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OAI Model 212型桌面掩模对准系绞/span>
。输出光谱范図Hg: G(436nm),H(405nm),I(365nm)?10nm,Hg-Xe: 260 nm?20 nm或LED:365 nm?95 nm?05 nm
。灯功率范围?000?000 w
。选择UVLED (365 nm?05 nm)光源
。基片尺寸范围从12“dia平方
。特?2“x 12”和3毫米厚玻璃基松/span>
。互换抛掷和面具
。空气轴承真空吸盗/span>
。接?15-20umgap): & lt; 3.0 - 5.0,柔?/span>触点:2.0um,硬触点:1um咋/span>真空接点:?.5um
。对齐模块X Y,和Z轴和
。双通道光学反馈
。只提供正面接触w / IR选项
。仅在桌面选项可用,适用于研发和独立的工佛/span>
。占用空间小
。适用于生物学、微机电系统、半导体和Microfludics CLiPP应用程序
Model 212 Table Top Mask Aligner System
Output Spectra Range: Hg: G (436nm) H (405nm) I(365nm) and 310nm lines Hg-Xe: 260nm and 220nm or LED: 365nm 395nm and 405nm
Lamp Power range from 1000 to 5000W
Option for UVLED (365nm and 405nm) Light Source
Substrate sizes range from 12 dia to sq
Special 12 x 12 and up to 3mm thick Glass Substrates
Interchangeable chucks and mask holders
Air bearing vacuum chuck
。Proximity (15-20umgap ): <3.0 5.0um Soft Contact: <2.0um Hard contact: 1um and vacuum contact : 0.5um
Alignment module X Y and Z axis and theta
Dual-channel optical feedback
Provides Front side exposure only w/ IR Option
Available in Table top option only and applicable for R&D and standalone work
Small Footprint
Applicable for Biology MEMS Semiconductor and Microfludics CLiPP applications
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