔ㄦ牱鍝佸彴鎸姩銆佷俊鍙峰彂鐢熷櫒銆佷俊鍙锋墿澶у櫒鍜屾暟鎹垎鏋愶紝瀹屾垚鍐插嚮鍜屾帴瑙︾柌鍔虫祴璇曘€侟/span>

6.2.1. 鍘嬬數椹卞姩鏍峰搧鎸姩銆備笌鍘嬪ご鏂藉姞鐨勯潤杞借嵎鐨勫ぇ灏忥紝鐤插姵鎴栧啿鍑荤爺绌舵湁鍏颤/span>

6.2.2. 棰戠巼鑼冨洿 500Hz

6.2.3. **鎸箙 5μm

6.3. 鎽嗛敜鑴夊啿妯″紡鍙畾閲忔祴閲忓湪绮樼粨澶辨晥鍓嶇殑鎬昏兘閲忥紱鍙敤浜庝綆鍛ㄧ柌鍔充互鑾峰彇鏉愭枡鐨勯煣鎬с€傚彟澶栵紝涔熷彲瀹屾垚鍔犻€熺柌鍔崇（鎹熷拰鍔ㄦ€佺‖搴︽祴璇曘€侟/span>

6.3.1. 绯荤粺鐢 A/C 铻虹嚎绠℃帶鍒舵憜閿よ繍鍔ㄧ殑棰戠巼銆佹尟骞呭拰鍔犻€熷害銆侟/span>

6.3.2. 鍔ㄦ€佺‖搴︽祴璇曞拰绾崇背鍐插嚮鐨?*棰戠巼锛?.5Hz

6.3.3. **闈欐€佸姞杞斤細100mN

6.3.4. **鍔犻€熻窛绂伙細36μm [绾崇背鍐插嚮]銆?0μm [寰背鍐插嚮]銆侟/span>

6.4. 鍙互鍦ㄥ崟娆¤瘯楠岃繘绋嬩腑棰勮瀹氳幏鍙 100 娆¤瘯楠岋紙姣忔璇曢獙鑷冲皯鍖呮嫭 100 涓暟鎹垎鏋愮偣锛夈€侟/span>

6.5. 杩欎竴娴嬭瘯妯″潡鍙敤浜庤幏鍙栭噾灞炴潗鏂欍€侀櫠鐡锋潗鏂欍€佸垁鍏锋秱灞傚拰鑱氬悎鐗╃殑鐤插姵鎬ц兘銆侟/span>

6.6. 鍖呮嫭涓€涓柟褰㈤噾鍒氱煶鍘嬪ご銆侟/span>

7. 寰渿纾ㄦ崯妯″潡

7.1. 寰€澶嶇殑绾崇背鎶楃（锛岄€傜敤浜庢í鍚戞尟鑽★紝鍚屾椂淇濇寔鎭掑畾鐨勬硶鍚戝姏

7.2. 娴嬮噺鍙傛暟锛欬/span>

7.2.1. 浼犵粺鐨勫井闇囩（鎹烖/span>

7.2.2. 鐢卞井闇囩（鎹熻繃娓″埌灏忚寖鍥村垝鍔ㄦ懇鎿?/span>

7.2.3. 鍗曞眰鎴栧灞傛秱灞傜殑杩炵画纾ㄦ崯鏈哄埗

7.3 棰戠巼鑼冨洿锛欬/strong>5-20Hz

7.4 寰渿纾ㄦ崯杞ㄨ抗锛欬/strong>5?m

7.5 **鍒掔棔杞ㄨ抗锛欬/strong>20 ?m

7.6 杞借嵎鑼冨洿锛欬/strong>1-500mN锛堢撼绫冲姏瀛︽祴璇曪級

7.7 鍘嬪ご涓哄ぇ鏇茬巼鍗婂緞鐨勭悆褰㈠帇澶达紙200μm 鐩村緞锛堻/span>

8. DMA 鍔ㄦ€佸姏瀛︽€ц兘娴嬮噺

8.1. 瀵逛簬瀛樺偍妯￠噺鍜屾崯鑰楁ā閲忕殑娴嬭瘯锛屽帇鐥曟祴璇曚細浣垮緱寮规€х郴鏁板拰寮规€фā閲忕殑鑾峰彇鍙樺緱澶嶆潅锛岃€屽脊鎬х郴鏁板拰寮规€фā閲忔槸鑱氬悎鐗╂牱鍝佽〃闈?杩戣〃闈㈢殑鑳介噺闃诲凹鎬ц兘鎸囩ず鍙傛暟

