URE-2000/600紫外单面光刻�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p><span><strong><span><strong>URE-2000/600 紫外单面光刻朹�/strong></span></strong></span></p><p><span><strong><span>1、设备主要技术指标：</span></strong></span></p><p><span><span>(1)光束口径� 650mm��650mm</span></span></p><p><span><span>(2)有效曝光面积�?00mm��600mm</span></span></p><p><span><span>(3)分辨力：�?</span></span><span>��m</span></p><p><span><span>(4)对准精度９�/span> ��<span>1.5</span>��m</span></p><p><span><span>(5)对准显微镜中心距�?5mm-600mm 可调</span></span></p><p><span><span>(6)掩模尺寸�?50mm��650mm</span></span></p><p><span><span>(7)样片尺寸：可适应��300mm�?#1060;450mm�?#1060;600mm 300mm��300mm�?50mm��450mm�?00mm</span></span><span><span>��600mm，厚度为 0.2mm�?0mm 的多种规格样片；</span></span></p><p><span><span>(8)光源不均匀性：� 95%�?#1060;600mm（�/span></span></p><p><span><span>(9)掩模相对于样片运动行程：X: </span></span>�� <span><span>15mm; Y: </span></span>�� <span><span>15mm; Z�?5mm Thelta: </span></span>�� <span><span>10o</span></span></p><p><span><span>(10)曝光面光强：>15mW/cm2（i、g、h 线）</span></span></p><p><span><span>(11)汞灯功率�?500W（直流）</span></span></p><p><span><span>(12)曝光量设定方式：定时（计时方� 0.1s-9999.9s，设定精� 0.1s（�/span></span></p><p><span><strong><span>2．技术主要组成部刅�/span></strong></span></p><p><span><span>大面积精细胶模图形结构成型机组成主要由：高均匀照明曝光系统、对准工件台糺�/span></span><span><span>统、CCD 对准系统、计算机控制系统、气动控制系统及辅助设备构成。各系统构成与配�?/span></span></p><p><span><span>如下:</span></span></p><p><strong><span><span>�?）高均匀照明系统包括９�/span></span></strong></p><p><span><span>� 冷光椭球镜；</span></span></p><p><span><span>�?500W 进口直流高压汞灯(德国欧司�?</span></span></p><p><span><span>。XYZ 汞灯调节台；</span></span></p><p><span><span>� 光学系统：椭球反射镜、光栏、快门、平面冷光反射镜 1、平面冷光反射镜 2、蝇眼逎�/span></span><span><span>镜组、抛物面冷光反射镜；</span></span></p><p><span><span>� 冷却风扇：�/span></span></p><p><span><span>� 循环水冷系统、�/span></span></p><p><strong><span><span>�?）对准工件台系统包括９�/span></span></strong></p><p><span><span>。掩模样片相对运动台：�/span></span></p><p><span><span>� 转动台；</span></span></p><p><span><span>� 样片调平机构，自动完成；</span></span></p><p><span><span>。样片调焦机构，自动调整：�/span></span></p><p><span><span>。承片台 10 个：��300mm�?#1060;450mm�?#1060;600mm � 300mm��300mm�?50mm��450mm�?00mm</span></span><span><span>��600mm：�/span></span></p><p><span><span>� 掩模� 1 个：650mm��650mm：�/span></span></p><p><span><span>� 抽拉式上下片机构、�/span></span></p><p><strong><span><span>�?）CCD 对准系统包括９�/span></span></strong></p><p><span><span>� 光源、电源；</span></span></p><p><span><span>� 显微镜工作台：�/span></span></p><p><span><span>� 成像光学系统（两套）：�/span></span></p><p><span><span>� 数据采集卡；</span></span></p><p><span><span>� CCD 图像处理部件（两套）、�/span></span></p><p><strong><span><span>�?）电控系统包括：</span></span></strong></p><p><span><span>� 大功率汞灯触发电源；</span></span></p><p><span><span>。单片机控制系统：�/span></span></p><p><span><span>� 薄膜开关面板；</span></span></p><p><span><span>� 控制柜桌：�/span></span></p><p><strong><span><span>�?）气动系统包括：</span></span></strong></p><p><span><span>� 气缸、电磁阀、减压阀、气动开关等：�/span></span></p><p><span><span>3 。电磁阀驱动部件：�/span></span></p><p><span><span>� 气动显示仪表、�/span></span></p><p><strong><span><span>�?）其他配套附仵�/span></span></strong></p><p><span><span>� 真空泵一台（无油泵、SK-65C 型）：�/span></span></p><p><span><span>� 空压机一台（静音型、YB-W30 型）：�/span></span></p><p><span><span>。水冷机一台（H35W 型）：�/span></span></p><p><span><span>� 配套接口管道</span></span></p><p><span><strong><span>3.相关技术资料：</span></strong></span></p><p><span><span>。设备使用及维护说明�?/span></span></p><p><span><span>。出厂检验合格证、�/span></span></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 暂无数据� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="236866" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">