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OAI 掩膜光刻朹/strong>Model 6000型的特点和优炸/strong>
?高吞吐量?80 wph?*掩模模式)咋/span>生产和研发的*低运行成?/span>
?ABO光学与光均质器，以实现所需各种电阻的分辨率和曝先/span>
?用于大深度Foucs的特殊光?/span>
?灵活处理基板?“平方到12”平斸/span>
?可手动或自动上料
配置、/span>
?系统配置顶部?或底部侧? IR 自动对准Vision ProR软件
?适用于各种基材尺寸和类型
?基于Windows的软仵/span>
?菜单驱动的GUI与工艺配方存?/span>
?全场曝光，提高吞吐量
?顶部加载口罩支架，方便，快速，安全的口罩更捡/span>
?可选全球调平零接触处理
?双臂4轴机器人搬运系统(可?
?自调平工装隔?/span>
?**的服务支??5%的服务水?
Mask Aligner - Model 6000 Features and Benefits
? High throughput (180 wph first mask mode) and Lowest Cost of operation for production and R&D
? ABO Optics with light homogenizer to achieve required resolutions & exposures for various resists
? Special Optics for Large Depth of Foucs
? Flexibility with substrate handling from 2”sq to 12”sq
? Comes in manual loading or automated loading configurations.
? System configuration with top and/or bottom side / IR auto alignment with Cognex Vision ProR Software
? Adaptable to various substrate sizes and types
? Windows based software
? Menu driven GUI with process recipe storage
? Full field exposure for higher throughput
? Top load mask holder for easy fast and safe mask replacements
? Optional Global leveling for zero contact processing
? Dual arm 4-axis robot handling system (optional)
? Self leveling tooling vibration isolation
? Superior service support (~95% service level)
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