贝意克智能型双温区等离子化学气相沉积系统-参数-价格-中国粉体罐�/title>

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style=";font-family:楷体;color:rgb(0,0,0);font-weight:bold;font-size:19px"><span style="font-family:楷体">主要特点</span></span></strong></p><p><span style=";font-family:楷体;font-size:16px"><span style="font-family:楷体">　　一、智能型双温区等离子化学气相沉积系统设备的高温真空电阻炉温度控制系统采用经典的闭环负反馈控制系统，控温仪表选用智能型程序温度调节仪表控温，电力调制器控刵�/span>;负载采用小电压大电流控制，从而大大提高了发热元件的寿命，测温元件采用 K 型热偶�?0段可编程控温，PID参数自整定，操作界面�?0寸工控电脑，内置PLC控制程序，可将温控系统、滑轨炉滑动(时间和距�?设定为程序控制。同时系统设置了超温� 欠温、断偶报警保护功能，大大降低了对操作人员经验的要求，关键电气元件采用优质的进口产品，做到高性能、免维护，提高了设备质量的可靠性、�/span></p><p><span style=";font-family:楷体;font-size:16px"><span style="font-family:楷体">　　二�?/span>PECVD是借助于辉光放电等方法产生等离子体，辉光放电等离子体中：电子密度高109-1012cm3电子气体温度比普通气体分子温度高�?0-100倍，使含有薄膜组成的气态物质发生化学反应，从而实现薄膜材料生长的一种新的制备技术。通过反应气态放电，有效地利用了非平衡等离子体的反应特征，从根本上改变了反应体系的能量供给方�?低温热等离子体化学气相沉积法具有气相法的所有优点，工艺流程简单、�/span></p><p><span style=";font-family:楷体;font-size:16px"> 三、配有可加热�?00℃的前端预加热炉，辅助固态源蒸发，后端为双温� ，温度控制精确，操作简便，对于气相沉积，二维材料，等离子处理生长工艺非常合适，也同样适用于要求快速升降温的CVD实验、�/span></p><p><strong><span style=";font-family:楷体;color:rgb(0,0,0);font-weight:bold;font-size:19px"><span style="font-family:楷体">技术参�?/span></span></strong></p><table width="100" cellspacing="0"><tbody><tr class="firstRow"><td style="padding:0 0 0 0 ;border-left:1px outset windowtext;border-right:1px outset windowtext;border-top:1px outset windowtext;border-bottom:1px outset windowtext" valign="center"><p><strong><span style=";font-family:楷体;color:rgb(0,0,0);font-weight:bold">预热器参数：</span></strong></p></td><td style="padding:0 0 0 0 ;border-left:none;border-right:1px outset windowtext;border-top:1px outset windowtext;border-bottom:1px outset windowtext" valign="center"><p><span style=";font-family:楷体;font-size:16px">工作温度�?00ℂ�/span></p><p><span style=";font-family:楷体;font-size:16px">zui</span><span style=";font-family:楷体;font-size:16px">高温度：1100ℂ�/span></p><p><span style=";font-family:楷体;font-size:16px">zui</span><span style=";font-family:楷体;font-size:16px">快升温速率：≤30�?min</span></p><p><span style=";font-family:楷体;font-size:16px">推荐升温速率�?0�?min</span></p><p><span style=";font-family:楷体;font-size:16px">控温方式：智能化30段可编程控制</span></p><p><span style=";font-family:楷体;font-size:16px">工作电压：AC220V</span></p><p><span style=";font-family:楷体;font-size:16px">额定功率�?00W</span></p><p><span style=";font-family:楷体;font-size:16px">控温精度：�?ℂ�/span></p><p><span style=";font-family:楷体;font-size:16px">加热元件：电阻丝</span></p></td></tr><tr><td style="padding:0 0 0 0 ;border-left:1px outset windowtext;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><strong><span style=";font-family:楷体;color:rgb(0,0,0);font-weight:bold">加热区参数：</span></strong></p></td><td style="padding:0 0 0 0 ;border-left:none;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><span style=";font-family:楷体;font-size:16px">加热元件:电阻丝（Fe-Cr-Al Alloy doped by Mo（�/span><span style="font-family:楷体;font-size:16px"><br/></span><span style=";font-family:楷体;font-size:16px">加热区长度：400mm�?00+200mm（�/span><span style="font-family:楷体;font-size:16px"><br/></span><span style=";font-family:楷体;font-size:16px">恒温区长�? 