看了Model 6020S紫外光刻机的用户又看亅/p>
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OAI的面板级掩模光刻 Model 6020S
用于FOPLP型号6020S -半自动化或自动化+/span>实现500mm x 500mm晶圆尺寸的FO-PLP加工.
OAI’s Panel Level Mask Aligner for FOPLP Model 6020S - Semi or Automated
Enabling FO-PLP Processing at 500mm x 500mm Wafer Sizes
OAI掩模对准器,不同的印刷方弎/span>
距离: 间隙可设置在一个非常宽的范围内+/span>增量精度1M
软接? ?基材被带入非常柔软的机械接触曝光时的掩模。通过接触力可谂/span>软件设置
金属触点: ?接触额外的氮气压劚/span>
真空接触: ?真空级别控制接触力。真空度丹/span>由用户设?/span>
OAI Mask Aligners
Various Printing Modes
PROXIMITY:
? THE GAP IS SETTABLE OVER A VERY WIDE RANGE WITH AN INCREMENTAL PRECISION OF 1M
SOFT CONTACT:
? SUBSTRATE IS BROUGHT INTO VERY SOFT MECHANICAL CONTACT WITH THE MASK DURING EXPOSURE. THE CONTACT FORCE IS ADJUSTABLE VIA SOFTWARE SETTINGS
HARD CONTACT:
? CONTACT WITH ADDITIONAL N2 pressure VACUUM CONTACT:
? VACUUM LEVEL CONTROLS THE CONTACT FORCE. LEVEL OF VACUUM IS SET BY USER
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