韫茂科技双腔室UHV磁控溅射镀膜系�?参数-价格-中国粉体罐�/title>

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$(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); }); }); </script>  <div class="cpjj"> <p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><strong><span style="color: rgb(31, 73, 125); font-size: 20px;">双腔室超高真空双磁控测射系统 QBT-P</span></strong><span style="color: rgb(31, 73, 125); font-size: 20px;"> </span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(31, 73, 125); font-size: 20px;"><br/></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:="" text-align:=""><span style="color: rgb(31, 73, 125); font-size: 20px;"><img src="//www.znpla.com/img1/img/daily/2023/01/12/104859_042724_procont.jpg" title="微信图片_20220223162253.jpg" alt="微信图片_20220223162253.jpg"/></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><strong><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="" color:="" font-size:="">磁控溅射技术原琅�/span></strong></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(0, 0, 0);"><span style="text-indent: 28px; background-color: rgb(255, 255, 255); font-family: arial, helvetica, sans-serif;"> 在阴�?/span><span style="font-family: arial, helvetica, sans-serif;"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="">靶的表面上方形成一个正交电磁场。当溅射产生的二次电子在阴极位降区内被加速为高能电子后，并不直接飞向阳极</span><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="">，而是在正交电磁场作用下作来回振荡的近似摆纾�/span><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="">的运动。高能电子不断与气体分子发生碰撞并向后者转移能量，使之电离而本身变成低能电子。这些低能电�?终沿磁力线漂移到阴极附近的辅助阳极而被吸收，避免高能电子对极板</span><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="">的强烈轰击，消除了二�?/span><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="">溅射中极板被轰击加热和被电子辐照引起的损伤，体现出磁控溅射中极板“低温”的特点。由于外加磁场的存在，电子的复杂运动增加了电离率，实现了高速溅射、�/span></span></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(31, 73, 125); font-family: arial, helvetica, sans-serif;"><span style="color: rgb(51, 51, 51); font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:=""><br/></span></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(51, 51, 51); font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" font-size:="" text-indent:="" background-color:=""><strong><span style="color: rgb(31, 73, 125); font-size: 18px;">磁控溅射技术特炸�/span></strong></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="text-indent: 28px; background-color: rgb(255, 255, 255); font-size: 18px;"><span style="color: rgb(31, 73, 125); font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro=""><strong> </strong></span></span><span style="color: rgb(0, 0, 0); text-indent: 28px; background-color: rgb(255, 255, 255); font-family: arial, helvetica, sans-serif;">成膜速率高，基片温度低，膜的粘附性好，可实现大面�?/span><span style="color: rgb(0, 0, 0);"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="">镀膛�/span></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(0, 0, 0);"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:=""><br/></span></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:="" text-align:=""><span style="color: rgb(0, 0, 0);"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:=""><img src="//www.znpla.com/img1/img/daily/2023/01/12/104859_195783_procont.jpg" title="微信图片_20220223162304.jpg" alt="微信图片_20220223162304.jpg" width="386" height="292"/></span></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(0, 0, 0);"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:=""><br/></span></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><strong><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="" color:="" font-size:="">技术参�?/span></strong></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(0, 0, 0);"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:=""> </span></span></p><table width="688" style="width: 668px;"><tbody style="padding: 0px; margin: 0px;"><tr class="firstRow" style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td colspan="2" width="1134" style="padding: 8px; margin: 0px; line-height: 1.42857; font-weight: bold; font-size: 18px; vertical-align: middle !important;">QBT-P 技术参� Technical Specifications （超导Ta/TiN/NbN/Al/Nb等制备）</td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">超高真空腔体 UHV Chamber</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">2个UHV Chamber,包括Loadlock及Sputtering, 极限真空Ultimate Pressure<3E-9Torr</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">排气速率Pumping Spead</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">从ATM�?E-7Torr<20min (loadlock)</td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">基板加热 Wafer Heating</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">RT-900oC</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">离子束清� Ion Milling</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">考夫曼离子源, Ion Energy 100-600eV, 100-1200eV; Ion Beam Current:20-200mA, Ф100基板刻蚀均一�?lt;3%</td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">磁控溅射Sputtering</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">DC or RF Power Supply, 基板与靶材距离连续可调Wafer and Target Space can Change Continoulsly</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">基板传输 Wafer Transfer</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">高度可靠和可重复的基板传输能劚�/td></tr><tr style="padding: 0px; margin: 0px;"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">人机界面 HMI</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">全自动化人机操作界面</td></tr><tr style="padding: 0px; margin: 0px; background-color: rgb(242, 242, 242);"><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">安全Safety</td><td style="padding: 8px; margin: 0px; line-height: 1.42857; vertical-align: middle !important;">工业标准安全互锁Industry Safety Interlock，报警Alarm，EMO</td></tr></tbody></table><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(0, 0, 0);"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:=""></span></span><br/></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><strong><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:="" color:="" font-size:="">工艺展示</span></strong><span style="color: rgb(0, 0, 0);"><span style="font-family: " helvetica="" pingfang="" hiragino="" sans="" microsoft="" wenquanyi="" micro="" text-indent:="" background-color:=""><br/></span></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:=""><span style="color: rgb(31, 73, 125); font-size: 20px;"><br/></span></p><p style="clear: both; color: rgb(89, 89, 89); font-family: 微软雅黑, " microsoft="" white-space:="" text-align:=""><span style="color: rgb(31, 73, 125); font-size: 20px;"><img src="//www.znpla.com/img1/img/daily/2023/01/12/104859_314044_procont.jpg" title="微信图片_20220223162258.jpg" alt="微信图片_20220223162258.jpg"/></span></p><p><br/></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; font-size: 14px; margin: 10px 0 0; line-height: 26px;"> 厦门韫茂科技有限公司凭借在先进材料设备业务方面多年的经验，韫茂为新型芯片，半导体和锂电池领域的新材料开发和生产，提�?**的纳米工艺设备和服务解决方案。根据您的特殊需求，我们为您定制打造创新纳米加工平台，保证高品质的设计，多功能，易于使用的界面，严格的安全控制，以及快速的交付和服务� </p> </div>  <div class="xgfa"> <div class="xgfa_tit"> <div> <span></span>相关方案 </div> </div> <div class="xgfa_box" style="display: block;"><div style="padding:10px;">暂无相关方案、�/div> </div> </div> <script> $(function(){ // 切换 $(".xgfa_tit_ul li").hover(function(){ $(".xgfa_tit_ul li").css({"color":"#4F5862","border-bottom-color":"transparent"}); $(this).css({"color":"#1479d7","border-bottom-color":"#1479d7"}); var _index = $(this).index(); $(".xgfa_box").css("display","none"); $(".xgfa_box").eq(_index).css("display","block"); }); }); </script>  <div class="xgzl"> <div class="cxd_tit"><span></span>相关资料</div> <div class="xgzl_box"><div style="padding:10px;">暂无数据、�/div> </div> </div>  <div class="yhpl"> <div class="cxd_tit"><span></span>用户评论</div> <form id="FormComments" action="" method="post" onsubmit="return false"> <input name="SaveProComments" id="SaveProComments" type="hidden" value="yes" /> <input name="ProductID" id="ProductID" type="hidden" value="183208" /> <input name="ProQuality" id="ProQuality" type="hidden" value="10" /> <input name="ProService" id="ProService" type="hidden" value="10" /> <input name="ProUsability" id="ProUsability" type="hidden" value="10" /> <input name="ProCostperformance" id="ProCostperformance" type="hidden" value="10" /> <div class="yhpl_pf"> <div> <p>产品质量</p> <div><span id="Quality" class="stars star10"></span><span id="Quality_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>售后服务</p> <div><span id="Service" class="stars star10"></span><span id="Service_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>易用�?/p> <div><span id="Usability" class="stars star10"></span><span id="Usability_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> <div> <p>性价毓�/p> <div><span id="Costperformance" class="stars star10"></span><span id="Costperformance_Val" class="ScoreVal" curScore="10">10刅�/span></div> </div> </div> <div class="yhpl_pftit">评论内容</div> <textarea name="Comments" id="ProComments" onfocus="checklogin();" placeholder="分享产品使用经验/采购评价（不超过500字）">