200mm (100+100mm)（�?℃）</span><span style="font-family:楷体;font-size:16px"><br/></span><span style=";font-family:楷体;font-size:16px">工作温度�?100ℂ�/span><span style="font-family:楷体;font-size:16px"><br/></span><span style=";font-family:楷体;font-size:16px">zui</span><span style=";font-family:楷体;font-size:16px">高温度：1200ℂ�/span><span style="font-family:楷体;font-size:16px"><br/></span><span style=";font-family:楷体;font-size:16px">控温方式：模糊PID控制和自整定调节，智能化30段可编程控制，具有超温和断偶报警功能</span><span style="font-family:楷体;font-size:16px"><br/></span><span style=";font-family:楷体;font-size:16px">控温精度:±1ℂ�/span></p><p><span style=";font-family:楷体;font-size:16px">zui</span><span style=";font-family:楷体;font-size:16px">大升降温速率：≤30�?min</span></p><p><span style=";font-family:楷体;font-size:16px">炉管：高纯度石英管�?5\50\60\80\100\150x2000mm (管径可�?</span></p><p><span style=";font-family:楷体;font-size:16px">标准配件：石英管1支，莫来石管�?对，不锈钢法�?套，氟胶密封�?套，高温手套1副，坩埚�?支；</span></p><p><span style=";font-family:楷体;font-size:16px">尺寸约：2000×600×1500 mm（长、宽、高（�/span></p><p><span style=";font-family:楷体;font-size:16px">备注：可选配单温区、双温区、三温区等加热区、�/span></p></td></tr><tr><td style="padding:0 0 0 0 ;border-left:1px outset windowtext;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><strong><span style=";font-family:楷体;color:rgb(0,0,0);font-weight:bold">气路系统参数９�/span></strong></p></td><td style="padding:0 0 0 0 ;border-left:none;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><span style=";font-family:楷体;font-size:16px">质量流量计参考量程（N2)�?00sccm�?00sccm�?00sccm （量程可选）</span></p><p><span style=";font-family:楷体;font-size:16px">准确度：±1.5%</span></p><p><span style=";font-family:楷体;font-size:16px">线性：±0.5�?.5%</span></p><p><span style=";font-family:楷体;font-size:16px">重复精度：�?.2%</span></p><p><span style=";font-family:楷体;font-size:16px">响应时间：气特性：1�? Sec，电特性：10 Sec</span></p><p><span style=";font-family:楷体;font-size:16px">工作压差范围�?.1�?.5 MPa</span></p><p><span style=";font-family:楷体;font-size:16px">zui</span><span style=";font-family:楷体;font-size:16px">大压力：3MPa</span></p><p><span style=";font-family:楷体;font-size:16px">接口：�?,1/4''</span></p><p><span style=";font-family:楷体;font-size:16px">显示�?位数字显礹�/span></p><p><span style=";font-family:楷体;font-size:16px">工作环境温度:5~45高纯气体 </span></p><p><span style=";font-family:楷体;font-size:16px">内外双抛不锈钢管：�?</span></p><p><span style=";font-family:楷体;font-size:16px">压力真空表：�?.1�?.15 MPa, 0.01 MPa/栻�/span></p><p><span style=";font-family:楷体;font-size:16px">截止阀：�?