8.2. 鍥哄畾鍦ㄦ斁澶у櫒鍜屾牱鍝佹尟鍔ㄧ郴缁熶笂浠ュ湪鏍峰搧琛ㄩ潰杩涜闇囧姩锛屽苟鍏佽鍦ㄨ繛缁殑鍩哄簳涓婅繘琛屾祴璇旤/span>

8.3. 鎸崱棰戠巼鑼冨洿锛?.1Hz锝?50Hz

8.4. 鎸箙锛氫簹 nm锝?0nm

8.5. 鍙笌绾崇背鍔涘娴嬭瘯妯″潡鍏煎

9. 500鈩冮珮娓╂牱鍝佹帶鍒剁郴缁烖/span>

9.1. **鍔犵儹娓╁害锛?00?C

9.2. 鍘嬪ご鍜屾牱鍝佺嫭绔嬫帶娓╋紝鍘嬪ご鍜屾牱鍝佹槸绛夋俯鎺ヨЕ锛屾祴璇曡繃绋嬩腑娌℃湁鐑祦

9.3. 娓╁害鎺у埗绯荤粺锛岀‘淇濆帇澶村拰鏍峰搧鎺ヨЕ鍓嶅浜庣儹骞宠　鐘舵€?/span>

9.4. 閰嶆湁鍔犵儹鎸℃澘锛屼互鍑忓皯瀵逛华鍣ㄥ叾浣欓儴浣嶇殑鐑緪灏凕/span>

9.5. 甯︽湁灏栫鍔犵儹鍣ㄧ殑 Berkovich 鍘嬪ご

9.6. 娴嬮噺鍖哄煙鑼冨洿锛?6mm x 16mm

9.7. 500 ?C 涓嬩綅绉荤儹婕傜Щ閫熷害锛? 0.01 nm/sec.

9.8. 鍏煎鍘嬬棔娴嬭瘯銆佸垝鐥曟祴璇曞拰鍐插嚮娴嬭瘯妯″潡.

10. 楂樻俯鎵╁睍妯″潡锛堢浜屾牴鎽嗛敜锛堻/span>

10.1.閽堝绗簩鏍规憜閿ょ殑鐑緪灏勬尅鏉军/span>

10.2.楂樻俯鍘嬪ご涓€涓?/span>

11. 楂樻俯鎵╁睍妯″潡锛?50?C锛堻/span>

11.1.娓╂帶鍖洪棿锛?00°C 锝 750°C

11.2.姘寲纭煎帇澶达紝鐙珛鐨勫帇澶村姞鐑櫒

11.3.姘村惊鐜喎鍗寸郴缁烖/span>

11.4.鍙€傜敤浜庣撼绫冲姏瀛︽祴璇曟ā鍧桙/span>

11.5.鎺ㄨ崘鍚屾椂閰嶅姘旀皼淇濇姢妯″潡

12. 姘旀皼淇濇姢

12.1.閫氬叆淇濇姢姘斾綋浠ュ噺灏戞祴璇曠幆澧冧腑姘ф垨姘村垎鐨勫惈閲廃/span>

12.2.涓撻棬鐨勬皵浣撶璺紝鍙互浣跨敤 N2 鎴 Ar

12.3.涓€濂楁哀妫€娴嬪櫒锛岀洃鎺ф祴璇曠幆澧冧腑鐨勬哀鍚噺

13. 娑蹭綋鏍峰搧姹燑/span>

13.1.纭肩閰哥洂鐜荤拑娑蹭綋姹犲拰鍘嬪ご閫傞厤鍣紝淇濊瘉鏍峰搧鍜屽帇澶村畬鍏ㄦ蹈鍏ユ恫浣撲腑杩涜娴嬭瘯

13.2.绯荤粺鑷姩鍒囨崲杩涜棰勫瓨鍌ㄧ殑娑蹭綋鏍″噯

13.3.鍖呮嫭 Berkovich 鍘嬪ご銆侟/span>

14. 浣庢俯鏍峰搧鎺у埗绯荤粺

14.1.鎺ф俯鏂瑰紡锛? 娈 Peltier

14.2.娓╁害鑼冨洿锛氬娓╋紙鎴栬€ 20锛 ~ -20?C

14.3.鎺ф俯绮惧害锛?.15 degC (涓庢俯搴︽湁鍏?

14.4.Peltier 鍐峰嵈鍘嬪ご锛屽帇澶村拰鏍峰搧鏄瓑娓╂帴瑙︼紝娴嬭瘯杩囩▼涓病鏈夌儹娴?/span>

14.5.浣庢俯鏍峰搧鍙板吋瀹瑰帇鐥曘€佸垝鐥曘€佺（鎹熴€佸啿鍑伙紙鏍峰搧鎸姩锛夌瓑銆侟/span>

15. 楂樻俯鏄惧井闀淈/span>

15.1.鐗╅暅娌跨潃娴嬭瘯鎽嗛敜鍥哄畾

15.2.鏍囧噯鐗╅暅閰嶇疆锛?x锛 20x锛夛紝鍙墿灞曡嚦 5 涓墿闀滈厤缃紙4x锛?x锛?0x锛?0x锛?0x锛堻/span>

15.3.3MP 褰╄壊鏁板瓧鐓х浉鏈裹/span>

15.4.鍘嬪ご-鏄惧井闀滀箣闂磋嚜鍔ㄥ垏鎹↑/span>

15.5.鏄惧井闀?鍘嬪ご涔嬮棿鐨勫洖浣嶇簿搴︼細0.4?m

16. 鍗曟ā寮忓師瀛愬姏鏄惧井闀滐紙AFM锛堻/span>

16.1.鎺ヨЕ妯″紡锛氭亽鍔涙ā寮忥紝鎭掗珮妯″紡锛屽姏璋冨埗妯″紡锛屾墿灞曠數闃绘ā寮忋€侟/span>

16.2.鎵弿妯″紡锛氬墠杩涙壂鎻?鍚庨€€鎵弿 妯″紡/ 甯у悜涓娿€佸悜涓嬫垨杩炵画妯″紡 / 鎭掗珮妯″紡锛岃繖浜涙壂鎻忔ā寮忓悓鏃迭/span>

瀛樺湪浜庢帴瑙︽ā寮忓拰闈炴帴瑙︽ā寮忎腑銆侟/span>

16.3.鏃嬭浆鍜屽€炬枩瑙掑害锛?锝?60°锛岀‖浠 X 鍜 Y 鐨勬枩鐜囪ˉ鍋垮姛鑳姐€侟/span>

16.4.鏁版嵁鏄剧ず锛氱敤鎴峰彲瀹氫箟鐨勬墍鏈夐€氶亾鐨勮疆寤撳浘鍜岃壊褰╁浘

16.5.鎵弿鑼冨洿锛欬/span>

16.6.閫氳繃鑷姩鐨勮嚜鎴戣皟鏁达紝浣挎偓鑷傛帓鎴愮洿绾裤€侟/span>

16.7.鑷姩椹辫繎璺濈锛?.5mm銆侟/span>

16.8.閫氳繃鍙岄€忛暅绯荤粺瑙傚療鏍峰搧锛堥《閮ㄥ拰渚ч潰杩涜瑙傚療锛堻/span>

17. 鍙屾ā寮忓師瀛愬姏鏄惧井闀滐紙AFM锛堻/span>

17.1.鎺ヨЕ妯″紡锛氭亽鍔涙ā寮忥紝鎭掗珮妯″紡锛屽姏璋冨埗妯″紡锛屾墿灞曠數闃绘ā寮忋€侟/span>

17.2.闈炴帴瑙︽ā寮忥細鎭掑姏妯″紡锛屾亽楂樻ā寮忥紝鐩镐綅妯″紡锛岀數纾佸姏妯″紡锛岄潤鐢靛姏妯″紡

17.3.鎵弿妯″紡锛氬墠杩涙壂鎻?鍚庨€€鎵弿 妯″紡/ 甯у悜涓娿€佸悜涓嬫垨杩炵画妯″紡 / 鎭掗珮妯″紡锛岃繖浜涙壂鎻忔ā寮忓悓鏃迭/span>瀛樺湪浜庢帴瑙︽ā寮忓拰闈炴帴瑙︽ā寮忎腑銆侟/span>

17.4.璋卞浘锛氬姏-璺濈锛屽姏-鐢靛帇锛屾尟骞?璺濈锛岀浉浣?璺濈锛岀數娴?鐢靛帇锛岀數娴?璺濈銆侟/span>

17.5.鏃嬭浆鍜屽€炬枩瑙掑害锛?锝?60°锛岀‖浠 X 鍜 Y 鐨勬枩鐜囪ˉ鍋垮姛鑳姐€侟/span>

17.6.鏁版嵁鏄剧ず锛氱敤鎴峰彲瀹氫箟鐨勬墍鏈夐€氶亾鐨勮疆寤撳浘鍜岃壊褰╁浘

17.7.鎵弿鑼冨洿锛欬/span>

17.8.閫氳繃鑷姩鐨勮嚜鎴戣皟鏁达紝浣挎偓鑷傛帓鎴愮洿绾军/span>

17.9.鑷姩椹辫繎璺濈锛?.5mm銆侟/span>

17.10.閫氳繃鍙岄€忛暅绯荤粺瑙傚療鏍峰搧锛堥《閮ㄥ拰渚ч潰杩涜瑙傚療锛堻/span>

17.11.鍖呮嫭寮规€х郴鏁版祴閲忓崟鍏傸/span>

18. 3D 鍘熶綅鎴愬儚

18.1.鎻愪緵鍘熶綅 3D 琛ㄩ潰鎴愬儚銆侟/span>

18.2.涓庨珮娓╂牱鍝佸彴鍏煎銆侟/span>

18.3.楂樼簿搴 X锛孻 鍙板垎杈ㄧ巼锛?nm銆侟/span>

18.4.鍒嗘瀽杞欢鎻愪緵 2D 鍜 3D 鍥俱€佸钩婊戙€佷綋绉垎鏋愩€佺矖绯欏害鍒嗘瀽銆佽〃闈㈢Н鍒嗘瀽鍜屽緢澶氬叾浠栫殑鍔熻兘銆侟/span>

18.5.X锛孻 鎵弿鑼冨洿锛?00μm x 100μm銆侟/span>

18.6.X锛 Y 鏍峰彴鍒嗚鲸鐜嗿 2 nm

18.7.闂幆绾挎€э細0.03%

18.8.鍙互 ASCII 鏂囦欢鐨勬柟寮忚緭鍑哄埌绗笁鏂瑰浘鍍忓垎鏋愯蒋浠跺寘銆侟/span>