</span></p><p><span style=";font-family:楷体;font-size:16px">连接头类型：双卡套不锈钢接头、�/span></p><p><span style=";font-family:楷体;font-size:16px">备注：可选配一路、两路、三路、四路等以上质量流量计、�/span></p></td></tr><tr><td style="padding:0 0 0 0 ;border-left:1px outset windowtext;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><strong><span style=";font-family:楷体;color:rgb(0,0,0);font-weight:bold">低真空系统参数：</span></strong></p></td><td style="padding:0 0 0 0 ;border-left:none;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><span style=";font-family:楷体;font-size:16px">国产油泵型号：BSV-10</span></p><p><span style=";font-family:楷体;font-size:16px">抽速：10m³/h</span></p><p><span style=";font-family:楷体;font-size:16px">极限真空度：5*10-1pa</span></p><p><span style=";font-family:楷体;font-size:16px">电源�?20v 50hz</span></p><p><span style=";font-family:楷体;font-size:16px">电机功率�?.4kw </span></p><p><span style=";font-family:楷体;font-size:16px">进排气连接口：KF25</span></p><p><span style=";font-family:楷体;font-size:16px">用油量：1.1L</span></p><p><span style=";font-family:楷体;font-size:16px">电机转速：1440rpm</span></p><p><span style=";font-family:楷体;font-size:16px">工作环境温度�?-40ℂ�/span></p><p><span style=";font-family:楷体;font-size:16px">噪音：≤56db</span></p><p><span style=";font-family:楷体;font-size:16px">电阻真空计参数：</span></p><p><span style=";font-family:楷体;font-size:16px">1.配用规管：ZJ-52T电阻规，</span></p><p><span style=";font-family:楷体;font-size:16px">2.测量范围� 10 5 �?0 -1 Pa＋�/span></p><p><span style=";font-family:楷体;font-size:16px">3.测量路数� 1�?/span></p><p><span style=";font-family:楷体;font-size:16px">4.控制范围� 5×10 3 �?×10 -1 Pa＋�/span></p><p><span style=";font-family:楷体;font-size:16px">5.控制方式：继电器触点输出，负载能� AC220V/3A (或DC28V/3A)无感负载＋�/span></p><p><span style=";font-family:楷体;font-size:16px">6.电源� 90-260V/50Hz�?20V ± 10% 50Hz＋�/span></p><p><span style=";font-family:楷体;font-size:16px">7.功耗： 20W</span></p></td></tr><tr><td style="padding:0 0 0 0 ;border-left:1px outset windowtext;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><strong><span style=";font-family:楷体;color:rgb(0,0,0);font-weight:bold">射频源主要参数：</span></strong></p></td><td style="padding:0 0 0 0 ;border-left:none;border-right:1px outset windowtext;border-top:none;border-bottom:1px outset windowtext" valign="center"><p><span style=";font-family:楷体;font-size:16px">信号频率�?3.56 MHz±0.005%</span></p><p><span style=";font-family:楷体;font-size:16px">功率输出范围�?-500W</span></p><p><span style=";font-family:楷体;font-size:16px">zui</span><span style=";font-family:楷体;font-size:16px">大反射功玆�100W</span></p><p><span style=";font-family:楷体;font-size:16px">射频输出接口�?0 Ω, N-type, female</span></p><p><span style=";font-family:楷体;font-size:16px">功率稳定性：�?W</span></p><p><span style=";font-family:楷体;font-size:16px">谐波分量：≤-50dbc</span></p><p><span style=";font-family:楷体;font-size:16px">供电电压：单相交流（187V-253V�?nbsp;频率50/60HZ</span></p><p><span style=";font-family:楷体;font-size:16px">整机效率�?gt;=70%</span></p><p><span style=";font-family:楷体;font-size:16px">功率因素�?gt;=90%</span></p><p><span style=";font-family:楷体;font-size:16px">冷却方式：强制风冶�/span></p><p><strong><span style=";font-family:楷体;font-weight:bold">备注：可根据腔体大小选择射频源功率、�/span></strong></p></td></tr></tbody></table><p><br/></p> </div>  <div class="cxd"> <div class="cxd_tit"><span></span>创新炸�/div> <p style=" color: #333; 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